Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Regulator How to Order ARP 30 03 BG K 10 Less particle generation in a clean room Grease:Fluorinetype Packaging:Doublepackaging Clean room compliant Specialapplications 10 Clean room compliant, copper-free, fluorine-free, silicone-free Less particle generation in a clean room Wettedparts:Aluminumdie-cast Stainless steel, HNBR, NBR Grease:Lithiumsoapbasedtype Clean room compliant Clean room

SMC CORPORATION OF JAPAN

HEAD OFFICE: 1-16-4, SHIMBASHI, MINATO-KU, TOKYO 105, JAPAN TELEPHONE: 03-3502-2740 FACSIMILE: 03-3508-2480 ECC-PNAL-SOFT-B Effective June 1999 Specifications are subject to change without notice.

,

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2001 SMC CORPORATION All Rights Reserved 1st printing October, 2001 D-SMC.L.A. P-80 (D) All specifications in this catalog are subject to change without notice. Printed in Japan. This catalog is printed on recycled paper with concern for the global environment.

Body Size: 40, Backflow: K (w/Backflow Function), Thread: N (NPT), IN Port Size: 03 (3/8), OUT Port Size: 03 (3/8), Options: J (Right Angle Square Type Pressure Gauge w/Limit Indicator), Set Pressure: 0.05 TO 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Downward, Pressure Unit: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 40, Backflow: K (w/Backflow Function), Thread: N (NPT), IN Port Size: 03 (3/8), OUT Port Size: 03 (3/8), Options: BJ (w/Bracket, Right Angle Square Type Pressure Gauge w/Limit Indicator), Set Pressure: 0.05 TO 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Downward, Pressure Unit: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 40, Backflow: without Backflow Function, Thread: N (NPT), IN Port Size: 03 (3/8), OUT Port Size: 03 (3/8), Options: w/o Mounting Option, Set Pressure: 1 (0.02 to 0.2 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Downward, Pressure Unit: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

3 Port Solenoid Valve Metal Seal Series VZ200 1

-01 L: VZ2 5-L(Z)-01 300 (Lead wire length) With light/surge voltage suppressor Applicable cable O.D. 3.5 to 7 Max.10 84 With light/surge voltage suppressor M5 x 0.8 (Pilot EXH) Pg7 76 68.2 1 2 M: VZ2 5-M(Z)-01 43 19.5 PE PA 11 8.5 7 With light/surge voltage suppressor 300 2.5 3-Rc 1/8 (Lead wire length) (Pilot EXH) M5 x 0.8 M5 x 0.8 (Pilot EXH) 4-15-6 7 Series VZ200 Manifold Specifications

Square Tube Type Air Cylinder Series MB1

Port Cushion valve Bore size (mm) Double clevis type/(D) Z ZZ CDH10 32 40 50, 63 80, 100 160 164 190 238 170.5 175 205 261 Double clevis type U Bore size (mm) Stroke range CDH10 CX +0.3 +0.1 CZ L RR U Z ZZ L Z + Stroke RR CX 32 40 50 63 80 100 to 500 to 500 to 600 to 600 to 750 to 750 23 23 30 30 42 42 10.5 11 15 15 23 23 13 13 17 17 26 26 28 28 40 40 60 60 154 158 182 182 228 228 164.5

CNG

TB AL PH Head side cylinder port H1 0 0.05 0 0.05 BC D E TH BZ I E TT MM Width across flats KA Width across flats NA TY TW 8-J Width across flats B1 TX TV TZ BC C 0.1 TE +0.10 0 4-TF Z + Stroke ZZ + Stroke f 8 l e ZZ + l + Stroke Z + l + Stroke h + l With rod boot Stroke range without rod boot Standard Long stroke 20 25 32 40 Stroke range with rod boot Standard Long stroke Bore size (mm)

Cylinder with Lock Series CNG

Z (Example) C73CZ 3m . L C73CL None ...

C95Series

Pa" s<;'';:~\Z.

JIS Standard Hydraulic Cylinder

Auto switch models D-A9 and D-APV cannot be mounted on CHD2E, CHD2H of all bore sizes and CHD2F32. 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Since there are applicable auto switches other than listed, refer to page 380 for details. For details about auto switches with pre-wired connector, refer to pages 474 and 475.

70astamb1

Without Air Cushion Port Cushion valve Double clevis style (D) CDH10 Bore size (mm) Z ZZ 32 40 50, 63 80, 100 170.5 160 164 190 238 175 205 Double Clevis Style 261 U Bore size (mm) Stroke range CDH10 CX +0.3 +0.1 CZ L RR U Z ZZ L Z + Stroke RR CX 32 40 50 63 80 100 Up to 500 23 23 30 30 42 42 10.5 11 15 15 23 23 13 13 17 17 26 26 28 28 40 40 60 60 154 158 182 182 228 228 164.5 10 10 14

mb1

Without Air Cushion Port Cushion valve Double clevis style (D) CDH10 Bore size (mm) Z ZZ 32 40 50, 63 80, 100 170.5 160 164 190 238 175 205 Double Clevis Style 261 U Bore size (mm) Stroke range CDH10 CX +0.3 +0.1 CZ L RR U Z ZZ L Z + Stroke RR CX 32 40 50 63 80 100 Up to 500 23 23 30 30 42 42 10.5 11 15 15 23 23 13 13 17 17 26 26 28 28 40 40 60 60 154 158 182 182 228 228 164.5 10 10 14

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

Stroke range Bore size (mm) +0.3 +0.1 CDH10 U Z RR CZ Z L CX ZZ ZZ CDH10 32 40 50 63 80 100 up to 500 10 13 162 10.5 28 170 23 14 172.5 180.5 up to 500 10 13 171 11 28 184 23 14 182 195 up to 600 14 17 194 15 40 206 30 20 209 221 up to 600 14 17 194 15 40 206 30 20 209 221 U up to 750 22 26 246 23 60 264 42 30 269 287 CX L RR up to 750 22 26 246 23 60 264 42 30 269 287 Z + Stroke CZ ZZ +

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

CI -0.1 -0.2 14 10 H 30 S + Stroke Z + Stroke 9 ZZ + Stroke (mm) Bore size (mm) S Z ZZ CI H 20 168 177 24 97.5 40.5 25 177 186 30 102.5 44.5 15 Lateral Load Resisting Low Friction Cylinder Metal Seal Series MQM Refer to the basic type on page 13 for other dimensions.

NCA1

R O D B O R E S I Z E 7/16-20 7/16-20 7/16-20 3/4-16 3/4-16 3/4-16 1-14 1-14 1 1/4-12 1 1/2-12 1 7/8-12 5/8 5/8 5/8 1 1 1 1-3/8 1-3/8 1-3/4 2 2-1/2 S TA N D A R D S T R O K E 150 1.5 200 2 250 2.5 325 3.25 400 4 500 5 600 6 800 8 1000 10 1200 12 1400 14 E 1 G 1 3/8 H 1 3/4 J 2 K 2 1/2 L 3 M 3 1/2 Z Please consult SMC Customer Service for larger sizes.

Air Cylinder NCA1 Series

R O D B O R E S I Z E 7/16-20 7/16-20 7/16-20 3/4-16 3/4-16 3/4-16 1-14 1-14 1 1/4-12 1 1/2-12 1 7/8-12 5/8 5/8 5/8 1 1 1 1-3/8 1-3/8 1-3/4 2 2-1/2 S TA N D A R D S T R O K E 150 1.5 200 2 250 2.5 325 3.25 400 4 500 5 600 6 800 8 1000 10 1200 12 1400 14 E 1 G 1 3/8 H 1 3/4 J 2 K 2 1/2 L 3 M 3 1/2 Z Please consult P/A Customer Service for larger sizes.

MU

These are installed with double clevis style and double knuckle joint style as standard. 2.4-17 Plate Cylinder Series MU Accessory Dimensions Single Knuckle Joint Double Knuckle Joint (mm) (mm) Applicable pin Model MUl25 MUl32 MUl40 MUl50 MUl63 Z LX RR 8.5 10 11 16 16 LD LU 11 14 15 20 20 LC 16 18 20 28 28 LB 27 31 36 46 46 Z LA 35.5 41 47 62 62 LX RR 8 10 10 16 16 LB 27 31 36 46 46 L 52.5

CL

Without rod boot Z 190 207 214 241 With rod boot ZZ 211 228 238 269 Bore size (mm) Z 210 229 236 261 ZZ 231 250 260 289 20 25 32 40 9-2-31 Series CLG1 Basic Style with Air Cushion: CLG1BA Refer to page 9-2-31 for mounting bracket, since the dimensions except GA, P , WA, WB, WH, WW, W are the same.