Vacuum Pad

-A22 ZPT125 50-(B/N/T)01-A22 ZPT125 75-(B/N/T)01-A22 ZPT125 100-(B/N/T)01-A22 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T3 25-(B/N/T)01 ZPB-T3 50-(B/N/T)01 ZPB-T3 75-(B/N/T)01 ZPB-T3 100-(B

Vacuum Pad

-A22 ZPT125 50-(B/N/T)01-A22 ZPT125 75-(B/N/T)01-A22 ZPT125 100-(B/N/T)01-A22 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T3 25-(B/N/T)01 ZPB-T3 50-(B/N/T)01 ZPB-T3 75-(B/N/T)01 ZPB-T3 100-(B

Vacuum Pad

-A22 ZPT125 50-(B/N/T)01-A22 ZPT125 75-(B/N/T)01-A22 ZPT125 100-(B/N/T)01-A22 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T3 25-(B/N/T)01 ZPB-T3 50-(B/N/T)01 ZPB-T3 75-(B/N/T)01 ZPB-T3 100-(B

Vacuum Pad

-A22 ZPT125 50-(B/N/T)01-A22 ZPT125 75-(B/N/T)01-A22 ZPT125 100-(B/N/T)01-A22 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T3 25-(B/N/T)01 ZPB-T3 50-(B/N/T)01 ZPB-T3 75-(B/N/T)01 ZPB-T3 100-(B

5 Port Solenoid Valve

0 u q w e r r S0721 (A) 4 (B) 2 5 (R1) 4 (A) 1 (P) 2 (B) 3 (R2) 5 (R1) 1 (P) 3 (R2) t y i Dual 3-Port: S07B1 A Plug-in Manifold Stacking Base C !0 u q w e r r S07A1 4 (A) 2 (B) 5 (R1) 1 (P) 3 (R2) N.C. + N.C. 5 (R1) 4 (A) 1 (P) 2 (B) 3 S07B1 4 (A) 2 (B) (R2) t y i Plug Lead Manifold Bar Base Plug Lead Single Unit 5 (R1) 1 (P) 3 (R2) Component Parts Description No.

Compact 5-Port Solenoid Valve

68.6 D D B 2 S B 2 B 2 B 2 B 2 1 P P 1 A 4 A 4 A 4 A 4 A 4 * These figures show the JJ5SY3-10F2-05DR-C8.

0.4

3 position:SQ2 30 3 4 5 3 position: SQ2 31 3 4 5 r e q w r e q w T kit L kit SQ2331 SQ2431 SQ2531 SQ2330 SQ2430 SQ2530 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) S kit Dual 3 port valve: SQ2 31 A B C Component Parts r e w q No.

A

Model A B C D E F G H J NAR425 80 141 37 67 71 (72) 3 50 48 80 B24 NAR625 98 152 40 78 76.5 (77.5) 7 87 52 90 B25 NAR825 126 217 75 110 92.5 (93.5) 5 NAR925 160 242 89 140 107.5 (108.5) 10 H O W T O O R D E R P I L O T O P E R AT E D P R E S S U R E R E G U L AT O R 25 (N)AR Japanese N North American O P T I O N S B O D Y S I Z E B Bracket G Gauge 4 1/2 6 1 8 1 1/2 9 2 P O R T S I Z E 25

Table of Contents

T-slot A dimension T-slot B dimension 6.5 T-slot B 27.5 4H9 Cross section C-C D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model LXSH2BD-50 LXSH2BD-75 LXSH2BD-100 LXSH2BD-125 LXSH2BD-150 Refer to page 301 for mounting.

F

A R B F I T T I N G F O R S O F T T U B E: M-3AU-4 M-5AU-4 M-5AU-6 B A R B E L B O W F O R S O F T T U B E: M-3ALU-4 M-5ALU-6 U N I V E R S A L E L B O W: M-3UL M-5UL 18 female diverted to 9 x M5 MORE SELECTIONS S E E N E X T P A G E P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R H O W T O O R D E R S E E N E X T P

Table of Contents

figure of XX section WA Z CX Bottom view Section XX D4-MM depth ML Z WA L 4-OA through HA: T-slot for hexagon bolt -X 4-NN through 4-OB counterbore depth OL Section XX 20Data X 0.02 X 0.02 VB DA VA H U R X T PW DB 2-P GC XA depth XL H7 XA depth XL H7 (Rc, NPT, G) PB GB GA 2-P (Rc, NPT, G) Q J K PA + Stroke S G (Plug) FA FB C + Stroke B + Stroke A + Stroke E For intermediate strokes other

Metal Seal/Rubber Seal Series VQ Body Ported

Note 1) 34.5 28 R P 26.5 B B B B B B B B 18.5 11 Note 2) P = 10.5 18.4 6 2n-C3, C4, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 M5: M5 thread (7.5) This drawing shows the case of VV5Q04-T2-D.

VFS

A A A B B B P P P 1.0 MPa 1.5 MPa Set pressure range (1) 0.1 to 0.83 MPa 0.05 to 0.83 MPa Ambient and fluid temperature 5 to 60C (No freezing) Port size for connection of pressure gauge Weight (kg) Effective area at supply side (mm2) (2) S at P1 = 0.7 MPa, P2 = 0.5 MPa Rc 1/8 M5 x 0.8 0.16 5.5 5.1 P A P B 12 11 A EA B EB 0.83 38 40 11 12 26 24 32 31 21 18.5 35 31 44 38 90 77 0.46 18.5

42

2 (A) 4 (B) 2 VQ4101 VQ4100 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQ4200 VQ4201 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQ4300 VQ4301 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQ4400 VQ4401 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQ4500 VQ4501 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Component

VFR

Thread type Piping port (P, A, B, EA, EB port) Nil Rc G F 06 10 1 3 4 N NPT NPTF T 3-5-95 96 Series VFR6000 Construction 2 position single 2 position double VFR620 VFR610 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA) (P) (EB) 5 1 3 !1 u q t q e i e !1 i u !

0.4

(R1) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) VQ1500 VQ1501 r r (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w VQ1A01 VQ1B01 4 (A) 2 (B) 4 (A) 2 (B) 5 (R1) 3 (R2) 5 (R1) 3 (R2) 1 (P) 1 (P) r VQ1C01 4 (A) 2 (B) 5 (R1) 3 (R2) 1 (P) Component

Table of Contents

Unit Series AC10B to 60B Dimensions A AC10B/20B Pressure gauge port size F P E K Q N B C G G OUT IN T T K H Pressure gauge (Option) J L F.R.L.

Base Mounted Metal Seal/Rubber Seal Series VQ

T kit (Terminal block) P kit (Flat ribbon cable connector) S kit (Serial transmission) Kit F kit (D-sub connector) F 25P U S P 26P U S F A 15P U S P C 20P U S P 16P U S B P A 10P U S S Type T1 T2 Max. points Note) 16 Note) 16 16 16 Note) 16 14 14 8 8 Note) Due to the limitation of internal wiring.

Fluoropolymer Piping Equipment

Tubing size (D) LQ1E21-T-R8 6 8 x 6 TH TIH 8 30.5 20 3.6 LQ1E21-T-R9 10 x 8 10 LQ1E21-T-R10 12 x 10 12 34.5 24 LQ1E22-T-R8 B side D 4 6 15 14 28 16.5 6 x 4 6 25.5 15 2.6 LQ1E22-T-R9 8 x 6 8 30.5 20 LQ1E22-T-R10 10 x 8 10 LQ1E22-T-R11 12 x 10 12 34.5 24 LQ1E31-T-R1 4 B L3 8 x 6 5 9 8 36.6 33.6 20 6 LQ1E31-T-R2 6 x 4 6 28.6 15 3.9 LQ1E31-T-R8 12 x 10 12 37.6 24 7.4 LQ1E31-T-R9 19 x 16 19

ZP3

Vertical T Type/ZP3-T ZP3-T-B ZP3-T-A w w e q q ZP3-T-A-B ZP3-T-A-(02/04) w t r q Component Parts No.