AC Servo Motor Driver (MECHATROLINK-III type)

Do not short-circuit these terminals. [1] Main circuit power input terminals, L1, L2 and Control power input terminals, L1, L2: Connect the 200VAC external power supply to the power supply. Refer to the power supply specification for the size of the acceptable electric wire. [2] Connect the motor cable (U, V, W) to the servomotor connection terminals (U, V, W).

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

How to Order Valve T 5M N7 VQZ2120 SY Example/Valve C6 5M VQZ2120R SYJ External pilot specification Thread (Cylinder ports and P, R ports) SX VK Rc(PT) External pilot port N NPT VZ M3 x 0.5 (VQZ2000) M5 x 0.8 (VQZ3000) T NPTF F G(PF) VF Note) R port of VQZ2000 is only G(PF) 1/16 VFR Cylinder ports VP7 Symbol M5 02 N1 N3 N7 N9 N11 Applicable tube O.D.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

L2 L1 2. Static moment 3.

Secondary Batteries

Action D B T Port thread type Double acting Double acting with spring loaded Single acting (Spring extend) 20 to 50 Nil TN TF Rc NPT G Note) TF for 20 indicates M5.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

6 t t !1 Component Parts !1 No. Description Material 1 Bracket Steel strip DIN Rail Mounting Bracket q w e q o !0 i y u q o !0 i y Component Parts No.

Speed Controller with

Dimensions, flow rate characteristics and options are the same as standard product (brass needle guide). 8 AS-FG Series Construction w e r t w e r t q o !0 !1 i y u q o !0 !1 i y Component Parts No.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

D2 L1 L2 L3 M1 L4 H(1) A(2) D1 D2 L1 L2 L3 L4 T M1 Weight (g) Model Model Min.

3 Port Solenoid Valve Rubber Seal Series SY100 1

1 o u t !0 VG VP S070 VQ VKF Part no. Material Replacement Parts Material Note Component Parts VQZ No. q w e r t y No. !0 !



L Dimension L1 = 31n + 25, L2 = 31n + 12 n: Station n 10 9 8 7 6 5 4 2 3 Symbol L1 335 304 273 242 211 180 149 87 118 L2 322 291 260 229 198 167 136 74 105 14-6-12 13 Manifold: VVEX2---02 Applicable valve: VEX1230 3 Valve mounting side Pilot port Pilot port F.R.L.

Series SY100 3 Port Solenoid Valve Rubber Seal

Red(+) How to Order VZ Timer circuit Diode LED Coil M3 T L Z 1 SY1 3 5 Body ported VT 1 2 VT Black(-) 4 5 T M Z 1 SY1 Base mounted 1: Inrush current, 2: Holding current VP T> 1 2 3 4 VG Actuation Applied voltage 24V 1 2 Normally closed Nomally open VP Enter in the same way as standard models. 0V Option Standard Large flow capacity style A

VXA21/22

The right side of the common port provides plug. 4.1-65 VVXA21/22 Dimensions Common SUP style Individual SUP style L: Dimensions Model Stations 2 3 4 5 6 7 8 9 10 L L1 L2 L1 L2 100 86 126 108 136 122 172 154 172 158 218 200 208 194 264 246 244 230 310 292 280 266 356 338 316 302 402 384 352 338 448 430 388 374 494 476 VVXA21m VVXA22m Model VVXA21m VVXA22m A 38 49 B 20.5 [17.5] 26.5 [22.5]

PFxx-OMJ0005CN

() CE 0~50 -8No.PF-OMJ0005CN-I * 3 (20 ) LED * OUT * 23% -9No.PF-OMJ0005CN-I 7 PFM (12) 2 (11) 10 0.210(5)L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02

IDX-OM-W093

12 T T 12.1 12.2 AC240V / DC24V 5A() / 2A() DC20V 3mA IDF60/70/80/90 Series 12-1 IDX-OM-W093 T 12.3 AC200/220V ON A(4-5) B6-7 A4-5A B6-7B 3 5 /() OFF 3 OFF6.2 IDF60/70/80/90 Series 12-2 IDX-OM-W093 T 12.4 M3.5 1.01.3Nm M4.0 1.42.0Nm Y L1 L2 PE L3 1 2 3 4 5 6 7 Y L PE N 1 2 3 4 5 6 7 B B L1,L2,L3: A L,N: PE A PE IDF60-20-T IDF70-20-T IDF80-20-T IDF90-20-T M3.5 M4.0

7

9 t q @1 w e @0!4 @3 y !6 o u !7 @2 CK1C (Clevis width 12.5) @4 i !2 !0 !1 !3 !5 Component Parts MK No.

ML2B

Yaw moment M3 = W4 x L2 L2 Data YES Is there any influence of noise? (Refer to Caution on Handling on pages 6 and 7.) Install a noise filter.

10

L2) Model Bore size [mm] Model Bore size [mm] L1 L2 The opening/closing width represents the value when gripping the exterior of a workpiece.

ML2B

Yaw moment M3 = W4 x L2 L2 Data YES Is there any influence of noise? (Refer to Caution on Handling on pages 6 and 7.) Install a noise filter.

Compact

overhang L1, L2 [mm] Allowable overhang L1, L2 [mm] 11 Model Selection MXZ Series For Pressing (Clamping) (1) Confirm that the clamping jig weight and overhang are within the allowable range as shown in the graphs for transfer.

Vacuum System Peripherals:

(mm) Nylon Soft nylon Polyurethane 2 2.18 2.5 3 4 4.5 5 6 6.5 7.5 8 9 12 13 ZX T TS TU ZR Nylon ZM Polyurethane coil tubing Polyurethane flat tubing This tubing makes compact piping possible and can be used with One-touch fittings. Tubing size ZH Model O.D. (mm) 2 2.5 4 5 4 6 8 Description I.D.

q"s

t signal (%F.S.)