Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Piping Specification: R 1/8, Option 1: -, Option 2: -, Option 3: -

Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Piping Specification: One-touch Fitting ø4mm, Elbow Type, Option 1: -, Option 2: -, Option 3: -

Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Piping Specification: One-touch Fitting ø4mm, Straight Type, Option 1: -, Option 2: -, Option 3: -

Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Piping Specification: One-touch Fitting ø1/4", Straight Type, Option 1: -, Option 2: -, Option 3: -

Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: N01 (NPT 1/8)

Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: C6H (One-touch Fitting ø6mm, Straight Type)

Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: N7L (One-touch Fitting ø1/4", Elbow Type)

Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: C6L (One-touch Fitting ø6mm, Elbow Type)

Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: 01 (R 1/8)

Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: C4L (One-touch Fitting ø4mm, Elbow Type)

Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: C4H (One-touch Fitting ø4mm, Straight Type)

Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: N7H (One-touch Fitting ø1/4", Straight Type)

SX

A: Orange B: Green (P , EA, EB port) 2-M5 x 0.8 (Pilot EXH port) Triangle mark Manual override (Press and turn for the locking type.)

Series VQ Base Mounted Metal Seal/Rubber Seal

P.1.10-140 P.1.10-144 VFS C C3 (3.2) C4 (4) M5 (M5 thread) VS C6 (6) kit VS7 N1 (1/8) N3 (5/32) N7 (1/4) Built-in silencer P.1.10-178 P.1.10-182 P.1.10-186 Terminal block C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C8 (8) kit N1 (1/8) N3 (5/32) N7 (1/4) N9 (5/16) Built-in silencer P.1.10-178 P.1.10-182 P.1.10-186 Terminal block 1.10-115 Cylinder Speed Chart Series VQ0 Cylinder

SY

DIN rail] 21 P = 24 (Pitch) Manual override 13.5 DIN rail holding screw + Tightening torque: (0.55 to 0.65)Nm + 13.8 69.5 83.8 PE X EB P EA PE X EB P EA 4 A B 2 4 A B 2 4 A B 2 4 A B 2 4 A B 2 56.3 5.5 53 53 38.1 35 5 EA 3 EB 1 P 25.5 25.5 184.1 16.3 33.6 167.6 25 96.6 8 130.4 38.1 48.3 n 2 6-Rc 3/8 (P, EA, EB port) + + + + + Triangle mark 2-M5 x 0.8 (pilot, EXH

V

O R D E R S E R I E S V Q Z 1 0 0 / 2 0 0 / 3 0 0 B O D Y P O R T E D P L U G L E A D T Y P E V A L V E 2 VQZ P O R T S I Z E 2(A) P O R T S E R I E S C3 One Touch Fitting for 3.2 (VQZ100) C4 One Touch Fitting for 4 (VQZ100/200) C6 One Touch Fitting for 6 (VQZ100/200/300) C10 One Touch Fitting for 10 (VQZ300) M5 M5 Thread (VQZ100/200) 02 Rc(PT)1/4 (VQZ300) 1 VQZ100 2 VQZ200 3 VQZ300 S Y

0.4

center IN side port size OUT side port size Option Nil 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) None With bracket M5 C3 C4 C6 N3 N7 M5 C3 C4 C6 N3 N7 M5 thread 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting M5 thread 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 5/32" One-touch fitting

VQZ1000/2000/3000

1.6 M5 Cross section 0.34 mm2 57.5 31 26 13 55 X 13.6 R1 R2 5 3 1 P R1 R2 5 3 1 P (29) 20 6 8.5 PE port 4-Rc 1/8 3(R2), 5(R1) port 15 16.5 16.5 15.5 15.5 33 57 7 (30.5) 2-Rc 1/8 2-M5 x 0.8 external pilot port 1(P) port 54 6.5 External pilot specifications The broken lines indicate the DIN rail mounting style [-D].

Table of Contents

size A B 2-P Port size A B M M 2-J, thread depth K 2-J, thread depth K G1/2 Specifications with bracket Orifice 2, 3, 4.5, 6 Orifice 8, 10 7.5 2.3 Bracket Y 29 Mounting hole 2-5.3 Bracket 22 5.5 52 28 W U 67 X (mm) Grommet Conduit DIN terminal Electrical entry Mounting dimensions Bracket mounting Port size P Model Orifice size A B C D E F H Conduit terminal J M4 M5 M5 M5 M5 K M Q R 50 60

0.4

C4 2-position 3-position exhaust center Option None With bracket Nil IN side port size OUT side port size 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) F M5 C3 C4 C6 N3 N7 M5 C3 C4 C6 N3 N7 M5 thread 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting M5 thread 3.2 One-touch fitting 4 One-touch fitting