Modular Type Regulator Series AR 21 21 AR10 AR20 AR25 AR30 AR40 AR40-06 AR50 AR60 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 0 3.5 3.5 3 3.3 3.3 Note) For AR20 only, the position of the pressure gauge is above the center of the piping. 40 Regulator AR20 to 60 Made to Order Specifications Contact P/A for detailed dimensions, specifications, and lead times. q Special Temperature Environment w High Pressure
Air consumption Q [Nl/min.] 15 20 30 40 50 15 20 30 40 50 1 1 32 2 0.4 0.5 0.5 20 25 0.4 0.3 160 2 10 10 125 12 0.3 16 1.5 2 3 4 5 1.5 2 3 4 5 9 0.2 0.2 100 8 80 63 50 10 7.5 0.1 10 6 1 1 6 5 40 0.05 4 5 0.6 0.5 0.4 0.3 0.2 0.15 0.1 0.04 32 4 1500 2000 3000 4000 5000 0.03 3 25 20 0.02 2 2.5 16 1.5 1 1000 0.01 1 0.05 0.04 0.03 10 1 150 200 300 400 500 0.5 0.4 0.3 0.005 0.02 0.015 0.01 6 0.2
D L 4 KGC06-00 KGC04-00 3 3 4 6 KGC08-00 KGC10-00 10.4 17 16 12.8 18.5 17 15.2 20.5 18.5 18.5 23 21 6 8 10 12 20.9 24 22 8 KGC12-00 16 26.5 28 25 13 KGC16-00 130
6 RMA-63 RMY-63 RMA-40 RMY-40 RMA-25 RMY-25 Special resin MYA16-15-R6656 Scraper MYA40-15-R6658 MYA25-15-R6657 MYA63-15-R6659 !8 1 6.2 x 3 x 1.6 O-ring NBR C-14 10.5 x 8.5 x 1 C-5 @3 4 8-14-16 16 Mechanically Jointed Rodless Cylinder Series MY3A/3B Construction MY3B w e t u i @1 @6 @9 !3 !5 !6 !7 !8 MX MTS y q MY !0 @8 @7 !4 !9 r CY !
(H) < In Caee ot B:lT) 0 18 (4.5) Oia 6 6 i=o.ar (ro.5i0a5(115) TUpe 532,r Side Ported L Type Plug Connector (L) M Type Plug Connector(M) NVVsJ3-532staiions -M5, B3T \ | s l ATTI T \i.1 J_ 19 1 e : 9 6 t ' ' i 5 _ 3 ^i :n l ' g r018 (4 5) oLa 11.81 {300) Stationsn) 2 3 5 6 7 a 9 1 0 l1 12 13 a4 '15 16 17 1a 't9 20 L1 1.63 2.05 (41.5) (b2) 2.45 (62.5) 2.47 (731 3.29 3.70 (835) (s4) (104 5)
(H) < In Caee ot B:lT) 0 18 (4.5) Oia 6 6 i=o.ar (ro.5i0a5(115) TUpe 532,r Side Ported L Type Plug Connector (L) M Type Plug Connector(M) NVVsJ3-532staiions -M5, B3T \ | s l ATTI T \i.1 J_ 19 1 e : 9 6 t ' ' i 5 _ 3 ^i :n l ' g r018 (4 5) oLa 11.81 {300) Stationsn) 2 3 5 6 7 a 9 1 0 l1 12 13 a4 '15 16 17 1a 't9 20 L1 1.63 2.05 (41.5) (b2) 2.45 (62.5) 2.47 (731 3.29 3.70 (835) (s4) (104 5)
(H) < In Caee ot B:lT) 0 18 (4.5) Oia 6 6 i=o.ar (ro.5i0a5(115) TUpe 532,r Side Ported L Type Plug Connector (L) M Type Plug Connector(M) NVVsJ3-532staiions -M5, B3T \ | s l ATTI T \i.1 J_ 19 1 e : 9 6 t ' ' i 5 _ 3 ^i :n l ' g r018 (4 5) oLa 11.81 {300) Stationsn) 2 3 5 6 7 a 9 1 0 l1 12 13 a4 '15 16 17 1a 't9 20 L1 1.63 2.05 (41.5) (b2) 2.45 (62.5) 2.47 (731 3.29 3.70 (835) (s4) (104 5)
It is illustrated with an arrow pointing away from the valve body or a "filled" triangle on the schematic. f INLET E OUTLET Mounting hole Outlet (Downstream) Bottom port (Upstream) Inlet (Upstream) Porting Symbols Top view (Mounting hole on bottom) 2PW 2PWA 2PWB 2PWC q q q w 2 Ports 3 Ports 4 Ports q w w w 3PWD 3PWE 3PWG 3PWH 3PWF 3PWJ q q q q q q e e e e e e w w w w w w 4PWK 4PWL 4PWM 4PWN
Average suction flow rate V x 60 T1 V x 60 T1 Q = Q = + QL T2 = 3 x T1 T2 = 3 x T1 Q : Average suction flow rate /min (ANR) V : Piping capacity () T1 : Arrival time to stable Pv 63% after adsorption (sec.) T2 : Arrival time to stable Pv 95% after adsorption (sec.) QL : Leakage at work adsorption /min (ANR) 2.
1*2 gal/min 6*1*2 V V gal/min 7*1*2 V gal/min Port size Symbol Port size Applicable model LFE1 LFE2 LFE3 3 3/8 V 4 1/2 V 6 3/4 V 8 1 V *1 Options 4, 5, 6, and 7, which are not in SI units, are not for use in Japan due to the New Measurement Law. *2 Options 4, 5, 6, and 7 cannot be selected when the output specification is J or K.
Refer to the table below if spacers are required separately. 2 Size 2 2 3 3 4.5 4 6 2 1/4 3 3/8 3 Size 3 3 4.5 4 6 2 1/4 3 3/8 Electrical entry DC AC Female thread type 1 Size 1 1 2 2 3 1 1/8 G Grommet 2 Size 2 2 3 3 4.5 2 1/4 *1 GS Grommet (With surge voltage suppressor) 3 Size 3 3 4.5 4 6 3 3/8 D DIN terminal (With surge voltage suppressor) Fitting type Face seal fitting/Compression
30 55 43 10 31 19 15 36.5 24.5 A B A B A B A B A B A B 11-/22-MXP10 11-/22-MXP10 3 5 11-/22-MXP12 11-/22-MXP12 11-/22-MXP16 11-/22-MXP16 99 Air slide table MXP/MXPJ6 11221122Dimensions / MXPJ6 5 C 11-/22-MXPJ6-5 Depth 2.5 2.5 7 H 5 10.05 3 3.5 4M3 x 0.5 depth 3 +0.030 0 D B 16.5 3.5 18 14 13 20 6 +0.030 0 Depth 2.5 2.5 6 E 5 2-M4 x 0.7 Piping port F QL 6 13.5 Prepared hole diameter 3.3
Valve model Port size VCS21 VCS20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCS30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCS31 VCS30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCS40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCS30-12-04 VCS41 1/2 48 56 36 44 23 23 6 5.5 7 23 VCS40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCS Direct Operated
(Shield) 4.4-8 Stroke Reading Cylinder Series CE1 Construction 12, 20 32 @7 @4@8 @0 oi @3!0 u @8 @4 !2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y MK/MK2 RSQ/RSG !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !
2.5 3 4 x M4 x 0.7 A 0.5 19 +0.030 0 depth 2.5 3 20 0.05 Prepared hole diameter 3.3 +0.030 0 15 W 0.50.05 B D 2 x M5 x 0.8 Piping port M5 x 0.8 Vacuum port 28 27 10 4.5 J depth 1.5 3 6 +0.030 0 10 9.5 4 Section AA B D Mounting base side +0.030 0 Q QL depth 1.5 3 11-/22-MXP10-20 Without magnet and switch rail Max. 2.5 2 x M2 x 0.4 depth 3 8 2.5 4.7 15 15 L 6 x M3 x 0.5 depth 4 2 x M3 x 0.5
9 @0 q !6 !5 i y !7 e !0 u !8 !3 !4 #0 !1 o !2 t r @2 @1 #3 #4 @9 #1 #2 @5 @7 @4 @6 CY1H10 CY1H10-B CY1H10-BS CY1H10@3 @8 #0 t Material Note Component Parts No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 No.