ZP

H I Stroke H I 20 20 +10 3.6 +10 3.6 0 0 30 30 +1 1 +1 1 +20 +4.9 +6.4 +20 +4.9 +6.4 50 50 +25 +25 +40 +49.9 +51.4 +40 + 9.9 +51.4 13-11-110 New New Vacuum Pad More shapes and sizes of pads.

5

119 12 12 1/8 12.5 12.5 M5 x 0.8 32 79 11 11 121 12 12 1/8 10.5 10.5 1/8 40 87 12 12 139 13 13 1/8 13 10 1/8 Up to 1500 50 102 13 13 162 14 14 1/4 14 14 1/4 63 102 13 13 162 14 14 1/4 14 14 1/4 80 122 196 20 20 3/8 17.5 17.5 3/8 100 122 196 20 20 1/2 17.5 17.5 1/2 Female Rod End (mm) Bore size A1 H MM ZZ 20 8 13 M4 x 0.7 92 25 8 14 M5 x 0.8 93 32 12 14 M6 x 1 95 40 13 15 M8 x 1.25 104

CQ2

Standard (mm) A Without auto switch B P A B P Q Q With auto switch Bore (mm) 5st 10 50 20 5st 10 33 20 5st 10 20 5st 10 20 5st 10 60 20 5st 10 43 20 32 40 50 RC(PT) 1/8 28 40 M5 X 0.8 50 38 11.5 11 10.5 11 RC(PT)1/8 10.5 11 RC(PT)1/8 46.5 34.5 56.5 44.5 56.5 39.5 66.5 49.5 RC(PT)1/8 RC(PT)1/4 78.5 50.5 10.5 10.5 88.5 60.5 10.5 68.5 40.5 68.5 50.5 RC(PT)1/4 C D E H I J K

Electric Actuator/Slider Type

30 or less Max. acceleration/deceleration [mm/s2] 5000 5000 Positioning repeatability [mm] 0.02 0.02 Lead [mm] (including pulley ratio) 12 6 3 20 10 5 16 8 4 Impact/Vibration resistance [m/s2] Note 5) 50/20 50/20 Actuation type Ball screw + Belt [1:1]/Ball screw Ball screw + Belt [1:1.25] Ball screw Guide type Sliding bearing (LEYG M), Ball bushing bearing (LEYG L) Operating temperature

MY1

50 100 1 2 3 4 5 10 20 30 30 100 200 0.5 m, m, m max. m, m, m max.

ZP

u Connection thread : ZPT/Vertical : ZPR/Lateral (With One-touch fitting) : ZPY/Lateral (With barb fitting) Barb fitting Type Symbol Size Pad diameter [mm] 10 to 16 20 to 32 40, 50 Male thread A10 M10 x 1 A14 M14 x 1 Type Symbol Size Pad diameter [mm] 10 to 16 20 to 32 40, 50 i Lock ring Lock ring unit A5 M5 x 0.8 1 A6 M6 x 1 1 1 1 A8 M8 x 1 1 1 Part no.

ZP

Thread dia. 4, 6 tube 4, 6, 8 tube 6, 8 tube 2 x 4, 3.5 x 7, 4 x 10 Thin section series (10 to 16) 2 to 8 10 to 16 20 to 32 40 to 50 M5 x 0.8, M6 x 1 M4 x 0.7, M5 x 0.8 M5 x 0.8, M6 x 1 M5 x 0.8, M6 x 1 M6 x 1, M8 x 1 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 M6 x 1, M8 x 1.25 Pad Type Flat 2, 4, 6, 8, 2 x 4, 3.5 x 7, 4 x 10, 10, 13, 16, 20 25, 32, 40, 50 Flat with ribs Deep Bellows Pad

Table of Contents

Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 1 2 10 20 Thread type VC Rc G NPT Nil F N Material VDW C S C37 SUS Type 30 VQ VVCW20-4A OUT port size Stations Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 VX2 VX Type 10 is M5 only.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

20 st 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st 32 40 50 35 28 38 50 40 33 5.5 7.5 Rc 1/8 M5 x 0.8 45 43 7.5 Rc 1/8 41.5 34.5 46.5 39.5 8 8 49.5 8 Rc 1/8 51.5 56.5 44.5 Rc 1/8 Rc 1/4 48.5 40.5 10.5 50.5 Rc 1/4 58.5 68.5 60.5 58.5 50.5 10.5 10.5 For details about the rod end nut and accessory brackets, refer to page 7-6-20.

Battery-less

0 0 0 0 5 10 15 20 0 1 2 3 4 0 15 10 5 0 15 10 5 20 L8 Work load [kg] Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting orientation 1.

Fluoropolymer Piping Equipment

3/8" 3/4" 1/2" 20 29 24 17 26 21 44 54 49 23 39 28 5.8 LQ1T5A-R32 1/4" 3/4" 1/4" 39.5 20 36 17 46.5 55 46.5 49 23 3.6 LQ1T6A-R2 1" 1/2" 1" 8 39.5 24 20 20 29 14 28 TD TID 7 TH TIH 9 LQ1T6A-R3 1" 3/8" 1" 5.8 LQ1T6A-R4 1" 1/4" 1" 20 17 55 47.5 55 23 3.6 LQ1T6A-R5 3/4" 1" 1" 8 39.5 18 36 36 69.5 69.5 69.5 49 15 LQ1T6A-R6 1/2" 1" 1" 24 21 54.5 28 9 LQ1T6A-R7 3/4" 3/4" 1" 39.5 36 69.5

1

Model HTB 1 8 Rc CY1S20 CY1S25 CY1L25 CY1S32 CY1L32 CY1S40 CY1L40 20 20 7.5 20 20 7.5 1 8 Rc 20 23 8.2 24 24 7.5 1 8 Rc 26.5 26.5 8.2 25 25 8 1 4 Rc 30.5 30.5 11 Dimensions except mentioned above are the same as standard type of Series CY1B. Refer to page 8-15-24.

CL

20 X 500 20 X 600 20 X 600 20 X 750 20 X 750 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 27 32 32 37 37 60 70 86 102 116 22 27 27 32 41 8 11 11 13 16 M8 X 1.25 M8 X 1.25 96 108 115 129 140 6 7 7 11 11 44 52 64 78 92 14 18 18 22 26 16 20 20 25 30 9 9 32 40 40 52 52 10 10 10 14 14 85 95 102 113 124 15 17 17 21 21 26 27 26 30 31 54 59 67 72 76 10 13 18 23 25 10 12 15 17 19 30 35 35 40 40 MY1 M10

MY1

0 @1 -X #4 #1 20@7 #2 Data @3 #3 #7 #6 @6 !

TABLE OF CONTENTS

AC DC PORTS PORTS 1/32 1/32 3/64 1/16 1/16 1/16 1/16 3/32 3/32 3/32 1/8 3/32 1/8 1/8 3/16 3/32 3/16 1/8 1/4 3/32 1/4 1/8 .024 .024 .052 .095 .095 .095 .095 .156 .156 .156 .284 .156 .284 .227 .500 .156 .500 .227 .700 .156 .700 .227 400 150 (200) 100 (135) 100 (135) 75 (100) 50 (70) 35 (40) 20 20 15 15 400 150 (200) 100 (135) 100 (135) 75 (100) 50 (70) 35 (40) 20 20 E23GG7DCCM E23HJ7DCCM

MGP

m (kg) 25 16 20 25 16 20 16 16 1 1 0.1 10 20 25 26 50 100 200 0.1 10 20 25 26 50 100 200 Stroke (mm) Stroke (mm) 17 l = 50mm V = 400mm/s 18 l =100mm V = 400mm/s 100 50 50 80 100 50, 63 80 50, 63 50, 63 40 50, 63 40 32 40 32 32, 40 32 10 10 25 25 5 5 Load weight m (kg) 20 20 25 16 20 16 25 20 16 1 1 16 0.1 10 20 25 26 50 100 200 0.1 10 20 25 26 50 100 200 25 Series MGP Compact Guide Cylinder

CV/MVGQ

For detailed specifications, refer to page 10-20-1.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

1/4 How to Order Type 43 VV5Z3 05 43 1 C4 1(P), 3/5(R) port thread type 4(A), 2(B) port size Stations 02 2 stations 3/5(R) port Nil F N Z NPTE Rc C4 One-touch fitting for 4 Rc 1/8 G B3 One-touch fitting for 5/32" 20 20 stations 4(A), 2(B) port 1(P) port NPT Rc 1/8 How to Order Flat ribbon cable type 41P Applicable solenoid valve VV5Z3 41P 05 M5 1 3 5 6 1 3 5 6 VZ343MOZ Stations 4(A), 2

CV/MVGQ

For detailed specifications, refer to page 10-20-1.

NCA1

SN 150 (1.5) 7/16-20 3/4 2.02 1 1/8 1 1/8 3/8 0.551 1/4-28 2 0.3 3/8 1.26 1.1 9/32 1/4-20 1.43 1 1.71 3 5/8 2.36 4 3/4 5/8 1 15/16 2 1/4 200 (2) 7/16-20 3/4 2.6 1 1/8 1 1/8 3/8 0.551 5/16-24 2 1/2 0.3 3/8 1.26 1.06 7/16 5/16-18 1.84 1 1.71 3 5/8 2.4 4 3/4 7/8 1 15/16 2 1/4 250 (2.5) 7/16-20 3/4 3.1 1 1/8 1 1/8 3/8 0.551 5/16-24 3 0 3/8 1.3 1.06 19/32 3/8-16 2.19 1 1.75 3 3/4 2.48 4 7/8 1