High Vacuum Angle Valve

A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 18.5 8.5 2.7 3 XLAV-25-2 45.5 22.5 8.5 2.7 3 XLAV-40-2 54.5 35 8.5 2.7 3 XLAV-50-2 61 39.5 8.5 2.7 3 XLAV-63-2 80.5 44 12 4 2 XLAV-80-2 90.5 60 12 4 2 6 Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t y u XLC 2 M9N 16

0.01

Dimensions: Centralized Wiring Type With bracket L1 60 3 38 L2 38 5 LED level meter Terminal block box EXH port End plate R End plate L 3 0 3 0 3 0 P P P T T T U U U E E E L L L S S S L L L 81 6 9 6 9 6 9 Setting dial 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 Pressure gauge 12 12 21 Bracket 24 5.5 Rc, NPT, G 1/8 SUP port L3 6.5 36 24 OUT 3 36 OUT 2 OUT 4 n Stations

3

Piston speed [mm/s] 3 mm 5 mm 8 mm 8 mm 10 mm 10 mm 112.5 113.5 133.5 134.5 152 155 Maintenance can be performed for all sizes.

PF3A7xxH_eng

Tightening torque Applicable model [F30] [ SAv] Accumulated value hold [ oFF] Not stored Nominal value [F80] [ dSP] Display OFF mode [ on] Display ON PF3A701H [F81] [ Pin] Security code [ oFF] Not used 1.20.05 Nm 3 PF3A702H Press the S button for 1 to 3 seconds. Press the S button for 3 to 5 seconds.

Series AP3100

1) Only applies to S material with TW4 connections.

HRX-OM-W032

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-25 HRX-OM-W032 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly. Incorrect piping might cause leakage of supplied or drained fluid and wet surrounding area and facility.

Sine Rodless Cylinder Series REBR Direct Mount Type

3 y i #1 !5 #2 !9 !7 !1 !2 !0 #0 r t u @9 !6 e #5 #4 w #3 @5 @7 @4 @6 REBH15 @8 @3 Parts list Parts list No. Description Material Note No.

Title not found

s' i20mh) w'Bool CPA1TN ROD BOOT with Boof BORE B D E J K MM P s dTDeB TT TX TY TZ H z zz h zl 1 3 4 (351 2 7 6 2.O5 152\ o.79 1.57 0 3 9 i10l 067 117\ M8x1.25 0.28 (7\ M16x1.5 1 1 4 (30) 3.54 i90l o 5e 8;tjj (15 3,'* 1 . 1 4 (30) g 7 (95t 2.99 5.31 t135) 2.24 (581 (1031 6.06 (1541 2.05 (521 11.2) 260 (66) s T o 1 1 1 1 6 3 8 1.38 l35l 3 3 5 (85) 2.52 (64) 0.79 (2Ol 1.57 0.39 0.67 t17l 0

MU

F7BWV F7BAV 200 V 100 V 12 V Yes Relay, PLC 2-wire 24 V Connector Diagnostic indication (2-color indication) Grommet 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 3-wire (NPN) 3-wire (PNP) 24 V IC circuit Relay, PLC 5 V, 12 V Diagnostic indication (2-color indication) Yes 2-wire 12 V Grommet Water resistant (2-color indication) 4-wire 2-wire With diagnostic

MU

M CQS J79W S B 25 10 S M MDU With auto switch CQM CQ2 Built-in magnet Number of auto switches Mounting style RQ Nil S n 2 pcs. 1 pc. n pcs.

Clamp Cylinder with Lock Series CLK1

cushion valve Top width across flats 3 4-M6 x 1 Thread depth 12 GA W GB 17 1010 32 3 BX 14 30 45 45 M 3 Approx.

SZ3000

0 (A) 4 (B) 2 5 (EA) 1 (P) 3 (EB) 4(A) 2(B) 5(EA) 1(P) 3(EB) i JIS symbol 2 position double 2 position double (A) 4 (B) 2 w e q r t y u o !0 5 (EA) 1 (P) 3 (EB) 4(A) JIS symbol 3 position closed center (A) 4 (B) 2 2(B) 5 (EA) 1 (P) 3 (EB) 5(EA) 1(P) 3(EB) i 3 position exhaust center (A) 4 (B) 2 3 position closed center/exhaust center/pressure center 5 (EA) 1 (P) 3 (EB) w e q r t y u o !

LG1H

Positioning distance (mm) 1000 500 100 10 1 10 100.5 50.5 10.5 1.5 0.5 100 10.5 5.5 1.5 0.6 0.5 Speed (mm/s) 500 2.7 1.7 0.9 0.6 0.5 1000 1.9 1.4 0.9 0.6 0.5 A B C D Values will vary slightly depending on the operating conditions.

PF3A7xxH.eng

Screw [F13] [ rEv] Select Reverse display [ oFF] Reverse display OFF [F14] [ Cut] Select Zero cut-off setting [ 1.0] 1%F.S. cut Press the S button for 1 to 3 seconds. Press the S button for 3 to 5 seconds. [F30] [ SAv] Accumulated value hold [ oFF] Not stored Press the S button once.

MQQ

-0.1 -0.2 10 14 H 30 S + Stroke Z + Stroke 9 ZZ + Stroke (mm) Bore size (mm) S Z ZZ CI H 168 177 24 40.5 97.5 20 177 186 30 44.5 102.5 25 16 Series MQM Refer to the standard type on page 14 for other dimensions.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

W 32 100 M9BW With auto switch J With auto switch (Built-in magnet) Number of auto switches Nil S 3 n 2 pcs. 1 pc. 3 pcs. n pcs.

Profi-E

Ref er t o set t i ng procedure bel ow w hen hardw are m ode i s sel ect ed ( condi t i on at t he t i m e of shi pm ent : The sw i t ch i s i nst al l ed on t he l ef t H W ) AD D RESS set sw i t ch 1 9 0 9 0 1 H ardw are m ode can set node address by t he 2 2 8 8 sw i t ch on t he ri ght . 7 7 3 3 Address set t i ng range i s 01 t o 99.

PF-OMM0004_C

1 L/min 2 L/min (50 ms) 0.05 L/pulse 0.1 L/pulse 0.5 L/pulse 1 L/pulse 2 L/pulse 090 () 070 ( ) L/minL 3F.S. 3F.S. 2F.S. 2 5%F.S.(25 ) 3 3 9.9 L 9 L 4 0.1L 0.5L 1L NPN PNP 80 mA DC28 V NPN1 V (80 mA ) PNP1.5 V (80 mA ) 25 0.5 s/1 s/2 s -65No.PF-OMM0004-D PF3W704 PF3W720 PF3W740 PF3W711 PF3W721 6 0.5 s/1 s/2 s 15 V 1 k 420 mA DC12 V 300 DC24 V 600 0.4 V ()30 ms 2 4 7

Single Axis Electric Actuator Serriies LJ1S Slider Guide

1 1 C G LJ1 10 S W X10 Guide type Slider guide S X10 Non-standard motor Series Limit switch Series 10 Series 20 Series 30 10 20 30 Cable entry direction Nil None B contact specification 2 pcs.

Series MXP Precision Air Slide Table

Symbol Symbol Definition Unit Symbol Definition Unit Collision speed mm Corrected value for center position distance of moment mm/s An(n=1~3) V Average speed J mm/s Kinetic energy E Va Load J N Allowable kinetic energy Emax W Allowable load mm N Over hung Ln(n=1~3) Wa Nm N Static moment (Pitch, Yawing, Roll) Load equivalent to collision M(Mp,My,Mr) We Nm N Allowable static moment (Pitch,