Rated Vacuum Range: -101 to 0 kPa, Output Specification: N (NPN Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: M5 (M5 Female Thread), Option 1: L (Lead Wire w/Connector, 2m), Option 2: A2 (Bracket B, Horizontal Mounting), Option 3: K (Operation Manual, Calibration Certificate)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: N (NPN Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: M5 (M5 Female Thread), Option 1: L (Lead Wire w/Connector, 2m), Option 2: A2 (Bracket B, Horizontal Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: N (NPN Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (M5 Female Thread), Option 1: L (Lead Wire w/Connector, 2m), Option 2: A2 (Bracket B, Horizontal Mounting)

Output Specification: N (NPN Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: M5 (M5 Female Thread), Option 1: L (Lead Wire w/Connector, 2m), Option 2: A2 (Bracket B, Horizontal Mounting)

Output Specification: N (NPN Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: M5 (M5 Female Thread), Option 1: L (Lead Wire w/Connector, 2m), Option 2: A2 (Bracket B, Horizontal Mounting), Option 3: K (Operation Manual, Calibration Certificate)

Output Specification: N (NPN Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (M5 Female Thread), Option 1: L (Lead Wire w/Connector, 2m), Option 2: A2 (Bracket B, Horizontal Mounting)

SI unit for EtherNet/IP TM

L L L L L L L L L L L L: Low fixed (0) Input status area Input status area specifications Item Status State 0 Normal SOLV State of power supply for solenoid valve 1 Abnormal (19 V or less) Output area mapping For EX260-SEN1/-SEN2 Output data Offset MSB LSB MSB LSB (Word) 15 8 7 0 0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 1 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 For EX260-SEN3/-SEN4

SI unit for EtherNet/IP TM

L L L SOLV L L L L L L L L L L L L: Low fixed (0) Input status area Input status area specifications Item Status State 0 Normal SOLV State of power supply for solenoid valve 1 Abnormal (19 V or less) Output area mapping Output data Offset MSB LSB MSB LSB (Word) 15 8 7 0 0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 1 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 -45No.EX-OMX1001 Dimensions -46No.EX-OMX1001

LC-OM089xx

Use a metal P-clip (Fig.2-1), metal U-clip (Fig.2-2) when grounding.

Rated Vacuum Range: F (-100.0 to 100.0 kPa), Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: M5 (Female Thread), Lead Wire: w/o Lead Wire, Bracket: A2 [Bracket B (ZS-46-A2)]

Rated Vacuum Range: -100.0 to 100.0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: Female Thread, Lead Wire: w/o Lead Wire, Bracket: A2 [Bracket B (ZS-46-A2)], Operation Manual: -

ZISE30A.eng

Danger: Maintenance Switch ON At normal output Switch OFF M3x5 L M3x5 L M3x5 L Time [s] How to reset the product after a power cut or forcible de-energizing The setting of the product will be retained as it was before a power cut or de-energizing.

Accuracy: H (High Precision), Motor Mounting Position: L (Left Side Parallel), Motor Type: S4 [AC Servo Motor, (Incremental Encoder), 400W], Lead: L (2.86mm), Stroke: 150mm, Dust/Drip Proof: P (IP65, Dust/Drip Proof Specification w/vent hole tap), Motor Option: B (w/Lock), Rod End Thread: Rod End Female Thread, Mounting: L (Foot), Cable Type: R (Robotic Cable, Flexible Cable), Cable Length

4/5 Port Solenoid Valve

0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): SYJ3140-L-M5 M8 connector (WO): SYJ3140-WO-M5 M plug connector (M): SYJ3140-M-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 64.3 [66.5] 54.5 [56.7] 63.4 56 49.5 R1 P R2 R1 P R2 R1 P R2 10 10 10 10 10 10 28 28 28 14 14 14 5 5 5 28.5 28.5 28.5 35.6 35.6 35.6 Refer to back page

5 Port Solenoid Valve Series SY3000/5000/7000/9000

(-F2) G H 22.5 28.5 [35.5] A, B port M5 x 0.8 28.5 [35.5] 2 23.5 25 18.5 P 16.9 (15) EA EB M5 x 0.8 (P, EA, EB port) For manifold gasket positioning 2 x 1.5 die-cast hole 19 22.5 L plug connector (L): SY3120-L(-F ) M plug connector (M): SY3120-M(-F ) C4, N3 C6, N7 M8 connector (WO): SY3120-WO(-F ) 1 2 1 2 C4, N3 C6, N7 C4, N3 C6, N7 1 2 28.5 [35.5] 13.1 (Lead wire length) 33 M8 x 1 Approx

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

(P, R1, R2 port) 17.5 14 28 L plug connector (L): 10-SYJ3 43-L-M5 M plug connector (M): 10-SYJ3 43-M-M5 M8 Connector (WO): 10-SYJ3 43-WO-M5 3 4 5 3 4 5 3 4 5 Approx. 300 (Lead wire length) 41.5[48.5] 26.1 46 M8 x 1 28.5 52.6[59.6] Approx. 300 (Lead wire length) 55.8 32.6 49.3 111.5[115.9] R1 P R2 R1 P R2 R1 P R2 91.9[96.3] 10 10 10 10 10 10 28 28 28 109.7 14 14 14 5 5 5 37.6[39.8] 47.4[49.6

Metal Seal/Rubber Seal Series VQ Body Ported

(M plug connector) 127 (L plug connector) P P A A A A A A A A 93.5 (M plug connector) 99.5 (L plug connector) 35.5 32 B B B B B B B B R R 24.5 20 65 11 1(P) SUP port 2-C6 2n-C3, C4, C6, M5 7 7.5 C3: One-touch fitting for 3.2 P = 11 19.2 2-C6 C4: One-touch fittings for 4 3(R) EXH port C6: One-touch fitting for 6 M5: M5 thread 3 position 50.5 n: Stations (Maximum 16 stations) Formula L1 =

CQ2

Spring return Spring extend Model C Mounting bolt D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 Model C Mounting bolt D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 M3 X 25 l X 30 l M3 X 25 l X 30 l M5 X 25 l X 30 l M5 X 30 l X 35 l M5 X 30 l X 35 l M5 X 35 l X 40 l M6 X 45 l X 55 l M3 X 25 l X 30 l M3 X 25 l X 30 l M5 X 25 l X 30 l M5 X 30 l X 35 l M5 X 30 l X 35 l M5 X 35 l X 40 l M6 X 45 l

ZP

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

NCQ2/CQ2

Built-in magnet Pneumatic Air-hydro M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Piping Pipe thread Rod end male thread With rubber bumper P P P P P P P P P P P P Mounting Through-hole (Std.)