CE2

For Safety Instructions and Actuator Precautions, refer to page 10-24-3 to 10-24-6. Allowable Kinetic Energy Diagram Refer to the diagram and select again. Caution Beginning Sensor 200 100 200 NO Is the cylinder's kinetic energy within the allowable range?

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Refer to page 829-10 8-29-23 24 Dual Rod Cylinder: Double Rod Type Series CXSW 6, 10, 15, 20, 25, 32 How to Order Y7BW CXS W L 100 S 20 Nimber of auto switches Double rod type Nil S n 2 pcs. 1 pc. n pcs.

Lightweight and Compact

100/150 Rated load voltage 48 VAC or less/30 VDC or less Maximum load current 500 mA AC/DC (resistance load) Minimum load current 5 VDC 10 mA Output voltage 24 VDC 10% 500 mA MAX (No inductive load) Contact output signal HRSH 090 HRSH To the thermo-chiller Users equipment side HRSE 7 24 VDC 6 24 VDC output (500 mA MAX) 5 HRZ 15 14 HRZD 24 VCOM output 13 24 VCOM HRW Signal description Default

53

kW Input signal Rated load voltage 48 VAC or less/30 VDC or less Maximum load current 500 mA AC/DC (resistance load) Minimum load current 5 VDC 10 mA Output voltage 24 VDC 10% 500 mA MAX (not usable for inductive load) Contact output signal To the thermo-chiller Users equipment side 7 24 VDC 6 24 VDC output (500 mA MAX) 5 15 14 24 VCOM output 13 24 VCOM Signal description Default setting

Booster Regulator/Air Tank

port 1/8 IN port 1/2 215 62.8 62 8 Silencer (Option) OUT port 1/2 22 32 130 EXH port 1/2 3.2 96 4 x 12 150 116 (When silencer installed: 200) (When high-noise reduction silencer installed: 230) 1019 VBA Series Dimensions VBA22A-03 300 59 39 Pressure gauge (Option) 28 Pilot port OUT side gauge port 1/8 IN side gauge port 1/8 1/8 IN port 3/8 139 43 46 15 Silencer (Option) OUT port 3/8 21 24

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

mm/s Stroke adjustment 2 to 0 mm on each side (4 to 0 mm total) Cushion Sine cushion (Air cushion) Port size 5/16-24 UNF 7/16-20 UNF Vacuum grease for linear guide unit and inside the cylinder tube Lubrication Weight (kg) Standard stroke (mm) Model 700 600 500 450 400 350 300 250 200 150 100 CYV15 3.2 2.8 2.5 2.4 2.2 2.0 1.9 1.7 1.6 1.4 1.2 CYV32 9.1 8.3 7.5 7.1 6.7 6.3 5.9 5.5 5.0 4.6 4.2

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

empty weight deflection 2 2 Lateral empty weight deflection Lateral empty weight deflection 1 1 0.5 0.5 0.2 0.2 0.1 0.1 200 300 500 1000 100 Load point distance mm 200 300 500 1000 100 Load point distance mm 146

Return Filter FH100 Series

Petroleum, Water-glycol, Emulsion: NBR; Phosphoric ester: FKM FH FH HOW Model/Rated Flow Rate Model Port size (Rc) Rated flow rate (L/min) Micromesh Paper FH100-06 FH100-08 FH100-10 FH100-12 FH100-16 FH100-20 FH100-24 3/4 60 50 1 100 80 1 1/4 150 120 1 1/2 200 160 2 300 260 2 1/2 550 450 3 700 600 Description Part no.

Suction Filter with Case FH99 Series

Petroleum, Water-glycol, Emulsion: NBR; Phosphoric ester: FKM, EPDM Model/Rated Flow Rate Model Port size Note 2) INLET OUTLET Rated flow rate (L/min) FH990-04 FH990-06 FH990-08 FH990-10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28 FH991-32 1B 1/2B 20 1B 3/4B 50 1 1/2B 1B 100 1 1/2B 1 1/4B 150 2B 1 1/2B 200 2B 2B 300 2 1/2B 2 1/2B 450 3B 3B 600 3 1/2B 3 1/2B 750 4B 4B 900 Note 2) Both flange

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

64 30 24 113 68 30 24 0.1 2505-003 45.9 3 8 2506-004 50.0 1 2 310 88.5 48 35 2507-006 105.6 3 4 514 97.5 60 41 2508-010 129.6 1 57 54 22 19 2510-002 17.2 1 4 55 56 22 19 2511-003 17.2 3 8 0.05 0.02 0.01 0.005 0.002 Construction/Parts/Dimensions 50 100 200 500 1000 2000 5000 10 20 Port size Air flow (l/min (ANR)) Case (ZDC) Noise Level (Initial conditions) Hexagonal flats D (2507-006: Width

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

/301 Pulse output (Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V) Output Voltage output Note 5) 1 to 5 V Analog Linearity: 2% F.S. or less, allowable load resistance: 100 k or more specifications output Current output Note 6) 4 to 20 mA Linearity: 2% F.S.or less, allowable load resistance: 300 or less with 12 VDC, 600 or less with 24 VDC Power supply voltage

PSxx-OMU0002CN

-) 12 V 300 24 V 600 50 DC(+) -V/-T () OUT1 PNP 2 OUT2 Max.80 mA 1 V DC(-) DC(+) -Y () -V/-T () OUT1 PNP 2 OUT2 Max.28 V80 mA 1 V DC(-) -21No.PS-OMU0002CN-D [] 3 0.2 [] / OUT1 OUT1 OUT2 OUT2 [F10]30 () 1 3 1 3 5 (61 ) 3 () () (24 ) (26 ) (28 ) 3 () 3 -22No.PS-OMU0002CN-D ON OFF ON P_1 H_1 ON OFF [] ISE20A [P_1] OUT1 0.500 MPa [P_2] OUT2 0.500 MPa [H_1] OUT1 0.050

PF2D

6) 4 to 20 mA Accuracy: 2% F.S.or less, Max. load impedance: 300 or less with 12 VDC, 600 or less with 24 VDC output Power supply voltage 12 to 24 VDC 10% Current consumption 20 mA or less (without load) Enclosure IP65 Environmental resistance Operating temperature range Operating: 0 to 50C, Stored: 25 to 85C in stock (with no condensation and freezing) Voltage resistance 1000 VAC for

LMU100/200 Series Mist Spray Unit

section AA L Dimension (mm) 20 200 25 250 30 300 35 350 LMV20/Without air blow circuit T0806 (8 x 6) Applicable tubing Symbol Length T0425 (4 x 2.5) Applicable tubing Air adjusting needle for mist T0604 (6 x 4) Applicable tubing Oil adjusting needle Mixing valve (LMV20-) LMV201 L 46 (24) Double pipe nozzle AIR OIL D C B 12 E A 24 9.5 2 3 57(Max.) 12.5 AIR SMC 27.5 4 10 40 23.5 OIL L Dimension

30

R M A B D E F G H Weight kg 20 25 32 32, 40 40 32, 40 50 50, 63 44 49.5 49.5 60 60 60 71.5 71.5 17.5 19.5 19.5 20 20 20 22 22 21 24 24 31 31 31 41 41 4.5 5 5 6 6 6 7.5 7.5 7 8 8 11 11 11 14 14 7 8 8 11 11 11 13.5 13.5 13 17 17 22 22 22 27 27 30.5 34 34 38 38 38 44.5 44.5 8 9 9 13 13 13 15 15 0.5 0.5 0.5 0.75 0.75 0.75 1 1 300 800 800 1250 1250 1250 3100 3100 0.03 0.05 0.05 0.11 0.11 0.11

PF-OMN0011_C

24 V 600 Max.28 V80 mA 1 V C 15 V 1 k D420 mA 12 V 300 24 V 600 -18No.PF-OMN0011CN-C NPN PF3W30G PNP PF3W30H DC(+) DC(+) OUT1 OUT1 DC(-) DC(-) / / Max.80 mA 1.5 V 30 ms Max.28 V80 mA 1 V 30 ms 2 PF3W30J/PF3W30K DC(+) DC(-) / J15 V 1 k K420 mA 12 V 300 24 V 600 -19No.PF-OMN0011CN-C NPN2 PF3W30A NPN PF3W30C/PF3W30D NPN PF3W30G OUT1 OUT2(PF3W30A) DC(-) DC

VCA

Note 2) Vibration resistance Conditions when tested with one sweep of 10 to 300 Hz in the axial direction and at a right angle to the armature, in both energized and deenergized states. No malfunction occured when tested.

Compact Cylinder Series NCQ8

175 200 250 300 350 400 NCQ8B200-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B250-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 #4-40UNC3/4 7/8 1 1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-7/8 2-1/8 2-3/8 2-5/8 3-1/8 3-5/8 4-1/8 4-5/8 #6-32UNC3/4 7/8 1 1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-7/8 2-1/8 2-3/8 2-5/8 3-1/8 3-5/8 4-1/8 4-5/8 #6-32UNC1-1/8 1-1/4 1-3/8 1-

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

(the value under the prescribed conditions) 0.8 0.7 0.6 Subsonic Critical pressure 0.5 0.4 0.45 0.45 Sonic 0.4 0.4 0.35 0.35 0.3 0.3 0.3 0.25 0.2 0.25 0.2 0.2 0.15 0.15 0.1 0.05 0.1 0.1 0.05 S = 0.54 VDW101 10 60 50 40 30 20 10 20 VDW 1.6 S = 1.2 125 100 75 50 S = 3.2 VDW202.3 350 300 250 200 150 100 50 S = 5.8 VDW203.2 600 500 400 300 200 100 S = 2.8 VDW302 300 250 200 150 100 50 VDW303

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

View port G1/2 5 10 30 50 100 300 Flow rate (L/min) Conditions Fluid: Turbine oil Class 2 VG56 Measured pressure: 14 MPa Viscosity: 45 mm2/s Filter material: Paper Nominal filtration: 10 m FH64 Series Refer to page 529 for Microswitch for differential pressure indication switch. 16 0.1 10/12 0.05 0.04 0.03 06/08 Pressure drop (MPa) 0.02 03/04 0.01 0.005 0.003 5 10 30 50 100 300 Flow rate