Compact Type

5 t !5 t r !9 !8 @2 w !4 !2 !0 !0 !6 !6 i u !7 o i u !7 o !3 y !1 e q !3 y !1 q @7 CXSJM20 to 32 CXSJL20 to 32 @5 i u !7 o !5 t !6 r !9 !8 @2 r !9 !8 @2 !6 o i u !7 !5 t #0 Rod cover Head cover Rod cover Head cover Parts List: Standard Piping No. Description Material No.

Air Cylinder NCQ7 Series Compact Cylinder

Female lhread length {"1') is shonerfor the lollowing . 2o0 (2') 1/g & 1A st. 1/s & 1/a st. r/s & 1/a st. l=o.44 25O (2112')' I/s st. r/s st. '/s stl=0.44 300 (3") ]/s & 1/a st. 1/e &r/l st. 1/e & 1A st. 400 (4) 1/s &1/a st. r/s & 1/a st. 1/e &14 st. Series NCQT Dimensions Spring Extend NCQTBO-OT T Type Bore,, 9t4,F' I 60re ,b,:!

MK

CE1 CE2 ML2B ML1C REA REC Figure 3 Figure 4 RHC e Do not clamp during a rotational stroke. MTS CC Figure 5 t Make sure that the workpiece does not move during clamping. r Do not clamp on a slanted surface.

Pulse Valve

port 1/8, 1/4 (Rc, NPT, G) 2 x P Port size 2 x P Port size F E F E D D C B C B Port size: Size 14 A A ( 52) ( 52) (20) (20) Silencer (Option) Silencer (Option) Pilot port 1/8, 1/4 (Rc, NPT, G) Pilot port 1/8, 1/4 (Rc, NPT, G) Exhaust port 3/8 Exhaust port 3/8 2 x P Port size 2 x P Port size F E F E G G D C B D C B 20 20 Dimensions [mm] Model Port size P A B C D E F G JSXFAF-06 3/4 74 55.5

Lubrication Equipment

A 1 2 150 165 42.7 76.3 45 65 40 60 35 40 80 80 ALBA90-10 ALBA90-20 1.17-24

VP300/500/700

VQZ 3(R) 3(R) VZ (G) (E) (T) (D, Y) VS N.C.

MQQ

6 r t !3 w q e RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

H (mm) A BA BB CA CB D F FB FC FT FX FY FZ GA GB H MM NN NA NB S Z Bore size (mm) 10 15 15 12 17 14 4 8 17.5 5.5 2.5 33 20 42 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 46 74 16 15 18 18 20 20 5 8 19 5.5 2.5 33 20 42 8 5 28 M5 x 0.8 M12 x 1.0 12.5 9.5 47 75 R V Double clevis type (D)/CJ5DS CDH9 +0.030 0 Cdd9 0.030 0.060 NB GA GB Piping port 2-M5 x 0.8 Clevis pin ( ) MM CA CB D NA A CX + 0.2 + 0.1

Rotary Table

Thin shaft Position of rotational axis: Perpendicular to the shaft through the center of gravity diameter r a 2 2 r a I = m4 I = m 12 2. Thin rectangular plate 7. Cylinder Position of rotational axis: Parallel side b and Position of rotational axis: Through the center of diameter and gravity through the center of gravity a b a r 2 3 2 2 a r + a I = m 12 I = m 12 3.

AR20-B to AR60-B

X425 w t e 03 q w t e r For high/low temperature Option/Semi-standard: Select one each for a to g.

CRQ2

CAT.ES20-147 A Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2 Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2 Piping can be installed from one end Body can be used as a flange Compact design saves mounting space Uses internal cushioning 10, 15 : Rubber bumper 20, 30, 40: Air cushion 10: 17mm 15: 20mm 20: 29mm 30: 33mm

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

Note 1) The chart above shows the leakage test results based on a test conducted using this cylinder construction. a t e l u g c Reduced initial particulate generation e i t 3 n r a e p r a Note 2) To allow fine stroke adjustments, O-ring seals are installed to separate vacuum and atmosphere.

MQQ

L RR RR CL+ Stroke 10 15 6.5 12 8 6 A + Stroke 16 18 8 16 10 9 20 20 10 20 10 10 25 20 18 36 12 10 28 22 18 36 12 10 10-5-15 15 Series MQQ Accessory Bracket Dimensions Rod end thread adapter Rod end nut d NN rod MM D C C B H E F A B H Applicable bore (mm) Applicable bore (mm) Part no.

Series VCS

R E E B A H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

gr ot ey R K Using the Body as a Flange The body's L dimensions are shown in the drawing on the right.

Solid State Auto Switches

The auto switch may be damaged if a screw other than the one supplied is used. 5 to 20 mA 5 to 40 mA 20 mA Circuit diagram t e Contact protection circuit Internal voltage drop None D-A93: 2.4 V or less (up to 20 mA)/3 V or less (up to 40 mA) D-A93V: 2.7 V or less Red LED illuminates when turned ON.

rep-modular-e

1 @0 t !3 o @9 @9 @6 #1 !4 u @8 !5 @7 r Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Modular Pressure Control Equipment F.R.L. Replacement Procedure

1 @0 t !3 o @9 @9 @6 #1 !4 u @8 !5 @7 r Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Compact Type Dual-Rod Cylinder Series CXSJ

5 t !5 t r !9 !8 @2 w !4 !2 !0 !0 !6 !6 i u !7 o i u !7 o !3 y !1 e q !3 y !1 q @7 CXSJM20 to 32 CXSJL20 to 32 @5 i u !7 o !5 t !6 r !9 !8 @2 r !9 !8 @2 !6 o i u !7 !5 t #0 Rod cover Head cover Rod cover Head cover Parts List: Standard Piping No. Description Material No.

Electro-Pneumatic Valve NVEP/NVEF Series

O F , < F , Q r '=r, @ r,> r, Pressure Raies (P1 =Primary Pressure) (P2=Secondary Pressure) NVEP3l2O-2 NVEP314O-'r -04 Primary Pressure P1 = 45 PSIG (3 KSI/cmr) E t2 I { t r S F g t o o E 28 (r. a ( 1 ) E a E a NVEHtl4O-1 E t ^ *t 6 S (0.15) (0.s) t . 5 ( 0 1 ) F 5 (0.05) NVEE NVEP CONSTRUCTION DETAIL Flow Raie'lvpo: VEF212O (2 Pdts) NVEF:112O (3 Porb) Pressuro llrp: NVEP3I2O (3 Porb) l