HRX-OM-R016

HRS Series 6.1 Option J [Automatic fluid filling] 6-1 HRX-OM-R016 Chapter 6 OptionOptional Accessories 6.2 Option M [DI water (Pure water) piping] 6.2.1 Option M [DI water (Pure water) piping] This option is for customers who use DI water (pure water) as circulating fluid.

HRX-OM-W038

HRS Series 6.1 Option J [Automatic fluid filling] 6-1 HRX-OM-W038 Chapter 6 OptionOptional Accessories 6.2 Option M [DI water (Pure water) piping] 6.2.1 Option M [DI water (Pure water) piping] This option is for customers who use DI water (pure water) as circulating fluid.

13

V : Piping capacity from ejector and switching valve to pad (l) Q2: Max. flow from ejector and switching valve to pad by piping system Q2 = S x 11.1 l/min (ANR) Q : Smaller one between the Q1 and Q2 l/min (ANR) S : Effective area of piping (mm 2) Tubing length (m) How to read the graph Example: Tubing size 8/6, 1 m Calculation of average adsorption flow Ejector Q1 = ( to ) x Ejector Max

HRX-OM-R005

HRS Series 6.1 Option J [Automatic fluid filling] 6-1 HRX-OM-R005 Chapter 6 OptionOptional Accessories 6.2 Option M [DI water (Pure water) piping] 6.2.1 Option M [DI water (Pure water) piping] This option is for customers who use DI water (pure water) as circulating fluid.

Pressure Sensor Controller

Do not use a cable longer than 30 m. Consult with SMC for the use with a cable longer than 30 m. Connect the 0 VDC wire (blue line) directly or as close as possible to the 0 VDC terminal of the DC power supply.

HRX-OM-O021

HRS Series 6.1 Option J [Automatic fluid filling] 6-1 HRX-OM-O021 Chapter 6 OptionOptional Accessories 6.2 Option M [DI water (Pure water) piping] 6.2.1 Option M [DI water (Pure water) piping] This option is for customers who use DI water (pure water) as circulating fluid.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Description Body class Symbol Bracket assembly LQ-GBL J, K 1, 2 J type K type 1, 2, 3, 4, 5, 6 L, M L type M type (for short piping) Table 1 Tubing size symbols Part No. Description Replacement parts Tubing O.D.

H/DL/L/LL

Norte Parque Industrial Valle Grande, Lampa Santiago, Chile TEL: 02-270-8600 FAX: 02-270-8601 SWEDEN SMC Pneumatics Sweden AB Ekhagsvgen 29-31, S-141 05 Huddinge, Sweden TEL: 08-603-07-00 FAX: 08-603-07-10 ARGENTINA SMC Argentina S.A.

TS/TISA

TS0425 TS0604 TS0806 TS1075 TS1209 TISA01 TISA05 TISA07 TISA11 TISA13 Color 100 m reel Black, White, Red, Blue, Yellow, Green 150 m reel X3 200 m reel 500 m reel Red, Blue, Yellow, Green 20 m roll X4 15-6-3 Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

KC

across flats) Effective area (mm 2) Nylon Urethane 2.6 6.8 16.2 25.6 35.4 Applicable Connection Weight (g) Mounting T (M) Mounting plate thickness 7 mm or less tubing thread Rc 4 6 8 10 12 Model L1 L2 M hole O.D.

MLGC

EK M : Kinetic energy (J) : Load weight (kg) + Weight of movable part (kg) : Piston speed (m/s) EK= 2 M 2 Allowable Kinetic Energy When Locking 40 1.19 {12.1} 32 0.67 {6.8} 25 0.42 {4.3} 20 0.26 {2.7} Bore size (mm) Piston speed (m/s) J {kgf cm} Stopping Accuracy (Not including tolerance of control system.)

T/TIA

T0425 T0604 T0806 T1075 T1209 TIA01 TIA05 TIA07 TIA11 TIA13 Color 100 m reel Black, White, Red, Blue, Yellow, Green 150 m reel X3 200 m reel 500 m reel Red, Blue, Yellow, Green 20 m roll X4 15-6-2 Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

CP95

Nil (Example) A53 3 m L (Example) A53L 5 m Z (Example) A53Z : Manufactured upon receipt of order. 6-13-4 4 Series CP95 ISO/VDMA Cylinder: Standard Type Double Acting w/ End of Stroke Cushioning Accessory Mounting Accessory, Cylinder Female head side clevis (Corresponds to E accessories) Rod/Head side flange Male head side clevis F D C Bore size (mm) CJ1 CJP Supplied with bolt, safety device

CP95

Nil (Example) A53 3 m L (Example) A53L 5 m Z (Example) A53Z : Manufactured upon receipt of order. 6-13-4 4 Series CP95 ISO/VDMA Cylinder: Standard Type Double Acting w/ End of Stroke Cushioning Accessory Mounting Accessory, Cylinder Female head side clevis (Corresponds to E accessories) Rod/Head side flange Male head side clevis F D C Bore size (mm) CJ1 CJP Supplied with bolt, safety device

Compact and Lightweight

11 One-touch Screw-in One-touch N01 N02 N02 Screw-in Screw-in Screw-in ZH15DA08 10 10 One-touch One-touch One-touch 08 03 10 One-touch Screw-in One-touch 02 03 03 Screw-in Screw-in Screw-in ZH15DA09 11 11 One-touch One-touch One-touch 09 N03 11 One-touch Screw-in One-touch N02 N03 N03 Screw-in Screw-in Screw-in ZH18DA10 12 12 One-touch One-touch One-touch 10 03 12 One-touch

Check Valve Series AK

M M AKH03-00 AKH07-00 AKH09-00 AKH11-00 AKH13-00 5/32 1/4 5/16 3/8 1/2 3 6 10 17 24 2.8 6.5 14 24 34 9.3 12 15.2 18.5 21.7 33.5 39 53.3 63.6 70.2 12.7 13.6 18.5 21 22 L Metric Size Male connector type: AKH H (Hexagon width across flats) Connection thread R Applicable tubing O.D.

Flame Resistant (Equivalent to UL-94 Standard V-0) FR Double Layer Tubing Series TRB

K 20 m roll 100 m reel Model TRB0604 TRB0806 TRB1075 TRB1209 M 6 8 10 12 Inner tubing O.D. (mm) Inner tubing I.D.

Antistatic Tubing Series TA

Flexible tubing Model/Specifications 20 m roll 100 m reel TAU0425 TAU0604 TAU0805 TAU1065 TAU1208 TAU3222 Model Tubing O.D. (mm) 4 6 8 10 12 3.2 Tubing I.D.

Clean Tubing: Polyolefin Tubing Series TPH

Clean Tubing: Polyolefin Tubing Series TPH Model/Specifications 20 m roll 100 m reel TPH0425 TPH0604 TPH0806 TPH1075 TPH1209 Model O.D. (mm) 4 6 8 10 12 I.D.

Polyurethane Flat Tubing Series TFU

Made to Order (Please contact SMC for specifications in detail, dimensions and delivery.) 10 m roll 50 m reel 100 m reel Model TFU0425 TFU0604 TFU0805 TFU1065 TFU1208 1. Change of color (10 m roll) 4 Tubing O.D. (mm) 6 8 10 12 Suffix -X4 to the end of part number. Ex.) TFU0604BU-2-10X4 2.5 Tubing I.D.