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(mm) Effective orifice(mm 2) Weight (g) A Thread R(PT) Part No. H (Hex.)

1/4 5 Process Pump Air Operated Type (External Switching Type) Series PA3000/5000 How to Order 1 1 PA 3 03 3 PA3000 Body size Connection port size 03 04 06 3 5 3/8 (10A): PA3 1/2 (15A): PA5 3/4 (20A): PA5 3/8 standard 1/2 standard Liquid contact body material Thread type 1 2 ADC12 (aluminum) SCS14 (stainless steel) PA5000 Nil T F N Rc NPTF G NPT Diaphragm material 1 PTFE T, F, N are order

Data MY1B16 to 100 MY1M16 to 63 MY1C16 to 63 MY1H16 to 40 L L R L L L L R R R R R L R R L Note 2) Note 2) R R L L O-ring L R Slide table operating direction Piping tube Note 2) For bottom piping, refer to the figure above.

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.

Note 2) Types with auto switches are not available in case of high temperature types. r o 2-1 8-1 8-2 XLA 2-1 8-1 Note) Values at normal temperature, excluding gas permeation. r o 8-2 XL XL XLQ Maintenance Parts XM XY w Bonnet Assembly Part No. i Bypass Valve Part No.

(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQC1201 VQC1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQC1300 VQC1400 VQC1301 VQC1401 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQC1500 VQC1501 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQC1A01 VQC1B01

)5 1 (P) 3(R2) VQZ r r e q w e q w SQ VFS VFR VQ7 VQ2300 VQ2400 VQ2301 VQ2401 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r VQ2500 VQ2501 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQ2A01 VQ2B01 4(A) 2(B) 2(B) 4(A) r 5(R1) 1(P) 3(R2) 5(R1) 1(P) 3(R2) VQ2C01 2(B) 4(A) 5(R1) 1(P) 3(R2) Component Parts Component

q e r w q e r w 3-position closed center 3-position exhaust center 4-position dual 3-port valve N.C. valve x 2 pcs.

For connector cable of M8 connector, refer to page 90. 3 Series SYJ3000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R) 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) y 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 q t r w 5 (R) 3 (R) 1 (P) (B) 2 (

center (A) 4 (B) 2 SX q t r w 5 (R) 3 (R) 1 (P) (B) 2 (A) 4 3 position exhaust center (A) 4 (B) 2 5 (R) 3 (R) 1 (P) 3 position pressure center u (A) 4 (B) 2 3 (R) 1 (P) 5 (R) (This figure shows a closed center type.) 5 (R) 3 (R) 1 (P) Component Parts Replacement Parts Note Zinc die-casted Part no.

, H, L r u. E 03 05 07 09 't't 5132" 1l4', 5/16' 3t8" 1/2" 6mm 8mm H , T , U , X , N 1 3 06 08 t0 1 2 1 6 32 i10-32 UNF Thread 3 5 I l t N P r H ' L . W , r .

For Air/ D Q F D Q F z 300 z300 R E C C R E Water For Air For Medium A 2 x P Port size 2 P Port size A B1 B1 B B Vacuum For Oil Construction Dimensions Construction Dimensions DIN terminal Conduit terminal F Q Cable 6 to 12 D D S G1/2 Qp2 F 34 (44) 31.5 25 T C C R R E G1/2 E 2 x P Port size A 2 x P Port size A B1 Sp2 B B1 B Conduit Faston type D G1/2 Q F D Q F 11 z 280 VX2 23 R C C R E

OFF SUP 1MC 5Ry SGDE servomotor Motor 1MC 1 R U V SGDE servo pack 2 1MC M T 3 W 1CN 4 150 PULS PULS SIGN SIGN CLR CLR 1 2 3 4 5 6 Be sure to ground.

oqir -M5, BgT I l , NPTF 2 porrs i 'u NPTF z Po't" ,D# tp pod, l l -r-f *_\ \ 1 l \ 0.39 (1ol n ) 4 6 7 R 10 1 1 1 1 2 13 14 15 16 18 19 L1 (39.5) 1.57 (50) 2.8 (60.5) 2.ffi (7r) 3.2 (81.5) (92) 4.O4 4.45 002.5) (11s) 4.86 (r23.5) 5.28 5.69 (134) (144.5) 6.10 fts5) 6.52 (165.5) 6.93 076) 7.34 (1e6.51 (197) 4.17 (207.58.58 (218) 9.00 (228.5) L2 124 {31,5) (42) 2.O7 (52512.44 (63) 2.g r 3.31

oqir -M5, BgT I l , NPTF 2 porrs i 'u NPTF z Po't" ,D# tp pod, l l -r-f *_\ \ 1 l \ 0.39 (1ol n ) 4 6 7 R 10 1 1 1 1 2 13 14 15 16 18 19 L1 (39.5) 1.57 (50) 2.8 (60.5) 2.ffi (7r) 3.2 (81.5) (92) 4.O4 4.45 002.5) (11s) 4.86 (r23.5) 5.28 5.69 (134) (144.5) 6.10 fts5) 6.52 (165.5) 6.93 076) 7.34 (1e6.51 (197) 4.17 (207.58.58 (218) 9.00 (228.5) L2 124 {31,5) (42) 2.O7 (52512.44 (63) 2.g r 3.31

( Body Ported Type 2 Position Single : NVJA3120-M3(-F) 2 Position Double : NVJA322O-M3(-F) M3x0.5 2 po.ts (Piot r 0.07(1.8)Dia 2 Mounting hotes 0.13(3.2) Dia 2 Mounting holes \. I f---a I \ -"j f!'-ll L?

Single vane type Double vane type 0 -5 +4 0 a r n n R e o 9 g o g t 0 0 n a i e 9 +4 0 a t t 0 i a o r 0 1 e t 1 n n o 8 g o R 0 e n r i a g a +4 0 t a n n r t g a n o e r o R n i 2 t o a 7 t i 0 t o a R t o +4 0 R For size 40 actuators, a parallel keyway will be used instead of chamfer.

LC1-1-S1 (PC-98 (MS-DOS) edition LC1-1-W1 (Windows 95 edition) and LC1-1-R (dedicated communication cable) Power supply 1 2 Note 2) 100/110VAC 50/60Hz 200/220VAC 50/60Hz or LC1-1-T1(Teaching box) are required. For ordering information, refer to the option part numbers on page 62.