Peltier-type Chiller Thermo-con/ Compact Type

For details, refer to the optional accessory (page 11). 6 HEF Series Cooling Capacity Circulating fluid: Water, Flow rate: 1 L/min Circulating fluid: Water, Flow rate: 1 L/min, When constant fan speed mode is selected 600 600 500 500 Cooling capacity [W] Cooling capacity [W] Ambient temperature 25C 400 400 Ambient temperature 25C 300 300 200 200 Ambient temperature 35C Ambient temperature

Lightweight and Compact

mA AC/DC (resistance load) Minimum load current 5 VDC 10 mA Output voltage 24 VDC 10% 500 mA MAX (No inductive load) Contact output signal HRSH 090 HRSH To the thermo-chiller Users equipment side HRSE 7 24 VDC 6 24 VDC output (500 mA MAX) 5 HRZ 15 14 HRZD 24 VCOM output 13 24 VCOM HRW Signal description Default setting 12 4.7 k Contact input signal 2 Circuit diagram 4 1 k HECR 11 Run/stop

HRS100/150

mA AC/DC (resistance load) Minimum load current 5 VDC 10 mA Output voltage 24 VDC 10% 500 mA MAX (No inductive load) Contact output signal To the thermo-chiller Users equipment side 7 24 VDC 6 24 VDC output (500 mA MAX) 5 15 14 24 VCOM output 13 24 VCOM Signal description Default setting 12 4.7 k Contact input signal 2 Circuit diagram 4 1 k 11 Run/stop signal input Contact input signal

53

mA AC/DC (resistance load) Minimum load current 5 VDC 10 mA Output voltage 24 VDC 10% 500 mA MAX (not usable for inductive load) Contact output signal To the thermo-chiller Users equipment side 7 24 VDC 6 24 VDC output (500 mA MAX) 5 15 14 24 VCOM output 13 24 VCOM Signal description Default setting 12 4.7 k Circuit diagram Contact input signal 2 4 1 k 11 Run/stop signal input Contact input

HRX-OM-W060

By default: 500 hour Usage time Displays the usage time of a dustproof filter. 6 Dustproof 1 to 9hour The Maintenance reminder is issued if the usage time has reached the hours specified by the user.

HRX-OM-X071

500 0 0 0 10 20 30 40 0 10 20 30 40 Circullating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9-11 Heating capacity (HRR050-A/W-20-) 9.5.2 HRR050-A/W-402000 2000 Ambient temp Ambient temp 1500 1500 Heating capacity[W] Heating capacity[W] 40 40 32 32 25 25 1000 1000 5 5 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature[] Circulating fluid temperature

smcmaintenancepartslist

How to Order Standard Elements 500 EM A 074 Element seal material/Operating temperature range Micromesh element symbol Symbol Element seal material Non-asbestos Fluororesin NBR FKM Operating temperature range(C) 0 to 150 0 to 120 0 to 80 0 to 120 Symbol Element composition symbol A Note) Element composition symbol Stainless steel 304 Stainless steel 316 T Note) 100 500 N V Note) Not possible

MU

Operating the cylinder by connecting the piping directly to the cylinder can cause the piston speed to exceed the maximum operating speed of 500 mm/s. Therefore, to operate the cylinder, make sure to use an SMC speed controller and adjust the piston speed to 500 mm/s or less.

SL5200

PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.

Series CQ2

Lead wire length Internal circuits Model 3m (~9ft) 0.5m (~1 1/2ft) 53 (1.9) 10 (0.35) D-Y59A, Y69A, Y7P D-Y59A, Y69A 50 (1.8) 9 (0.3) D-Y59B, Y69B, Y7PV Dimensions (mm) DC (+) Brown [Red] 1in = 25.4mm D-Y59A, Y59B D-Y7P Mounting screw M2.5 x 4l Main switch circuit OUT Black [White] Slotted-head set screw 2.5 3.4 Indicator light 6.2 6.2 5 DC () Blue [Black] 29 (500) (3000) (5000) D-Y7P (V)

CXS

CXSW6 1 0.5 0.4 0.3 0.2 0.1 0.05 Bore size (mm) 6 to 32 100 200 300 500 1000 0 50 CXSWM (Slide bearing) Cylinder speed Vp (mm/s) 0.1 CXSWL (Ball bushing bearing) 34 Dual-Double-Rod Cylinder Series CXSW Made to Order Auto Switches Precautions Compact Type CXSJ Standard Type CXS With Air Cushion CXS With End Lock CXS Construction CXSWM Slide bearing CXSWM6 CXSWL Ball bushing bearing CXSWL6

ASR

rotations Meter-in Type (Inlet Pressure: 0.5 MPa) ASQ530F ASQ430F ASQ630F 20 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) 400 Effective area mm2 Effective area mm2 Effective area mm2 6 12 1000 15 300 8 4 500 10 200 500 4 2 5 100 10 5 0 10 5 0 10 5 0 Number of needle rotations Number of needle rotations Number of needle rotations Pressure Characteristics (ASR) ASR430F,

A

500 Model A B C Pipe Size Flow Rate ln/min 12500 16500 NAL800 100 283 59 112 Flow rate quoted at: 0.5MPa supply 0.03MPa pressure drop NAL900 100 288 63 2 H O W T O O R D E R L U B R I C AT O R S E R I E S AL AL800-12 (1 14 PT) AL800-14 (1 12 PT) AL900-20 (2 PT) Courtesy of Steven Engineering, Inc. !

ML1

, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 25 32 40 2000 2000 2000 *When the required stroke is longer than the standard stroke , refer to the specifications for Made to Order q (p.5.4-79) longer stroke styles.

MQQ

Selection Series MQM Caution Operating Speed Allowable Kinetic Energy Lateral load resisting type: MQML Load weight and maximum speed Bore size (mm) Allowable kinetic energy (J) 1000 Example) Driving a load of 15(N) using MQM16 with a maximum speed of 460(mm/sec) 500 6 10 16 20 25 0.015 0.059 0.161 100 0.386 0.597 50 Load weight W(N) (15) 10 5 25 20 1 16 0.5 10 6 0.3 50 100 (460) 500 3000

Table of Contents

600 700 800 900 1000 1100 1200 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end (mm/s) Speed at the end (mm/s) Applicable related components Applicable related components For details regarding different conditions, make determinations after using the SMC Model Selection Program Pneumatic Cylinder Drive Systems.

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

Replacement Parts: Seal Kits 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit No. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

VDC Mega) between external terminal and case Insulation resistance 10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration in each X, Y, Z direction for 2 hrs., whichever is smaller.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Pressure 0.5 MPa Load rate: 50% Stroke 60 mm Series MB/CA2 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series MB/CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ7140-02 Cylinder is in extending.

Mechanically Jointed Rodless Cylinder Series MY1

1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s Piston speed mm/s Features 6