Modular Type Lubricator Series AL

Note 3) Bowl assembly for AL30 to AL60 comes with a bowl guard (steel band material). 52 AL10 to 60 Dimensions AL10 AL20 L D Bracket (option) G F Port size K M A Port size C B R C J H OUT OUT IN OUT OUT IN B R P Min. clearance for maintenance Min. clearance for maintenance A AL50, 60 AL30, 40 L D D L Port size Bracket (option) Bracket (option) G F G F Port size M K M K E J C B R C B R H

Multistage Ejector Series ZL

E EB EE For EE (ZSE4E) With digital vacuum pressure switch Lead wire length 0.6 (3.0)m Lead wire length 0.6 (3.0)m Lead wire length 0.6 (3.0)m 27 26 67 NPN output Analog output PNP output Not required for nil, vacuum adapter (GN) and vacuum pressure gauge (G).

ZSE F/ISE

Confirmation of atmospheric pressure of load lock Data Special fitting types are used in semiconductor production equipment (Metal gasket seal fittings) Leak rate: 1 x 10 10 Pa.m3/s ZSE/ISE60(F)-A2 ZSE/ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (Metal gasket seal fittings) Variations R 1/ 4, NPT 1/4, G

VXA21/22

11 0.50 0.40 0.40 0.45 0.50 0.40 0.38 0.38 1.1 1.8 2.3 0.75 1.1 1.8 2.8 2.8 6 8 1.5 0.4 340 10 4.5 6 8 250 1.0 3 8 (10A) 340 0.4 10 10 1 2 (15A) 420 Note) Refer to Glossary on page 17-3-15 for details of max. operating pressure differential and max. system pressure.

PF3W7x.eng

Supply power : Arbitrary display [F 0] Piping port (OUT side) With units selection function [ Unit] Display unit setting [ G] gal/min, oC Accumulated value is displayed (Power value is displayed) Peak hold temp. set value Bottom hold temp. set value Fluid temp.

MGP

MGP M 25 30 M9BW M L A S 2 S 1 n n ( 12 12mm 40 40mm 16 16mm 50 50mm 20 20mm 63 63mm 25 25mm 80 80mm 32 32mm 100 100mm A (MGPM,L,A 16100) M5X0.8 Rc N NPT TF G (mm) 2. (mm) MGP12,16,20,25,32,40,50,63,80,100 MGP-A 16,20,25,32,40,50,63,80,100 MGPS50,80 3.

MU

B L F G C D Basic style Axial foot style Rod side flange style Head side flange style Single clevis style Double clevis style MU Nil Without auto switch (Built-in magnet) Auto switch DFor the applicable auto switch model, refer to the table below. Auto switches are shipped together, (but not assembled).

Wireless System

Wireless System RoHS Usable even in welding environments High-speed connection Noise resistance Communication response Signal response time: 5 ms Uses the 2.4 GHz ISM frequency band Frequency hopping: Every 5 ms From power supply ON to start of communication: Min. 250 ms*1 *1 For wireless slave Communication cables not required Compatible protocol Number of I/O points Reduced wiring work,

MU

B L F G C D Basic style Axial foot style Rod side flange style Head side flange style Single clevis style Double clevis style MU Nil Without auto switch (Built-in magnet) Auto switch DFor the applicable auto switch model, refer to the table below. Auto switches are shipped together, (but not assembled).

Compact Guide Cylinder End Lock Type SeriesMGP

Models Standard strokes (mm) 32 40 50 63 MGP 25, 50, 75, 100, 125, 150, 175 200, 250, 300, 350, 400 M L Intermediate strokes (in 5mm increments) are produced by installing spacers of 5, 10, 15 and 20mm widths. When a special intermediate stroke body is needed, contact SMC.

Ambient Dryer Series AMG

AMG 650 s5o) AMG 250 N I Body Size.

MU

Additional weight 0.23/50 stroke Stroke 100 stroke 0.46 + 100 / 50 X 0.23 = 0.92kg Standard Stroke (mm) Size Standard stroke Max. stroke(mm) 25, 32, 40 50, 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 75, 100, 125, 150, 175, 200, 250, 300 300 Contact SMC for any intermediate strokes that are not indicated above, as they will be produced upon receipt of order.

FC2W-X110

Turn power off and then on again. 1.6 Over current 500 ms 500 ms 0 1.0 5.0 1.3 1.2 Input signal Voltage [V] Flashing: Two ashing cycles of 250 ms at two-second intervals Error automatically resets when the supply ow rate is recovered (LED goes off). Insufcient supply ow rate Flow rate control Position control (Fully closed) 250 ms 250 ms 2000 ms 1 A

Air Catch Sensor

This should conclude the calibration. g Confirm calibration setting by removing the gap gauge from the nozzle. The LED Green 1 should go off.

Siiiil"Tivrc

AMG 650 s5o) AMG 250 N I Body Size.

AMD

Local Area: (800) 258-9200-www.stevenengineering.com Label Model Connection (Flange) 2B 2B, 3B, 4B 400 A 280 B 760 D 150 E 270 F 1033 G 3 H 887 J 6B C 620 AMD801 AMD901 445 795 300 520 1318 3 972 12B AMD800/900/1000 ORIENTATION holes Label Drain Model Connection (Flange) 2B, 3B 8B C 2B, 3B, 4B 500 A 300 B 300 D 1300 E 1430 F 1520 G 20 H 720 M16 x l 400 Anchor bolt M20 x l 500 AMD800 AMD900

Bag Filter

T2 T1 I 8 x D FGD FGE H G FGG P.C.D B E F FGA C A (mm) Applicable model G H I Part No.

AIR CYLINDER

267 330 Foot: 231 207 253 L G 193 172 212 144 126 156 109 94 118 90 78 97 Rod side Frang e F Head side flange 433 386 476 Foot: 334 297 367 L G 281 250 309 210 185 229 160 141 175 134 117 129 8 - 5) Theoretical output Table 3.

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Symbol AMD 4.6-7 Micro Mist Separator Series AMD AMD150 to AMD850 How to Order AMD 250 03 J B Body size Options J Drain guide 1/4B female thread R IN R OUT reversal 150 1 8 250 1 4 350 3 8 450 1 2 550 3 4 650 1 850 11 2 Accessories(Options) Symbol Description None Bracket T Element service indicator B N.C. auto drain C N.O. auto drain D Please refer to p.4.7-7 regarding How to Order of case

AMG

guide 1/4B female thread R IN-OUT reverse direction 1/8 1/4 3/8 1/2 3/4 1 150 250 350 450 550 650 850 11/2 Removed rate of water % = HA Removed water (Water droplet) g x 100 Accessories (Options) Inflowed water (Water droplet) g Symbol Description No accessories Bracket AT Various equipment for drain discharge B IDl Thread N.C. auto drain C Rc (PT) N.O. auto drain D AMG F G(PF) N NPT Please