Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

alloy Mild steel Chromate Aluminum alloy Aluminum alloy Connector cable for sensor Carbon steel 92 Series LTF Mounting Top Mount LTF6 M5 bolt 2 5.5 or M5 2 x n x Mounting hole Pitch = 100 Mounting hole quantity n Quantity Stroke 100 2 4 200 3 6 300 4 8 A = (n 1) x pitch 400 5 10 30 500 6 12 600 7 14 LTF8 M6 bolt 3.5 2 x n x Mounting hole 6.6 or M6 Pitch = 100 Mounting hole quantity n n

Compact Cylinder/Guide Rod Type Series CQM

85 90 115 140 55 60 65 70 75 80 85 90 95 120 145 M3 x 30L x 35L x 40L x 45L x 50L x 55L M3 x 30L x 35L x 40L x 45L x 50L x 55L M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L M5 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L M5 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 110L x 135L M5 x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L

AC Servo Motor Driver (Network card type ）

L11 L21 CNP3 3-M5 screw U V W PE Screw size: M4 Tightening torque: 1.2 [Nm] 42 0.3 Approx. 12 Approx. 6 Mounting hole process drawing 9 3 9.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

M5 x 0.8 1(P) port M5 x 0.8 3(R) port R 3 P 1 10.7 9 M5 X 0.8 external pilot port 32 (Only external pilot type (R)) For the One-touch fittings for P/R port and silencer model no., refer to page 4-14-3.

Integrated Controller

M4 x 0.7 thread depth 7 M5 x 0.8 thread depth 10 25.5 0.5 10.5 B + Stroke A + Stroke 25.5 34 35 4 x M4 x 0.7 thread depth 7 35 Rod end male thread 6 x M4 x 0.7 thread depth 5.5 3 H9 (+0.025 0 ) depth 3 M8 x 1.25 Width across fats 174 16 23 MD XX 5 Width across fats 22 15 MC ML + Stroke 13 14 24.5 Required Space5 [mm] 4 3 H9 (+0.025 0 ) 3 Cable connector type J Straight 115 XX (2:1) 1 The

VFR

Description Pilot valve assembly AXT627-42-1(M5 x 50) AXT627-10-1 VFR51 AXT627-10-1 VFR52 AXT627-42-1(M5 x 50) AXT627-10-1 VFR53/54/55 NBR Hexagon socket head screw Gasket i AXT627-42-1(M5 x 50) Refer to How to Order Pilot Valve Assembly on page 3-5-78. Steel o !

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Metric 10.5 12 14 17.5 Metric M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 12 16 20 25 Basic (All dimensions are common except "A" and "B".)

VK300

: VK332-DM5 01 Grommet: VK332-GM5 01 Max.10 68.8 (Bracket) 14 9 2A 2A 13 2 (Lead wire length) (Mounting hole for manifold) 2 x 3.2 2 x 3.2 16 [14] M5: M5 x 0.8 [01: 1/8] [14] M5: M5 x 0.8 [01: 1/8] (Mounting hole for manifold) Manual override (Non-locking) 300 2 x M2.5 x 0.45 (Mounting screw) (Mounting screw) Applicable cable O.D: 3.5 to 7 Pg7 (Mounting hole) 3 4 2 x 3.5 63.4 57.9 (Mounting

Compact Hydraulic Cylinder

Bore size (mm) 20 32 40 50 63 80 100 M5 x 0.8 M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M10 x 1.5 2 4 4 4 4 4 4 3 3 3 6 11.5 24 34 7. Do not use two cylinders facing one another horizontally or vertically in such a way that their piston rods strike each other. 8.

CL

11 11 14 17 17 M10 X 1.25 M12 X 1.75 M12 X 1.75 Trunnion/CLAWT (mm) Stroke range A Bore (mm) 40 50 63 80 100 D LZ BP E BN K C KA B GC B1 GD F AL BQ GA GB J H1 GL GR W/o rod boot 25 X 500 25 X 600 32 X 600 41 X 750 45 X 750 W/ rod boot 25 X 500 25 X 600 32 X 600 41 X 750 45 X 750 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 22 27 27 32 41 8 11 11 13 16 M8 X 1.25 M8 X 1.25 96 108 115 129 140 6

CJP

Symbol Bore size (mm) A A' B B' D E F GA GB H MM NN R X Y LC LH LT LX LZ 6 10 15 M3 x 0.5 17 6 28 6 20 8 10.5 1.6 3 11 14 3.4 14 6.5 10.5 9 M10 x 1.0 7 7 M4 x 0.7 20 7 33 6 24 8 13 1.6 5 13 17 4.5 15 7 12 12 M12 x 1.0 8 10 M5 x 0.8 24 7 43 6 30 10 15.5 2.3 6 18 19 5.5 20 16.5 14 M14 x 1.0 10 12 10 Symbol S Z With auto switch Bore size (mm) W J 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15 st

CJP

Symbol Bore size (mm) A A' B B' D E F GA GB H MM NN R X Y LC LH LT LX LZ 6 10 15 M3 x 0.5 17 6 28 6 20 8 10.5 1.6 3 11 14 3.4 14 6.5 10.5 9 M10 x 1.0 7 7 M4 x 0.7 20 7 33 6 24 8 13 1.6 5 13 17 4.5 15 7 12 12 M12 x 1.0 8 10 M5 x 0.8 24 7 43 6 30 10 15.5 2.3 6 18 19 5.5 20 16.5 14 M14 x 1.0 10 12 10 Symbol S Z With auto switch Bore size (mm) W J 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15 st

Combination Cylinder

5 5.5 5.5 6 10 14 M8 M10 X 1.25 M10 X 1.25 M14 X 1.5 24 29 35.5 44 8 10 12 16 6 8 ZZ With rod boot W Without rod boot ZZ e f h l Bore (mm) Stroke range H1 P PG PH PL PW S TA TB TC WA WW WB WH H 20 25 32 40 M5 M5 Rc(PT)1/8 Rc(PT)1/8 30 30 25 20 141 151 10 10 20 24 24 24 38 41 41 41 154 169 5 6 6 8 33 38 39 44 19.5 24 24 24 11 11 M5 M6 X 0.75 M8 M10 X 1.25 86 96 97 5.5 7 7 9 15 15 15 15 23

Basic Type/Direct Mount Type

0.5 M6 x 1 CY3B CY3R CY3B CY3R M3 x 0.5 M10 x 1 M4 x 0.7 M10 x 1 M4 x 0.7 M20 x 1.5 CY1S M5 x 0.8 M26 x 1.5 M6 x 1 M26 x 1.5 CY1L M6 x 1 M32 x 2 0.007 0.037 M8 x 1.25 M8 x 1.25 CY1H M8 x 1.25 M10 x 1.5 P (Piping port) CY1F W X Y ZZ Model Mounting Nut/Included in the package (2 pcs).

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

pilot port) With connector on D side (FD) 12 Base Mounted Type Series VQ5000 Dimensions (mm) 1in 25.4mm Bottom port diagram With connector on U side (FU) 106 46.8 59.2 83.5 9 9 55.5 M5 ground screw 2n-1/2 (ports A, B) 34.5 n U side X 12 B 2 A 4 6 B A B 2 A 4 5 SMC SMC SMC SMC SMC B A B 2 A 4 4 B A P=41 L1 L2 B 2 A 4 3 B A B 2 A 4 2 B A 34.5 46 68.5 P = 41 B 2 A 4 1 B A 58.5 X 12 Stations

Table of Contents

100 x 253 150 x 140 x 446 200 x 170 x 526 280 x 280 x 497 63 x 63 x 191 85 x 85 x 258 120 x 120 x 236 140 x 140 x 383 180 x 170 x 465 63 x 63 x 136 80 x 82 x 170 90 x 90 x 233 140 x 140 x 380 140 x 140 x 490 140 x 140 x 590 80 x 80 x 153 90 x 90 x 216 140 x 140 x 250 140 x 140 x 360 140 x 140 x 460 AFF4B AFF22B AFF37B AFF75B AM150 AM250 AM350 AM550 AM650 AMD150 AMD250 AMD350 AMD450 AMD550

I

Y, Z direction (2 hours) Shock Resistance 100G, X, Y, Z Weight 45g Port Size 1/8, M5 x Male and M5 x 0.8 Female O U T P U T C I R C U I T A N D W I R I N G Switch Output Type (-25) NOTE 1: Minimum Differential Hysteresis mode: When P1=P2>P2 by less than three units, differential is automatically set at three units of P1 display Window mode: Differential is fixed at three units of the display

CE

25, 50, 75, 100, 125, 150 94 69 15 6 25 42.5 M5 x 0.8 16 5.2 25 15.5 25, 50, 75, 100, 125, 150, 175, 200 106 78 15.5 10 36 53.5 M8 x 1.25 10 8 28 25.5 Q R T V Y N O P Bore size (mm) 12 20 M4 x 0.7 M5 x 0.8 47 7 53.5 22 7 5.5 M6 x 1 M5 x 0.8 50 15 62.5 36 5 For rod nut and accessory bracket, refer to page 10-12-20.

CE

stroke 25, 50, 75, 100, 125, 150 94 69 15 6 25 42.5 M5 x 0.8 16 5.2 25 15.5 25, 50, 75, 100, 125, 150, 175, 200 106 78 15.5 10 36 53.5 M8 x 1.25 10 8 28 25.5 Q R T V Y N O P Bore size (mm) 12 20 M4 x 0.7 M5 x 0.8 47 7 53.5 22 7 5.5 M6 x 1 M5 x 0.8 50 15 62.5 36 5 For rod nut and accessory bracket, refer to page 10-12-20.

CE

x 0.7 M5 x 0.8 50 15 62.5 36 5 5.5 M6 x 1 M5 x 0.8 For rod nut and accessory bracket, refer to page 10-12-20.