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Compact 35mm Light weight 120g 50mm 66mm 270g 700g Pressure gauge can be mounted from the front or rear Rear pressure gauge mounting Standard Back Pressure gauge VAC SET SMC P (Vacuum pump side) (Pad side) K U C S O H L VAC SET L H O S C Pressure gauge Panel mounting capability is standard U K P SMC (Vacuum pump side) (Pad side) Front Applications Lifting of work pieces Leak tester Pressure

Low Profile Slide Table Series MXF

L L Model Bolt Maximum tightening torque (Nm) Maximum screw-in depth L (mm) Model Bolt Maximum tightening torque (Nm) Maximum screw-in depth L (mm) MXF8 MXF8 4.7 2.1 1.2 4.7 M4 x 0.7 M3 x 0.5 MXF12 MXF12 6.5 2.1 6.5 M4 x 0.7 M3 x 0.5 1.2 MXF16 MXF16 6.7 4.4 6.7 M5 x 0.8 M4 x 0.7 2.8 MXF20 MXF20 8.5 4.4 8.5 M5 x 0.8 M4 x 0.7 2.8 0.02 mm or less of flatness is recommended for the body mounting

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

L RUN SERIAL UNIT L ERR.

ZQ-OM01301

(Pump System) Individual PD specifications Release flow [L/min (ANR) ] Release flow [L/min (ANR) ] Number of needle rotations [rotation] Number of needle rotations [rotation] 36 - Doc.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Conduit DIN terminal Electrical entry Mounting dimensions Bracket mounting Port size P Model Orifice size A B C D E F H Conduit terminal J M4 M5 M5 M5 M5 K M Q R 50 60 63 66 70 Q 40 R Q 58 R S 46 Q 95 R S 62 T U 46 56 56 W X 11 13 13 Y Normally closed Normally open VX212 VX222 VX232 VX210 VX220 VX220 VX230 VX230 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 1/4, 3/8 1/4, 3/8, 1/2 18 22 30 22 30 (

15

K L NA NB NC ND F GP LD NE M MM Model A CY1SG6-Z 6 6.5 7.6 25 5 30 20.5 20.5 15.5 8 15.5 M4 x 0.7 M4 x 0.7 11 14 10 3.3 8 2 5 5 27 26 3 40 19 7 3.5 6 CY1H CY1SG10-Z 7.5 8 12 31.5 6.5 40 25 27 17 13.5 17 M4 x 0.7 M4 x 0.7 10.5 16.5 12.5 4.4 10 5 34 33 6 28 2.5 6 45 6.5 4.6 6 CY1SG15-Z 7.5 9.5 16.6 38 6.5 52 28 29.5 20.5 15 20.5 M4 x 0.7 M5 x 0.8 10.5 16.5 11.5 5.4 12 5 40 39 11 28 2 6 60

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

J K ZPT F 10-B01-A14 (With buffer/Female thread) ZPT F 10-0-A10 (With buffer/One-touch fitting) Applicable tubing O.D.Q Hexagon width across flats 13 Rc 1/8 Hexagon width across flats 8 M5 x 0.8 M14 x 1 6.2 Hexagon width across flats 19 M10 x 1 Hexagon width across flats 14 5 5 D C ZX 3 I I K ZR 3 D C J J H F Hexagon width across flats 8 M5 x 0.8 ZM Hexagon width across flats 12 M8 x 1.25

End Lock Cylinder Series CBG1

+ l 179 (188) + l 207 (216) + l 40 164 192 159 (168) 187 (196) Z + Stroke 210 + l 242 + l 205 (217) + l 237 (249) + l 50 190 222 185 (197) 217 (229) ZZ + Stroke 215 + l 252 + l 210 (222) + l 247 (259) + l 63 195 232 190 (202) 227 (239) 245 + l 303.5 + l 239 (253) + l 297.5 (311.5) + l 80 236 294.5 230 (244) 288.5 (302.5) 253 + l 329.5 + l 247 (261) + l 323.5 (337.5) + l 100 244 320.5 238

Guide Cylinder Series MGG

T 2 x P (Rc, NPT, G) Q B S W U K L E R I AA AL AP X A AB J V Y + Stroke Z + Stroke 8 x AF AC AD AE (mm) Bore size (mm) 20 25 32 40 50 Stroke range (mm) A AA AB AC AD AE AF AL AP B C D E F G H I J K L M N 90 11 11 7.5 75 30 6 25 108 15 60 92 5.5 30 55 60 80 25 45 M5 x 0.8 depth 10 M8 x 1.25 depth 14 75, 100, 125, 150, 200 9.5 depth 6 100 14 13 7.5 85 30 6 30 130 17.5 65 113 6.6 35 65 70 100

CG1

73+l 73+l 82+l 91+l 91+l 46 51 51 62 71 71 93 98 101 113+l 120+l 123+l 114 119 125 134+l 141+l 147+l 67.7 78.7 118 (125) 138 (145) +l 146 (153) 166 (173) +l 98.6 136 (147) 156 (167) +l 168 (179) 188 (199) +l 119.2 136 (147) 156 (167) +l 173 (184) 193 (204) +l Consists of pins, flat washer and hexagon socket head cap bolt.

Compact Cylinder

Example) Bolt M5 x 60 L 2 pcs.

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

Model K VCKL0604-02F H KFN-06-X2 K VCKL0806-02F H KFN-08-X2 K VCKL1075-02F H L Union nut C3604BD + Ni plated 1 1 set unit KFN-10-X2 K VCKL1008-02F H K VCKL1209-02F H KFN-12-X2 K VCKL-02F H K VCKL0604-02F H KFS-06 K VCKL0806-02F H KFS-08 K VCKL1075-02F H M Sleeve Nylon 1 1 set unit KFS-10 K VCKL1008-02F H K VCKL1209-02F H KFS-12 N Gasket VCKK-4-1 Nylon 1 10 set unit 23 Troubleshooting (Valve

AIR COMBINATION

ATTACHMENTS / ACCESSORIES OPTIONS PART NUMBER Attachments / Accessories (Options) part number Section Model Descriptio For AC10*-A For AC20*-A For AC25*-A For AC30*-A For AC40*-A For AC40*-06-A Note1) Pressure gauge Standard G27-10-01 G36-10-01 G46-10-01 Round type G27-10-01 Note2) G36-4-01 G46-4-01 0.2 MPa setting Round type Standard G36-10-01-L G46-10-01-L Option G36-4-01-L G46-4-01-L

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

C D 4-O MX MTS T MY Q CY 2-P S U W E B K L MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX DAA AB I AP A R X Y + Stroke Z + Stroke -X J V 20Data 8-AF AC AD AE 100 piston rod end connection Stroke range (mm) Bore size (mm) AF AE AD AC AB AA G F N E M D L C K

Digital Flow Switch (Integrated display type)

8.0] 8.0 L/min (16 L type) [ 20.0] 20.0 L/min (40 L type) [ 50] 50 L/min (100 L type) [ 126] 126 L/min (250 L type) [ P_1] Set value (OUT1) [F 1]/[ oUt1] Page 33 5% of maximum rated flow [ 0.20] 0.20 L/min (4 L type) [ 0.8] 0.8 L/min (16 L type) [ 2.0] 2.0 L/min (40 L type) [ 5] 5 L/min (100 L type) [ 12] 12 L/min (250 L type) [ H_1] Hysteresis (OUT1) [ CoL] Display colour (OUT1) [ SoG] ON

EX500

19.2 k/45.45 k/ 93.75 k/187.5 k/500 k/ 1.5 M/3 M/6 M/12 Mbps 156 k/625 k/ 2.5 M/5 M/10 Mbps Communication speed 10 M/100 Mbps Specified file Note 2) GSD file EDS file EDS file 96/96 (3 stations, remote device station) Occupied area (Number of inputs/outputs) 128/128 64/64 64/64 Built in the unit (Switch setting) Terminal resistor Not applicable Not applicable 11 to 25 VDC (Supplied by DeviceNet

SZ3000

L 16 44 8 L (7.5) 8 2514 131 (35) (25) 5.5 47.04 SMC 55 10 Multi-core vinyl cable 0.3 mm2 x 25C 2-M2.6 x 0.45 Socket side Terminal no.

SZ3000

: M5 x 0.5 5 (EA) 1 (P) 3 (EB) Back pressure check valve 3 position closed center A 4 (A) 4 (B) 2 Nil K None 3 2 B Built-in 5 (EA) 1 (P) 3 (EB) The built-in back pressure check valve type has an effective area approximately 20% smaller.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

B RATE PWR L RUN SETTINGS MOD/NET ADDRESS NO. PWR PWR COM ERR ON ON L ERR.

Lubrication Equipment

Lube unit: Series ALDU Strainer Series INA Main line filter Series AFF Solenoid valve Metal seal Regulator Series AR Air cylinder Air tool Air dryer Series IDF How to read graph Solenoid valve Rubber seal With the flow rate set to 250 l/min(ANR) and the pressure differential set to 0.05MPa, by changing the flow rate to 3800 l/min(ANR) and 6000 l/min(ANR), the pressure differential will change