MGZ Series

18 18 12 15 15 44 50 56 138 150 171 4 5 5 1/4 1/4 1/4 to 1000 to 1000 to 1000 7 Series MGZ Non-rotating Double Power Cylinder Applicable auto switches Auto switch models Auto switch type Electrical entry D-Z7, Z80 Grommet Reed switch D-Y59, Y69, Y7P Grommet D-Y7NW, Y7PW, Y7BW Grommet (2 color indicator, with diagnostic output) Solid state switch Grommet (2 color indicator, water resistant

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

8 16 10 9 A + Stroke 20 20 10 20 10 10 25 20 18 36 12 10 30 22 18 36 12 10 40 28 22 44 12 14 8 Series MQQ Accessory Dimensions Female-male thread conversion joint Rod end nut d NN Rod MM D C C B H E F A B H Applicable bore size (mm) Applicable bore size (mm) Part no.

CY1F

Standard Stroke Maximum stroke available (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

NCQ8

Mounting bolt C D Mounting Bolt Size for NCQ8B056 to 250(Without Auto Switch) (Inch) Model C D Bolt size Model C D Bolt size NCQ8B056-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B075-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B106-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B150-012 025 037 050 062 075 087 100 125 150

Dedicated Controller

OFF SUP 1MC 5Ry SGDE servomotor Motor 1MC 1 R U V SGDE servo pack 2 1MC M T 3 W 1CN 4 150 PULS PULS SIGN SIGN CLR CLR 1 2 3 4 5 6 Be sure to ground.

5 Port Solenoid Valve SY Series

Features 2 Manifold Variations Wiring Connection Common specifications Flat ribbon cable (26 pins) Flat ribbon cable (20 pins) connector box Plug-in type D-sub connector (25 pins) Plug-in type flat ribbon cable (26, 20, 10 pins) Plug-in type terminal block (9, 18 pins) Serial transmission unit Negative common Valve Series Individual wiring Positive common Manifold Variations PC Wiring 5

Vacuum Equipment

NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber ZP02 ZP04 ZP06 ZP08 ZP10 ZP13 ZP16 ZP20 ZP25 ZP32 ZP40 ZP50 ZP63 ZP80 ZP100 ZP125 5 7 8 2 2 4 4 7 9 11 2 4 5 7 10 4 6 8 10 5 5 10 10 7 9 9 10 13 10 8 13 11 13 11 10 11 16 20 25 32 12 14 9 9 13 15 19 25 33 13 15 20 26 35 14 17 20 24 30 15 18 21 26 33 14 14 13 20 18 12 13 11 17

3 Port Solenoid Valve SYJ300/500/700 Series

18

-- NCM seies

'trllrF I s NPrF NCME 150 'Noter For Din hole location see NCMC dimensions lfrw XK A a I K L LB N Nll w l Y 7A 0.250 Y4-24 0.50 o.624 0.86 0.38 0.251 o.34 3.75 o.75 Va-18 0.50 0.95 o.62 4.03 w& 1a.50 o.sc 034 o.t51 o.34 3.56 o.?5 7*tA 0.50 io.95 o.62 3.84 106 (17e) 0.312 5.+24 0.50 o.6240.25 1.12 0.38 0.251 0.12 0.34 3.84 0.84 Ve-18 0.62 t.17 0.62 4.12 o.4sl1*n o?

Title not found

p to 18 socnoids possbe '_!

Series AP500

psig (1.0 MPa) 100 0.69 80 0.55 Delivery pressure (MPa) Delivery pressure (psig) 60 0.41 40 0.28 20 0.14 0 0.00 0 50 100 150 200 250 300 350 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

240

0.8 1 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 200 200 200 200 Me 150 150 150 150 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 100 100 100 100 Wall Y L5 50 50 50 50 0 0.2 0.4 0.6 0.8 1 0 0 0 0 0 0.2 0.4 0.6 0.8 1 0.0 0.4 0.8 1.2 1.6 2.0 Work load [kg] 0.0 0.4 0.8 1.2 1.6 2.0 Work load [kg] Work load [kg] Work load [kg] 200 200 200 200 160 160 160 160 L6 L6 [mm] L6 [mm] L6 [mm] L6

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

62 47 9.0 10 30 138 6.0 47.5 40 64 65 24.0 10 32.0 8.5 240 92 66 14.0 14 40 223 7.5 80.0 60 112 94 37.0 15 46.0 10.0 320 136 99 20.0 16 64 300 10.0 110.0 84 162 139 58.0 29 70.0 8-14-18 18 Mechanically Jointed Rodless Cylinder Series MY3A/3B Basic Type: 16, 25, 40, 63 MY3B Bore size Stroke G G NG NG MX 2-P MTS (Hexagon socket head taper plug) MY CY (LL) L LD through hole 4-B depth 4-MM depth

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Compatible Driver Pulse input type/ Positioning type Pulse input type CC-Link direct input type SSCNET#type Driver type Series LECSA LECSB LECSC LECSS Number of point tables Up to 7 Up to 255 Pulse input v v Applicable network CC-Link SSCNET# Control encoder Incremental 17-bit encoder Absolute 18-bit encoder Absolute 18-bit encoder Absolute 18-bit encoder Communication function USB

JXCx-OMT0028CN

19 (1) (GW [IN Data] Address.18, bit0) LEC 1(ON)0(OFF) (2) (GW [IN Data] Address.18, bit1) LEC 0(OFF)1(ON) (3) (GW [IN Data] Address.19, bit0) (GW [OUT Data] Address.2, bit0)1(ON) LEC 1(ON)0(OFF) (4)(GW [IN Data] Address.19, bit1) LEC 1(ON)( GW [OUT Data]Address.2, bit0)00(OFF) 11.3 (IN Data) GW bit 7 6 5 4 3 2 1 0 Address 250 ALARM READY 251 252 253 (1) 250 bit1 Bit0 0 0 0 1 1 0

7.4

L3 60.5 73 85.5 98 110.5 123 135.5 135.5 148 160.5 7.5 29 18 n L 11 12 13 14 15 16 17 18 19 20 L1 141 152 163 174 185 196 207 218 229 240 L2 162.5 175 187.5 187.5 200 212.5 225 237.5 250 250 L3 173 185.5 198 198 210.5 223 235.5 248 260.5 260.5 How to Order Single unit, double check block 2-position 1(P) 5(R1) 5(R1) VQ1000 FPG C4 M5 F 1(P) 3(R2) 3(R2) OUT side port size Option IN

Booster Regulator/Air Tank

(Exception conditions: The inside diameter of the body is 150 mm or less.) Therefore, the KC Certification nameplate is not attached to the VBAT05A1-X101.

Compact and Lightweight

Applicable model A B C D E F G H J L t AS-10D ZH05/07/10DA 11 18 3.5 3.4 18.2 23.2 45 6.2 11.2 14 1.6 AS-25D ZH13/15DA 17 25.8 4.4 4.5 22 27 20 AS-30D ZH18/20DA 22 30.8 27.2 32.2 22 231 ZH Series Circuit Examples Caution Handling of Circuits Select the related air preparation equipment with applicable size in reference to the circuit example below.

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

0.5MPa 0.5MPa Gripping force N Gripping force N 0.4MPa 0.4MPa 150 150 F 0.3MPa 0.3MPa 100 100 0.2MPa 0.2MPa 50 50 0.1MPa 0.1MPa 0 0 10 10 20 20 30 30 40 40 50 50 Gripping point L mm Gripping point L mm MHS2-50D MHS2-50D F 400 400 Internal gripping Pressure 0.6MPa Pressure 0.6MPa 300 300 Gripping force N 0.5MPa 0.5MPa Gripping force N 0.4MPa 0.4MPa 200 200 0.3MPa 0.3MPa 1N: Approx. 0.102kgf

Process Pump

12 11 11 AIR EXH M5 x 0.8 Thread depth 8 Air Operated PB1013A 18 1.5 10 Mount with this surface up FLUID OUT Rc, NPT, G 1/8 76 64 7.5 52 37 20 2 x M4 x 0.7 Female mounting threads Thread depth 6 2 x 4.5 Mounting hole 66 14 14 Foot (Option) 3 2 x M4 x 0.7 Female mounting threads Thread depth 6 AIR SUP Rc, NPT, G 1/8 FLUID IN Rc, NPT, G 1/8 20 8.5 15 8 10 18 Caution 1.