SYJ300-OMU0003

3 58 Ass'y Assy Assy SY3000-37-80A-5 A 18 21,32SA SS5YJ3SY3000-37-80A-2 B SY3000-37-80A-7 A 916 SY3000-37-80A-4 B SY3000-37-80A-5 A 18 SY3000-37-80A-2 B 20,40, 42,43SA SS5YJ5SY3000-37-80A-7 A 912 SY3000-37-80A-4 B SY3000-37-80A-9 A 1316 SY3000-37-80A-7 B SY3000-37-80A-7 A 18 SY3000-37-80A-3 B 21,41SA SS5YJ7SY3000-37-80A-10 A 912 SY3000-37-80A-6 B SY3000-37-80A-12 A

ZR

Rc 1/8 IN port Rc 1/8 Out port 1 1 Bracket C Bracket C Note) 1 Dimensions for mounting bracket C Bracket C part no. : P3270155 13-3-20 20 Series ZR Large Size Vacuum Module: Ejector System ZX ZR ZM ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY ZQ ZF

PA300/500/700

(Value in the initial stage) Flow Characteristics/Weight Flow characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) (1) Port size Weight (kg) Series Model C [dm 3/(sbar)] C [dm 3/(sbar)] C [dm 3/(sbar)] C [dm 3/(sbar)] b Cv b Cv b Cv b Cv VPA342 (Body ported) 3.3 4.0 0.83 0.92 0.83/0.83 0.86/0.88 1.7 2.2 1.9/1.8 2.1/2.0 3.1 3.7 3.2/3.2 3.6/3.7 0.93 1.1 0.89/0.89 1.0/0.95 2.0 2.5

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

Inch size 1/8" 5/32" 1/4" 5/16" 1/8" 5/32" 1/4" 5/16" 3/8" 1/4" 5/16" 3/8" 3/8" 1/2" Free flow 0.4 0.6 0.6 0.7 1.0 1.3 1.5 1.6 1.7 2.5 4.4 4.8 C values: Sonic Caution conductance Controlled flow 0.4 0.7 0.8 0.6 0.9 1.3 2.1 2.4 3.3 4.4 4.9 dm3/(sbar) Be sure to read this before handling the products.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

rate l/min (ANR) (SCFM) Note 3) 12 (0.42) 25 (0.88) 50 (1.8) 75 (2.6) 125 (44) Inlet air pressure MPa (psi) 0.7 (101) Inlet air temperature C (F) 25 (77) 25 (77) 25 (77) 1l/min (ANR) (0.03SCFM) {inlet air pressure at 0.7MPa} (101psi) Inlet air saturation temperature C (F) Ambient temperature C (F) Dew point indicator purge air flow rate Port size (nominal size B) 1/4, 3/8 1/8, 1/4 Weight

PSE530/200

When setting the pressure, allow 7 digits or more.

High Precision Digital Pressure Switch, Series ZSE40/ISE40

600 (3000) 3.5 12.4 7 7.8 2.5 2.6 30 14 15.2 10.7 4.5 For splash proof use (IP65), insert an air tube into the atmospheric release port. 1.5 01: R 1/8 T1: NPT 1/8 (Refer to Specific Product Precautions 4 on the back cover for details.)

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depth 4 6.4 12 18.35 Atmospheric release port Lead wire length 600 (3000) 3.5 12.4 7 7.8 2.5 2.6 30 14 15.2 10.7 4.5 * For splash proof use (IP65), insert an air tube into the atmospheric release port. 1.5 01: R 1/8 T1: NPT 1/8 (Refer to Specific Product Precautions 4 on the back cover for details.)

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

60

SUP. 3 1 2 3 1 2 3 1 2 E Padlock mounting position D C SUP J 2 2 x K A T IN OUT AA 3 L 2 x P1 (Port size) B V BB U Built-in silencer (Option) M (Width across flats) 3 N P2 (Port size) Q EXH Y Bracket (Option) R S X W Dimensions (mm) Standard specifications Model P1 P2 A B C D E F G H I J K L M 1/8, 1/4 1/4, 3/8 1/8 1/4 3/8 1/2 1/2 66.4 80.3 104.9 110.4 134.3 22.3 29.4 38.5 42 53 40 53 70

PSE200

When setting the pressure, allow 7 digits or more.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

C Ambient temperature C Dew point indicator purge air flow rate Port size (nominal size B) 1/4, 3/8 1/8, 1/4 Weight kg (with bracket) 0.25 (0.31) 0.43 (0.51) 0.66 (0.76) 0.74 (0.87) 0.77 (0.90) Note 1) With no freezing Note 2) ANR indicates the flow rate converted to the value for 20C at atmospheric pressure.

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Port size AS-D U01 Uni 1/8 U02 Uni 1/4 U03 Uni 3/8 U04 Uni 1/2 AS-T ASP Needle Valve/Flow Rate Characteristics ASN AS2201FSl-U02, AS2211FSl-U02 AS2201FSl-U01, AS2211FSl-U01 300 600 AQ Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 500 ASV 06, 07, 08, 09, 10 08, 09, 10, 11 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 03, 04 06, 07 200 400 AK 01, 23 300 VCHC 03, 04 100 200 ASR ASQ 01, 23

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

U S C E Padlock mounting position D C Padlock mounting position D SUP. SUP A B A B IN OUT IN OUT 2 1 3 EXH. EXH.

3M/SMseries

Pod NVF3000 NVF5000 Supply SUP Cylindet cYL.1, CYL.2 A , B Exhaust EXH.1, EXH.2 Rl, R2 Symbol (SirEle solenoid) l c 1 : c Y L . 1 l IC2:CYL.2 lEl :EXH.r I {E2:EXH.2] Lubricant 1.

Pressure Gauge: ø42 Outside Diameter, Back Side Thread, Display Pressure: 0.7MPa, Connection Thread: R 1/4, M5 Female, Attachment: Clear Cover Non Removable, Wrench Tighten, Option: Nickel Plated

Pressure Gauge: ø42 Outside Diameter, Back Side Thread, Display Pressure: 0.7MPa, Connection Thread: R 1/4, M5 Female, Attachment: Clear Cover Non Removable, Wrench Tighten, Option: X3 [Wetted Parts Stainless Steel (Movable Parts Inside are Brass)]

Pressure Gauge: ø42 Outside Diameter, Back Side Thread, Display Pressure: 0.7MPa, Connection Thread: R 1/8, M5 Female, Attachment: Clear Cover Non Removable, Wrench Tighten, Option: X4 [Oil-free (Wetted Parts Degrease Washing)]

Pressure Gauge: ø42 Outside Diameter, Back Side Thread, Display Pressure: 0.7MPa, Connection Thread: R 1/4, M5 Female, Attachment: Clear Cover Non Removable, Wrench Tighten, Option: X4 [Oil-free (Wetted Parts Degrease Washing)]

Pressure Gauge: ø42 Outside Diameter, Back Side Thread, Display Pressure: 0.7MPa, Connection Thread: R 1/8, M5 Female, Attachment: Clear Cover Non Removable, Wrench Tighten, Option: X3 [Wetted Parts Stainless Steel (Movable Parts Inside are Brass)]