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+ 0.1 > 0.5, subsonic flow P1 + 0.1 293 Q = 240 x S (P2 + 0.1) (P1 P2) (4) 273 + t Conversion with sonic conductance C: S = 5.0 x C(5) Q :Air flow rate[dm3/min(ANR)], dm3 (cubic decimeter) of SI unit is good to be described by l (liter), too. 1 dm3 = 1 l S : Effective area [mm2] P1 : Upstream pressure [MPa] P2 : Downstream pressure [MPa] t : Temperature [C] Note) Formula for subsonic flow

: (952) 943-1299 Fax: (952) 943-1614 Austin Phone: (512)926-2646 Fax: (512) 836-1397 Romania Phone: 01-2552625 Fax: 01-2552630 Japan Phone: 03-3502-2740 Fax: 03-3508-2480 Malaysia Phone: 03-56350590 Fax: 03-56350602 Denmark Phone: 70252900 Fax: 70252901 Vancouver Phone: (604) 517-1646 Fax: (604) 517-1647 Nashville Phone: (615) 331-0020 Fax: (615) 331-9950 Boston Phone: (978) 326-3600 Fax:

This is the same concept representing the easy to run through as sonic conductance C (effective area). (3) Formula of flow rate When P2 + 0.1 0.5, choked flow P1 + 0.1 293 Q = 120 x S (P1 + 0.1) (3) 273 + t When P2 + 0.1 > 0.5, subsonic flow P1 + 0.1 293 Q = 240 x S (P2 + 0.1) (P1 P2) (4) 273 + t Conversion with sonic conductance C: S = 5.0 x C(5) Q :Air flow rate[dm3/min(ANR)], dm3 (

Temperature characteristics 0 to 50C (With no condensation) Operating temperature range IP65 equivalent Enclosure Connection type Built-in One-touch fittings z, x, c: 4 Metric size For single unit z, x, c: 5/32" Inch size Connection size z, c: 6, x: 4 Metric size Manifold z, c: 1/4", x: 5/32" Inch size (1) Weight 100 g or less (without options) Note 1) Indicates the weight of a single unit

Nil Without auto switch Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bore size B L F G C D T Basic/without bracket style Axial foot style Rod side flange style Head side flange style Single clevis style Double clevis style Center trunnion style B L F G C D T For

Port size AS-D U01 Uni 1/8 U02 Uni 1/4 U03 Uni 3/8 U04 Uni 1/2 AS-T ASP Needle Valve/Flow Rate Characteristics ASN AS2201FSl-U02, AS2211FSl-U02 AS2201FSl-U01, AS2211FSl-U01 300 600 AQ Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 500 ASV 06, 07, 08, 09, 10 08, 09, 10, 11 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 03, 04 06, 07 200 400 AK 01, 23 300 VCHC 03, 04 100 200 ASR ASQ 01, 23

(kg) Model FH150-02 FH150-03 FH150-04 1/4 80 168.5 197.5 259.5 50 15 25 7 6.5 0.7 3/8 1/2 524

C-16 type for pivot C-18 type for pivot Clevis pins and knuckle pins are common for bore size 80 and 100.

HEAD OFFICE: 1-16-4, SHIMBASHI, MINATO-KU, TOKYO 105, JAPAN TELEPHONE: 03-3502-2740 FACSIMILE: 03-3508-2480 ECC-PNAL-PRO-B Effective April 1999 Specifications are subject to change without notice.

bracket) are included with the above parts. 3 Direct Operated 2 Port for Heated Water Series VCB Dimensions Grommet: G Conduit: C Q Approx. 300 F D Approx. 280 D Q F C G1/2 C R R E E B A H 2-P Port size 2-P A 2-M Thread depth N B H Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G1/2 E B A H D 2-P Port size (S) 2-M Thread depth N L K (mm) Electrical entry P Port

C J G5-S CV Fig. (6) Piping MVGQ Before connecting the pipes, remove any foreign matter.

K F 10 AW B 30 03 BG JN K F 21 AW B 30 03 BG JN Copper, fluorine and silicone-free + Low particle generation q r t y w e Filter regulator Option/Semi-standard: Select one each for a to g.

{Rc3/8} FGH200-03 {Rc3/8} FGH300-03 {Rc3/8} FGH200 Series FGH300 Series 0.05 0.05 0.05 Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) 0.01 0.01 0.01 0.005 0.005 0.005 0.001 10 30 50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100-04 {Rc1/2} FGH200-04 {Rc1/2} FGH300-04 {Rc1/2} 0.05 0.05 0.05 Pressure drop (MPa) Pressure

C Tube OD (inch) MA MB Min. Flow Dia. Part Number D1 Wt.

Response message from the product: Send the measured temperature (00250 =25.0 deg C) at that moment.

Blue DC () Number of pins Manufacturer Connector size Applicable series Separate type C. CORRENS & CO., LTD. VA-4D OMRON Corporation XS2 NPN open collector 30V, 80mA Residual voltage 1V or less M12 Yamatake-Honeywell Co., Ltd. 4 PA5-4I Hirose Electric Company HR24 Sensor Blue Brown Black NC DDK Ltd. CM01-8DP4S C.

Note 2) The withstand voltage specification for the wiring unit section is JIS C 0704, Grade 1 or its equivalent.

Valve model Type of actuation Port size 1 4/2 (P A/B) Flow characteristics Note 2) Note 3) Effective area mm2 4/2 5/3 (A/B EA/EB) Weight (g) Pilot port size Cv C [dm3/ (s bar)] b Cv C [dm3/ (s bar)] b Grommet Single Double Closed center Exhaust center Pressure center Single Double Closed center Exhaust center Pressure center Single Double Closed center Exhaust center Pressure center 48