CY1F

Centralized piping on right L R R L R L Slide table actuation direction Centralized piping on left R L L R R L Slide table actuation direction 4. Never disassemble the magnetic component parts (external slider, internal slider) of the actuator (cylinder). If will cause decline of the holding force, etc. 2.

Slider Type Ball Screw Drive/11-LEFS Series

upper limit Suction flow rate: 0 L/min 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] LAT Suction flow rate: 20 L/min ISO Class 5 upper limit LZ 10 10 LC3F2 Suction flow rate: 40 L/min ISO Class 4 upper limit ISO Class 4 upper limit 1000 1000 Suction flow rate: 20 L/min Suction flow rate: 50 L/min 100 100 Suction flow rate: 30 L/min 10 10 1 1 0 0.1 0.6 0.5

Low Profile Guide Type

Centralized piping on right R R L L R L Slide table actuation direction Centralized piping on left R L L R R L Slide table actuation direction 2. The plug position of the piping port can be changed to suit the operating conditions. When screwing in the plug for the second time, wrap a sealant tape around the plug to prevent leakage. (1) M5 First tighten lightly until the rotation stops.

Speed Controller with One-touch Fitting

min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 200 100 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Air Slide Table Series MXP

4 each MXP6-PS GR-L-005 (5g) GR-L-010 (10g) Cylinder unit GR-L-020 (20g) GR-L-050 (50g) MXPJ6 No. Description Material Note Component Parts u q w i o y !3 !2 !

KG

P. 16 KGU Male Connector: KGH H (width across flats) Effective area (2) (mm2) Nylon Urethane Connection thread R Model L A M Applicable tubing O.D.

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

Approx. 600 (Lead wire length) 31.5 [38.5] 70.6 [72.8] (Light/surge voltage suppressor) 2-3.2 (For mounting) 23.5 10.9 74.2 [76.4] + 28 25 16.1 21 31.5 [38.5] 18 10 (Bracket) 3.6 1/8 (P, R port) R P 28 8 1.6 (PE port) 14.5 16 L plug connector (L): SYJ72-L-01 (-F) M plug connector (M): SYJ72-M-01 (-F) DIN terminal (D): SYJ72-D-01 (-F) M8 connector (M0): SYJ72-W0-01 (-F) Approx. 300 (Lead wire

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

) L1 = 50 [mm] L2 = 40 [mm] m L2 L1 Item Load factor an Note 1.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

) L1 = 50 [mm] L2 = 40 [mm] m L2 L1 Item Load factor an Note 1.

Manifold Specifications

U-C4C C6C (Pitch) Separation lever (mm) 2 123 112.5 97 13 3 148 137.5 116 16 4 160.5 150 135 13 5 185.5 175 154 16 6 198 187.5 173 12.5 7 223 212.5 192 15.5 8 235.5 225 211 12.5 9 260.5 250 230 15.5 10 273 262.5 249 12 Stations L1 L2 L3 L4 L plug connector (L) DIN terminal (D) M plug connector (M) (Lead wire length) MAX. 10 300 300 (Lead wire length) (mm) 2 123 112.5 97 13 3 148 137.5 116

Compact

45 L 15 50 CQ-M3 x 50 L 20 55 CQ-M3 x 55 L 25 60 CQ-M3 x 60 L 30 65 CQ-M3 x 65 L 35 70 CQ-M3 x 70 L 40 75 CQ-M3 x 75 L 45 80 CQ-M3 x 80 L 50 85 CQ-M3 x 85 L 20 5.5 D C 5 45 CQ-M3 x 45 L 10 50 CQ-M3 x 50 L 15 55 CQ-M3 x 55 L 20 60 CQ-M3 x 60 L 25 65 CQ-M3 x 65 L 30 70 CQ-M3 x 70 L 35 75 CQ-M3 x 75 L 40 80 CQ-M3 x 80 L 45 85 CQ-M3 x 85 L 50 90 CQ-M3 x 90 L 25 8 6 MXZ Series Dimensions: MXZ12

Cylinder with Lock

L1 l1 (Min.) l2 R SR (Max.)

Compact Cylinder

CQ2A40-L-PS CQ2A50-L-PS CQ2A63-L-PS CQ2A80-L-PS CQ2A100-L-PS Kits include items !

Series KG Stainless Steel One-touch Fittings

L1 M L2 D2 D1 Part No.

MY1

Data MY1B16 to 100 MY1M16 to 63 MY1C16 to 63 MY1H16 to 40 L L R L L L L R R R R R L R R L Note 2) Note 2) R R L L O-ring L R Slide table operating direction Piping tube Note 2) For bottom piping, refer to the figure above.

Made to Order

L1 With coil scraper: C(D)Q2D-XC26C35 Spatter resistant specification for arc welding: CDQ2D-XC26C88/C89/C91 Th9 L2 (L) (A + Stroke) [mm] Bore size Stroke range XC35/XC91 XC88/XC89 A L L1 L2 Th9 A L L1 L2 Th9 Without magnet for auto switch Built-in magnet for auto switch Built-in magnet for auto switch 32 50 or less 116 126 51 33.5 5 23 0 0.052 131 56 38.5 10 23 0 0.052 75, 100 126 40 50

5

Applicable bore size (mm) Dd9 L L2 m d (Drill through) Applicable split pin Part no.

VS7-6

Dimensions Common EXH n L L1 Equation n: stations L1=56n+64 L2=56n+80 n: stations L1=56n+90 L2=56n+106 M if ld i ht l f l M 0 96 0 77 (k ) Size 1 2 3 4 5 6 7 8 9 10 120 176 232 288 344 400 456 512 568 624 1 2 L2 136 192 248 304 360 416 472 528 584 640 L1 146 202 258 314 370 426 482 538 594 650 3 4 SV L2 162 218 274 330 386 442 498 554 610 666 SY SYJ SX VK VZ VF VFR VP7 ( ): In case of direct

REA/REB

Model REAH25 REAHT25 REATH32 REAH15 REAH20 REAH10 Screw size M5 x 0.8 l-8 M8 x 1.25 M6 x 1.0 l-9 M4 x 0.7 l-7 Bolt dimensions l-12 Dimension t Max.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

L3 (1) Model d Weight (g) D1 D2 L1 L2 L3 (1) Max.