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HOW TO ORDER x x T I I L aterial I t NIL NBB (Buna) I S Copper Free Extarnal I TFPM (Viton) High Tamperature tP300 42 0 -T-T | l t l Supply & Output Preasure Gauge I t00 no gauge Operution 01 2kgllcrf r bsingte Acring 02 3 kgf/cm'z 03 10kg /cnf 04 4 kgf/cm'?

06 S Body size With sealant "S" is not applicable to M5 and U10/32 types, as they are not available with sealant. 2 3 4 M5 standard 1/8 standard 1/4 standard Model Applicable tube outside diameter Metric size Inch size 3 Universal 01 03 05 07 09 11 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 4 6 8 10 With One-touch fitting For low speed control Thread type Port size M5 U10/32 01 02 Nil

Fittings & Tubing Air Cylinders Rotary Actuators 2 x P (Rc, NPT, G) H2 Width across flats B2 2 x NN G Relief port M5 x 0.8 G H1 Width across flats B1 Standard port I Relief port 2 x Eh8 D MM AL A F K NA N N H S + Stroke F ZZ + Stroke (mm) ZZ S P N I E D A 12.5 11 10 10 13 F Bore size Stroke range AL K MM NA NN G H2 41 32 32 26 B2 H H1 22 17 17 13 B1 0 6 6 5 8 8 8 50 45 45 41 200 to 1000 150

Valve diagnostics 1 . 5-4 Valve diagnostics 1 Bit 0 Valve 0, 1 diagnostics 01() 1 Valve 2, 3 diagnostics 01() 2 Valve 4, 5 diagnostics 01() 3 Valve 6, 7 diagnostics 01() 4 Valve 8, 9 diagnostics 01() 5 Valve 10, 11 diagnostics 01() 6 Valve 12, 13 diagnostics 01() 7 Valve 14, 15 diagnostics 01() 5.1.1.4.

ON YES Unit selection Hysteresis mode OFF P-1 P-2 High pressure (for positive pressure/compound pressure) High vacuum (for vacuum pressure) [P] ZSE ISE H H H (Fixed hysteresis) = 3 digits ON PSE Window comparator mode OFF NO P-1 P-2 High pressure (for positive pressure/compound pressure) High vacuum (for vacuum pressure) Z I SE3 Set the unit by either button or button. : kPa or MPa

Aluminum die-casted Aluminum die-casted Material Note q Description Chrome treated Epoxy coating on inner surface Housing Body w e Note: Sight glass is indicated in the figure above for easy understanding of parts, however mounting position is different. Please refer to pages 14-20-13 to 14-20-14 for details. Sight glass AFF75B is aluminum casted.

P . 14-20-57 14-20-42 2 Odor Removal Filter Series AMF How to Order AMF150 to AMF850 AMF 250 03 R B Option R IN-OUT reversal direction Body size Bracket Accessory (Option) 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 B 1 4 B 3 8 04 B 1 2 06 B Nil Nil B Piping port (B dimension) 1 Standard 11 2 Standard 01 B 1 8 02 03 Thread type Nil Rc F G N

Description Chromate treatment, Epoxy coating on inner surface Housing Body q w e Note: Constructions show sight glass, but mounting position is different from actual position. Please refer to p.4.4-4 and 4.4-5 about drawings for more detailed. Sight glass Tempered glass AMG850: Aluminum casting Replacement Parts AMG450 Part No. No.

VNl VQ 1 (P) N.C. Note 5) DIN connector style: Applicable to dust and jet proof (IP65).

For vacuum equipment precautions, refer to the Handling Precautions for SMC Products and the Operation Manual on the SMC website: http://www. smcworld.com Nozzle diameter Port size 05 0.5 mm 07 0.7 mm Nil 6 One-touch fitting 01 Rc1/8 female thread Symbol EXH Vacuum pressure reached S 90 kPa L 48 kPa Mounting P V Caution Specifications 1 .

Output Specification: NPN Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: R 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation Manual: -

Output Specification: S (NPN Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 01 (R 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Z S L, Z S Note ) PAX 1 1 4 1 2 PB AC Ordering example (Example) Series VXR21, Rc 3/4, 24 VDC, Conduit terminal (Part no.)

P P 1 to 10 PFA30m P P P 5 to 50 P P P 10 to 100 31m P P P 20 to 200 P P P 50 to 500 P P P P 150 to 3000 P P P P 300 to 6000 P P P P 6000 to 12000 Series variations For Water Flow rate Remote type Output specification Port size (Rc, NPT, G) Integrated measurement display type Display unit Sensor unit Switch output 3/8 1/2 3/4 range l/min PFW31m 30m 32m PFW704 720 740 PFW504 520 540 P P

VZA412 01 P VZA414 01 1P Thread type Nil Rc NPTF, NPT G T F VV3ZA2 031 01 50 VZA200 01 S Thread type Thread type Nil Nil Rc NPTF, NPT G Rc NPTF, NPT G T F T F 5-5-3 4 Series VZA200/400 Dimensions Body ported: VZA42-P-01 Pilot port 2-3.4 Mounting hole M5 x 0.8 2-3.4 mounting hole Courtesy of Steven Engineering, Inc.-230

(SYJA700) 1 (P) 3 (R) 1 (P) 3 (R) Specify the part numbers for the valve(s), blank plate assembly and manifold base. N.C. N.O. SS3YJA5-40-031-01 SS3YJA7-41-031-01 SYJA714 1 pc. 2 pcs. 1 pc. 1 pc. 2 pcs. 1 pc. SYJA514 SYJ500-10-3A . SYJ700-10-2A .. Pilot Pressure Range 0.6 Pilot pressure (MPa) Pilot pressure range 0.5 0.4 Caution 0.3 Be sure to read before handing.

Output voltage (Rated pressure range) Linearity Output impedance Note 2) Voltage output 1% F .S. Approx. 1 k Analog output 2.4 to 20 mA 2.5% F.S. 4 to 20 mA 2.5% F.S. Output current (Rated pressure range) Linearity Note 3) 1% F .S.

~:;:--l' VAC Vacuum load lock chamber Digital pressure switch Digital Pressure Switch Series ZSE6/ISE6 (For vacuum) (For positive pressure) Model 1~SV(S % F ,S, ) ".

, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bracket 2-port size (Option) HA Maintenance space AT ID AMG AFF M Dimensions with mounting bracket Model Port size (Nominal size B) A H B C D E F G AM I 221 J 25 K 10 L 14 N 90 O 55 P 110 Q 50 R 88 S 3.2 36 9 205 19 100 106 3 106 10 1 2 3 4 , AME450 Misc. 212 22 107 106 3 106 10 36 221