Material: Body: Stainless Steel 304; O-ring: NBR, Element Length: D [ℓ1000 (ℓ250 x 4)], Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 50 μm, Element Seal Material: Vessel Replacement or Fiber Element Types, Option: G46-10-02X3, Stainless Steel at Wetted Parts

Material: Body: Stainless Steel 304; O-ring: FKM, Element Length: D [ℓ1000 (ℓ250 x 4)], Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 50 μm, Element Seal Material: Vessel Replacement or Fiber Element Types, Option: G46-10-02X3, Stainless Steel at Wetted Parts

Material: Body: Stainless Steel 304; O-ring: NBR, Element Length: D [â„“1000 (â„“250 x 4)], Element Type: Vessel Replacement Only, Nominal Filtration Accuracy: Vessel Replacement Only, Element Seal Material: Vessel Replacement or Fiber Element Types, Option: G46-10-02X3, Stainless Steel at Wetted Parts

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

} 1.6 (20) 15 EB P EA 2 x 2.2 (Positioning for manifold gasket) 27.2 (45) L plug connector with cover (LL) 3 52-SY5420-LL-01 (-F2) 5 L 156 (Lead wire length) Insulation: Red (+) Insulation: Black () 5.9 4.1 14.7 12 0.3 mm2 84.3 Cable type (TT) 3 52-SY5420-TT-01 (-F2) 5 Max.10 L (Lead wire length) 189.6 Lead wire marking No.1 (+), No.2 () 0.75 mm2 101.1 7 ATEX Compliant Body Ported Type Series

VK3000

Refer to external dimensions in pages 3-2-4 to 3-2-10, and then mount it. VFN 48 V DC None Z Precautions Plug a connector in or out vertically, never at an angle. How to Calculate the Flow Rate S 6 V For obtaining the flow rate, refer to page 3-1-10.

3 Port Air Operated Valve Series SYJA300 1

(Example) SS3YJA7-41-03-01. 1 set SYJA714 . 2 sets SYJ700-10-2A . 1 set (Example) SS3YJA5-40-03-01. 1 set SYJA514 . 2 sets SYJ500-10-3A . 1 set The asterisk denotes the symbol for assembly.

PFxx-OMJ0005CN

8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 36.3 C6 6 10.3 8.3 C8 8(5/16) 12 37 C8 8(5/16) 12 10 N7 1/4 10.3 36.3 N7 1/4 10.3 8.3 PFM7-01/02--X694 PFM7S-01

5 Port Air Operated Valve Series SYA3000/5000/7000 1

1/8 (A, B port) 5-2-11 10 Series SYA3000/5000/7000 Series SYA5000: Body Ported SYA5220-01 2 position double SYA5220(-F2) C4, N3 C6, N7 C8, N9 1/8 (A, B port) M5 x 8 (Pilot port) 2 3.2 (For manifold mounting) One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" 6, 1/4" 8, 5/16" Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650

PSxx-OMU0005CN

HNBR C3604 SUS304NBR POMSUS304NBRC3604 24 g 34 g 36 g 30 g 30 g +39 g 0.15 mm 2(AWG26) 1.0 mm (5 ) 3.5 -78No.PS-OMU0005CN-C M5 7 3.5 01/N01 A 01 R1/8 10 N01 NPT1/8 12 C4LC6L 4 A B C4L 17.5 8.2 C6L 18.3 10.4 -79No.PS-OMU0005CN-C A B -80No.PS-OMU0005CN-C 0.5~7 + 0.5~7 -81No.PS-OMU0005CN-C 2 (n ) <> <> 31n +3.5(n -1) 31n +3.5(n -1) -82No.PS-OMU0005CN-C Revision history A [2018

ZSE30A(F)/ISE30A

Option Note ZS-38-A1 ZS-38-A2 ZS-38-A3 ZS-27-C ZS-27-D ZS-27-01 ZS-38-3L ZS-38-4L ZS-38-3G ZS-38-4G ZS-38-5L ZS-38-U ZS-38-C4H ZS-38-C6H ZS-38-N7H ZS-38-C4L ZS-38-C6L ZS-38-N7L Bracket A Bracket B Bracket C Panel mount adapter Lead wire with connector (with connector cover) Lead wire with a connector for copying Lead wire unit with a connector for copying One-touch fittings 4 mm straight

Table of Contents

(Including band and screw) Operating Range Bore size (mm) Bore size (mm) Auto switch model Auto switch model 20 25 32 40 50 20 25 32 40 50 D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 D-B7/B80 BMA2 -025 BMA2 -032 BMA2 -040 BMA2 -050 BMA2 -020 10 8 10 9 10 D-B73C/B80C D-C7/C80 BA -32 BA -04 BA -05 BA -01 BA -02 10 8 10 9 10 D-C73C/C80C D-B5/B64 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 10 8

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

Metric size Inch size Control 3.2 23 01 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" Meter-out Meter-in 0 1 04 06 08 10 12 03 05 07 09 11 13 4 6 8 10 12 With One-touch fitting Use 1/8" tube. 15-9-92 2 Tamper Proof Speed Controller With One-touch Fitting, Elbow Type/Universal Type Needle Valve/Flow Characteristics AS121F AS131F AS221F-01 AS231F-01 AS221F-02 AS231F-02 Inlet pressure: 0.5 MPa Inlet

SYA3000/5000/7000

Model/Series SYA340 (Base mounted) Valve model Type of actuation Port size Flow characteristics Note 1) Mass Note 2) Pilot port size b 4/2 5/3 (A/B EA/EB) 1 4/2 (P A/B) (g) Cv b Cv C (dm3/ (sbar) ) C (dm3/(sbar) ) 69 (34) 71 (36) Single Double 2 position 0.30 1.0 0.24 1.1 0.30 0.26 0.28 0.18 0.85 0.30 0.77 M5 x 0.8 0.19 Closed center Exhaust center Pressure center SYA340-01 1 8 3 position

5 Port Air Operated Valve SYA3000/5000/7000 Series

Model/SYA340 Series (Base mounted) Valve model Type of actuation Port size Flow rate characteristics Note 1) Weight Note 2) Pilot port size b 4/2 5/3 (A/B EA/EB) 1 4/2 (P A/B) (g) C[dm3/(sbar)] C[dm3/(sbar)] Cv b Cv 69 (34) 71 (36) 2 position Single Double 0.30 1.0 0.24 1.1 0.30 0.26 0.28 0.18 0.85 0.30 0.77 M5 x 0.8 0.19 Closed center Exhaust center Pressure center SYA340-01 1 8 3 position

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Flow Direction Symbols on Body Flow Rate and Effective Area Meter-out type Meter-in type AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Model Symbol JIS Symbol Metric size 3.2, 4, 6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Tubing O.D. 1/8", 5/32" 1/8" 3/16", 1/4" 1/4", 5/16" 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 3/16", 1/4" Controlled

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

0.25 to 0.7 Ambient and fluid temperature (C) 10 to 50 (No freezing.

Vacuum Unit

C C1 L L1 L2 L3 L Individual wiring V V V V F D-sub connector V V P Flat ribbon cable connector V V 8 (Common PV) 6 (Common PS) P Vacuum pump system PN 5/16"(Common PV) 1/4" (Common PS) 10 10 stations 1 Common wiring F/P is available only for solenoid valve wiring. Individual wiring is specified for vacuum switches and sensors.

Shock Absorbers and Rate Controls

l o E g ::.: # 2A 1 0 0 : 0 0.2 0.4 0.6 0.8 I 1.2 1.4 1.6 TOTAL ENEFIGY (in bs/c) (Ihousaids) TOTAL ENEFGY (inrbs,t) .,,' 9 . . ' . r n I c { d E o 8 E , d o . i E i d TOTAL ENEFIGY (iN]bS/C) (Thousands) TOTAL ENERGY (rnlbsc) |o c{ N 0 E o. 5 5 m TOTAL ENERGY (in'lbebJ rTho!sands) l{ote Minimum impact velocity fol PRO modls is 10 in./sec.

5 Port Solenoid Valve Series SV

dm3/(sbar)] C[dm3/(sbar)] Cv Cv b b C6 SS5V1-10 C8 0.96 0.24 0.28 0.26 0.35 1.1 C8 SS5V2-10 C10 2.1 0.46 0.48 0.20 0.18 2.4 C10 SS5V3-10 C12 4.2 0.91 0.93 0.22 0.21 4.3 C12 SS5V4-10 C12 6.2 1.3 1.6 0.19 0.18 7.0 Note) Value is for manifold base with 5 stations and individually operated 2 position type. 2 Valve Manifold Common Specifications Series SV Series SV Solenoid Valve Specifications

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

A L D VQZ D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 VQD Color: White VZS VFS EXH port silencer VS 63 Silencer is installed in the EXH port.