240

MXH MXH Vertical Horizontal MXS L1: Load eccentricity MXQ m Mounting orientation m MXQ L H MXF L H MXW Maximum speed (mm/s) Up to 100 Up to 300 x Up to 500 Up to 100 100 b 50 v 200 n 50 m Up to 300 100 , 200 .

0.01

Example) G36-P4-01-X30 ISA2 ISA2 2 Port Solenoid Valve Regulator PSE VCA27A S 5 DL 02 4 Q AR 20 02 1 B IS Port size Voltage CE compliant 02 02N 02F Rc 1/4 NPT 1/4 G 1/4 Thread type ISG 1 2 3 4 5 6 36 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC 230 VAC Nil N F Rc NPT G ZSM1 Throttle Nil S B K Without throttle and manual lock With throttle With manual lock With manual lock and throttle Semi-standard

AC Servo Motor Driver (SSCNET Type)

Rotations per Second Distance of movement per second Distance of movement per rotation Rotation Speed (rpm) = Speed (mm/s) Lead (mm) }60 (S) = {500 (mm/s) 20 (mm) }60 (s) =1500 (rpm) -36- 6.6.3 Acceleration/deceleration Time Configuration < Acceleration/deceleration Time Configuration> Acceleration/deceleration time (ms) configuration: The acceleration/deceleration time sets the amount

Air Cylinder Series MB

2,4,6,8... 85 + 30 (n2) n = 2,4,6,8... 95 + 100 (n2) n = 2,4,6,8... 100 + 100 (n2) n = 2,4,6,8... 105 + 100 (n2) n = 2,4,6,8... 110 + 100 (n2) n = 2,4,6,8... 90 + 30 (n2) n = 2,4,6,8...

Compact Cylinder with Solenoid Valve/

Bore size (mm) Stroke range (mm) OB P1 P2 Q RA RB S V W Y Z 32 40 50 63 9 M5 x 0.8 M5 x 0.8 2.5 10 7 12 43 43.5 59 38 5 to 100 9 M5 x 0.8 M5 x 0.8 2.5 10 7 12 43 43.5 67 46 5 to 100 11 Rc, G, NPT1/8 Rc, G, NPT1/8 3.5 14 8 17 54 63 83 58 10 to 100 14 Rc, G, NPT1/8 Rc, G, NPT1/8 3.5 18 10.5 17 54 63 97 69 10 to 100 6 Compact Cylinder with Solenoid Valve/Guide Rod Type Series CVQM Auto Switch

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Refer to p.0-39 to 0-46 for Safety Instructions and common precautions, and refer to p.3.4-2 for precautions on series CB. 75 20 80 90 2 Same side 100 100 100 100 D-A3C D-G39C D-K39C 20+35(n2) n=2, 3, 4, 80+35(n2) n=2, 4, 6, 8, 75+35(n2) n=2, 4, 6, 8, 90+35(n2) n=2, 4, 6, 8, Dif. sides n 100+100(n2) Same side 100+100(n2), n=2, 4, 6, 8, n=2, 3, 4, 5, 90 10 80 75 1 Replacement Dif. sides

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

M12 x 1.75 27 14 34 35 34 100 125 15 100 250 16 112 170 M27 x 2 38 6.5 140 140 112 35.5 80 35 27 19 M14 x 2 27 16 34 35 34 100 160 17 110 279 18 140 197 M33 x 2 42 9 174 174 140 45 100 38 36 22 M16 x 2 28 18 38 40 43 108 (mm) Bore size (mm) Y ZZ P R S T V W X 40 8 246 1/4 37 114 11 7.5 8 27 50 10 262 3/8 43 116 11 10 9 30 63 10 280 3/8 47 120 11 12 10 37 80 13 312 1/2 57 132 11 16 13 40 100

CLK1

D-G5NTL 75 + 50 (n-2) 15 75 30.5 38 43 50 A B 0 (1) 0.5 2 2 D-A3 D-G3, D-K3 100 + 100 (n-2) 35 + 30 (n-2) 35 100 D-B5, D-B6 33.5 23.5 25 25 Approx. Hs 25.5 (28.5) 38 43.5 50.5 D-A4 35 + 30 (n-2) 50 + 50 (n-2) 35 55 A B 0 2 3.5 3.5 D-G5NTL 27 25 26.5 26.5 Approx. Hs 33.5 38 43.5 50.5 A B 0 1.5 1.5 D-A3 D-G3, D-K3 23 24.5 24.5 Approx.

Series IDG

) With dew point indicator 1 10/2.5 3 25/6 50/12 100/25 200/50 300/75 500/125 600/125 750/150 1000/190 5 S Standard equipment 10 20 30 50 60 75 100 Note) In case of two or more options, indicate them in alphabetical order.

3

DC Specification AC Specification (Built-in Full-wave Rectifier Type) Model Power consumption (W) Note 1) Temperature rise (C) Note 2) Model Apparent power (VA) Note 1) 2) Temperature rise (C) Note 3) VXS23/24 12 100 VXS25/26 15 100 VXS23/24 12 100 VXS25/26 15 100 Note 1) The value at ambient temperature of 20C and when the rated voltage is applied.

AC Servo Motor Driver (SSCNET /H Type)

The following shows about this parameter and connectable driver (setting value of [Pr.100] Servo serise). Setting value of [Pr.97] SSCNET setting Driver Setting value of [Pr.100] Servo series 0 SSCNET LECSS-S 1MR-J3-B 1 SSCNET/H LECSS2-T 32MR-J4-B Pr.100 Servo series Be sure to set up servo driver. Communication with servo driver is not started by the initial value 0 in default value.

A

I f a p re s s u re g re a t e r t h a n t h e s e t p re s s u re i s re a c h e d , t h e u n i t w i l l o p e n , c l o s i n g w h e n p re s s u re i s l e s s t h a n s e t pressure.

Ionizer Nozzle type IZN10 Series IZS

Also, regularly check there is no deterioration due to ozone. 444 Technical Data IZN10 Series Blow Velocity Distribution (Supply Pressure: 0.3 MPa) IZS (1) Energy saving static neutralization nozzle/IZN10-01 (2) High flow rate nozzle/IZN10-02 IZN IZN IZF ZVB IZD IZE IZH 0 0 100 100 200 200 Distance [mm] Distance [mm] 3 [m/s] 14 [m/s] 300 300 2 [m/s] 11 [m/s] 400 400 1 [m/s] 9 [m/s] 500 30

ZQ-OM01401

-*ZQ000MA-K25L-*ZQ000MA-J15L-FPD ZZQ1A-ROC *ZQ000MA-K15L---S *ZQ000MA-K25L---S EA EB FA FB EC EE FC FE *ZQ3MAK1 5L--S *ZQ3MAK2 5LK--S EA EB FA FB EC EE FC FE *ZQ000MAJ1 5LF *ZQ000MAK1 5L*ZQ000MAK2 5LEA EB FA FB EC EE FC FE *ZQ000MAK1 5L--S *ZQ000MAK2 5L--S 36 - No.ZQ-OM01401-B 11. ,,, 11.1 / ZQ05A 0.35MPa -100 30 -100 -80 25 [L/min (AMR) ] -80 [L/min (AMR) ] [kPa] [kPa] 20 -60 -60 15

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y A Connection thread S 10 94 60 23 20 132 70 51 30 142 80 40 178 90 77 50 188 100 E D C B 10 49 32.9 24 P 10 8 M5 x 04 06 2.5 Applicable tubing O.D.

Compact Cylinder with Air Cushion

(mm) 63 80 100 A B C D E F H I J K L M N OB P 63 55 15 20 77 31 M10 x 1.5 103 7 17 8 60 9 14 Rc 1/4 30 to 100 73.5 63.5 21 25 98 35.5 M16 x 2.0 132 6 22 10 77 11 17.5 Rc 3/8 40 to 100 88 76 27 30 117 40 M20 x 2.5 156 6.5 27 12 94 11 17.5 Rc 3/8 40 to 100 mm Q RB S U Z Bore size (mm) 63 80 100 34 10.5 93 47.5 19 39 13.5 112.5 57.5 26 43 13.5 132.5 67.5 26 Refer to page 11 for details on rod

MU

Calculation: (Example) MUL32-100 Basic weight0.42 (Foot style 32 equiv.)

MU

M CQS J79W S B 25 10 S M MDU With auto switch CQM CQ2 Built-in magnet Number of auto switches Mounting style RQ Nil S n 2 pcs. 1 pc. n pcs.

MXW

Series MXW 8, 12, 16, 20, 25 How to Order MXW 16 100 B M9N S Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Load N 12 12 12 L = 100mm L = 100mm L = 100mm MXP12-15 MXP12-25 MXP12-15 MXP12-25 0.05 0.04 0.08 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 Table displacement mm Table displacement mm Table displacement mm 0.04 0.03 0.06 0.03 0.04 0.02 0.02 0.01 0.02 0.01 0 50 100 150 Load N 0 50 100 150 Load N 0 50 100 150 Load N 200 16 16 16 L = 120mm L = 120mm L = 120mm MXP16