Rotary Actuator/Vane Type

to 14 0.5 to 2 Y-1 L2-1 15 5.5 to 18 0.5 to 2.5 Y-1.5 L2-1 20 6 to 20 0.5 to 3 Y-1.5 L2-1 30 8.5 to 22 0.5 to 4 Y-2 L2-2 40 13.5 to 30 0.5 to 5 Y-4.5 L2-2 Shaft type CRQ2 Size MSQ MSZ CRQ2X MSQX Symbol: A47 Symbol: A49 MRQ Machine a keyway into the long shaft.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Model H G L M N E B F LQ (E) 2-B 12 19 10 12 6 8 10 4 6 LQ2T22 LQ2T21 4 6 LVN L 18 34.5 19 12 19.9 SMC 1/4 LQ2T52 LQ2T51 LQ2T42 LQ2T41 LQ2T33 LQ2T32 LQ2T31 F (M) (M) TI/ TIL 43 5 24 22 9 18 26.2 52 42.5 (E) (E) G H PA L L 6 30 21 28 11 22 33.1 59.5 51 Class 2, 3 PAX 7 36 26 32 14 28 40 58.5 PB (M) N Inch sizes Applicable tubing O.D.

Possible to transfer a workpiece at low-speed.

Applicable shaft type: K X = Long shaft side W1 = L1 = L3 = DShort shaft side X = W2 = Size 20, 30, 40 L2 = L4 = Y = (mm) (mm) X 6 to 18 6.5 to 20 9.5 to 30 11.5 to 32 12.5 to 36 Size 10 15 20 30 40 W1 L1 max X 2 X 2 X 2.5 X 3 X 3 L3 max L1 1 L1 1 L1 2 L1 2 L1 2 W2 L2 max Y Y Y Y Y L4 max L2 1 L2 1 L2 2 L2 2 L2 2 Y 4 to 18 4.5 to 20 6.5 to 30 8.5 to 32 9.5 to 36 Size 10 15

High Purity Fluoropolymer

Model H G F L M N E B (E) 2-B 4 6 LQ2T22 LQ2T21 4 6 L 18 19 12 34.5 19.9 1/4 10 LQ2T52 LQ2T51 LQ2T42 LQ2T41 LQ2T33 LQ2T32 LQ2T31 F (M) 43 SMC 5 6 8 24 22 9 18 26.2 52 42.5 (E) (E) G H 12 19 10 12 L L 6 30 28 11 22 33.1 21 59.5 51 Class 2, 3 7 36 32 14 28 40 46 58.5 (M) N Inch sizes Applicable tubing O.D.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft type: K (mm) X W1 L1 max L3 max (mm) Shaft type L3 = Y W2 L2 max L4 max L1 = W1 = J K T J K T J K T J K T Size Size L2 1 4.5 to 14 10 10 X 3 Y 1 0.5 to 2 0.5 to 2 6.5 to 14 L1 1 L4 = L2 = Y = L2 1 5.5 to 18 15 15 X 4 Y 1.5 0.5 to 2.5 0.5 to 2.5 8 to 18 L1 1 L2 1 6 to 20 20 20 Y 1.5 X 4.5 0.5 to 3 0.5 to 3 9 to 20 L1 1 X = L2 2 8.5 to 22 30 30 Y 2 X 5 0.5 to 4 0.5 to 4 11.5

Single Axis Electric Actuator Series LJ1H

load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) m a = 2000 1000 L1 a = 3000 0 10 20 30 Transfer load m (kg) 600 L2 Mer 400 m 200 L2 Mer 0 10 20 30 m Transfer load m (kg) 2000 a = 1000 L3 1000 a = 2000 m a = 3000 Mey a 0 10 20 30 Transfer load m (kg) Refer to page 145 for deflection data. 16 Standard Motor/Horizontal Mount

Series KV2 Fittings

D1 D2 Q MB Applicable Tube A MA L2 L2 App.

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

: Overhang to work piece center of gravity (mm) a = 2000 m 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 2000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 46 Non-standard Motor/Horizontal Mount Specification Series

CRQ2

Applicable shaft types: J, X, T W1 = L1 = L3 = X = W2 = L2 = L4 = Y = (mm) (mm) W2 L2 max Y Y Y Y Y W1 L1 max X 2 X 2 X 2.5 X 3 X 3 L4 max L2 1 L2 1 L2 2 L2 2 L2 2 Y 4 to 18 4.5 to 20 6.5 to 30 8.5 to 32 9.5 to 36 L3 max L1 1 L1 1 L1 2 L1 2 L1 2 Size 10 15 20 30 40 X 6 to 18 6.5 to 20 9.5 to 30 11.5 to 32 12.5 to 36 Size 10 15 20 30 40 0.5 to 1.5 0.5 to 1.5 1 to 2 1 to 2 1

LX

Front mount type l l l Model Bolt Max. tightening torque Nm Max. screw-in depth (l mm) Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M6 x 1 7.4 10 LXP M6 x 1 7.4 12 2. Through holes Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M5 x 0.8 4.4 37.5 3.

Environment

LEY LES Table Displacement (Reference Value) LEPY LEPS 0.08 LER W L LEF32 (L = 30 mm) LEH 0.06 Displacement [mm] LEY -X5 LEF25 (L = 25 mm) 11LEFS 0.04 LEF16 (L = 20 mm) LEF40 (L = 37 mm) 11LEJS 0.02 25ALEC 0 0 100 200 300 400 500 LEC S Load W [N] LEC SS-T Note 1) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table.

Battery-less

16: LEFS32(L/R)EA Lead 16: LEFS32(L/R)EA 20 10 Lead 24: LEFS32(L/R)EH Lead 24: LEFS32(L/R)EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEFS40(L/R)/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEFS40(L/R)EB Lead 10: LEFS40(L/R)EB Work load: W [kg] Work load: W [kg] 50 40 20 Lead 20: LEFS40(L/R)EA 30 Lead 30: LEFS40(L/R)EH Lead 20

15

Workpiece fixed/Plate tapped type Model Screw size Max. tightening torque [Nm] Max. screw-in depth [mm] LEYG25M L M6 x 1.0 5.2 11 LEYG32M L M6 x 1.0 5.2 12 Tap (4 locations) Body fixed/Top mounting Model Screw size Max. tightening torque [Nm] Length: L [mm] LEYG25M L M5 x 0.8 3.0 40.5 LEYG32M L M5 x 0.8 3.0 50.5 2.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Body Through-hole l l Maximum tightening torque (Nm) Max. screw-in l (mm) Bolt Model 2. If intermediate stops by external stopper is done, avoid ejection. If lurching occurs damage can result.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

L12 A WH G H ZY + 2 x Stroke L12 VD L2 Cushion valve G WH + Stroke A H + Stroke L8 + Stroke With rod boot at one end d e f l h h + L8 + H + 2 x Stroke With rod boot at both ends d d e e L8 + Stroke h f l l + Stroke f 2 x h + L8 + 2 x Stroke h + Stroke A B d11 D EE PL RT L12 KK SW G BG L8 VD WA WB WH ZY Bore size (mm) Stroke range (mm) L2 L9 32 40 50 63 80 100 125 190 26 7 4 4 94 16 32 10

Compact

The spacing (L) of the intermediate supports must be no more than the values shown in the following graph. 25 LEMH32 20 Load mass m [kg] LEF m 15 LEJ LEMH25 L 10 LEL 5 LEM LEM m 0 0 200 400 600 800 1000 1200 1400 L LEY Support spacing L [mm] m LES 25 LEPY LEPS L L LEMHT32 20 Load mass m [kg] LER 15 LEH LEMHT25 m m 10 LEY -X5 L 5 11LEFS 0 0 200 400 600 800 1000 1200 1400 11LEJS Square nuts

2 Phase Stepper Motor/Without Motor Brake Series LXS

Positioning driver Allowable Moment (Nm) Allowable dynamic moment Allowable static moment Pitching Rolling Yawing LXS Model 15.7 15.7 7.84 Load movement direction a = 1000 2000 a Mep a = 2000 a = 3000 L1 (mm) L2 (mm) L3 (mm) Pitching Rolling Yawing m : Transfer load (kg) L : Overhang to work piece center of gravity (mm) a : Work piece acceleration (mm/sec) Me: Dynamic moment 1000 m L1 5 10

LG1H

) a = 3000 2000 m L1 0 10 20 30 Transfer load m (kg) L2 600 400 L2 (mm) Mer Rolling Yawing m 200 L2 Mer 10 20 30 0 Transfer load m (kg) m a = 1000 4000 a = 2000 L3 (mm) L3 a = 3000 2000 m Mey a 10 20 30 0 Transfer load m (kg) Refer to page 183 for deflection data. 164

ASP-X352

Body size Metric size Inch size 3 4 5 6 1/8 1/4 3/8 1/2 07 09 11 13 06 08 10 12 6mm 8mm 10mm 12mm 1/4 5/16 3/8 1/2 Thread size Universal type 01 02 03 04 1/8 1/4 3/8 1/2 With One-touch fitting Uni-fit thread form Dimensions Models TUBE O.D. d L3 Applicable tubing O.D.

Single Axis Electric Actuator Serriies LJ1S Slider Guide

Yawing Mep m m : Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) 50 L1 0 2 4 6 8 10 Transfer load m (kg) 150 L2 100 Mer m 50 L2 0 2 4 6 8 10 Mer Transfer load m (kg) m a = 500 150 a = 1000 100 a = 2000 L3 50 m Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 90 Standard Motor/Horizontal