VQ7-6/7-8

U side D side A B Side Bottom Cylinder port location Rc Nil NPTF T G F P, R port size L R L side R side Cylinder port size 04 06 C12 Rc 1/2 Rc 3/4 One-touch fitting for 12 Note) It is not applicable to One-touch fittings. 03 04 3/8 1/2 Thread type Rc Nil NPTF T G F Replacement Parts (For manifold block) Description Material Qty.

ZP3

Form w 1 Material e r Vacuum inlet Vacuum inlet: One-touch fitting (2) Connection thread Applicable tubing O.D.

Rotary Actuator/Vane Type

2 q o !0 !0 !2 !3 o r !3 w !4 r w !5 !4 !1 !1 y u i D-M9m !6 Component Parts No. Description Material No.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

2, !

1

Note 7 NCA Non-rotating rod type Lateral load resisting type r, !1, !6, !7, !8, !9, @0, @1, @2, @3, @6, @9, #0, #1, #3, #4, #5, #6, #7 20, 25, 32, 40, 50 !9 is type L only. -XC6A r, !0, !5, !6, !7, !8, !9, @0, @1, @3, @4, @7, @8, @9, #1, #2, #3, #4, #5, #9, $0 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. Dr, !1, !

VFR

2, Metal joint q, w, Gasket B r, Guard !3, Steel ball !2 End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

VQ7-6/7-8

U side n Silencer box Air release valve coil rating 5 Without With None 100VAC 50Hz/60Hz 200VAC 50Hz/60Hz 24VDC 12VDC Other Nil SB Nil 1 2 3 4 9 4 3 2 1 R side L side 2.

VFS

2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D side) assembly !2 AXT625-3A-20 End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

modular-press-e

AD48-6 AD38-6 Nylon AD27-6C AD27-6C C3SF-6J C4SF-6J C2SF-6J C3SF-6J C2SF-6J w C3SF-6W C4SF-6W C3SF-6W C2SF-6CJ C2SF-6CJ r C3SF-2 C4SF-2 C2SF-2 C3SF-2 C1SF-2 C2SF-2 AD37-2 AD47-2 AD27-2 AD37-2 AD17-2 AD27-2 e Metal AD38-2 AD48-2 AD38-2 C3SF-2J C4SF-2J t C3SF-2J C2SF-2J C2SF-2J C3LF-8 C4LF-8 C3LF-8 AD37-8 AD47-8 AD37-8 Metal bowl with level gauge AD38-8 AD48-8 AD38-8 C3LF-8J C4LF-8J C3LF

Modular F.R.L. Pressure Control Equipment

AD48-6 AD38-6 Nylon AD27-6C AD27-6C C3SF-6J C4SF-6J C2SF-6J C3SF-6J C2SF-6J w C3SF-6W C4SF-6W C3SF-6W C2SF-6CJ C2SF-6CJ r C3SF-2 C4SF-2 C2SF-2 C3SF-2 C1SF-2 C2SF-2 AD37-2 AD47-2 AD27-2 AD37-2 AD17-2 AD27-2 e Metal AD38-2 AD48-2 AD38-2 C3SF-2J C4SF-2J t C3SF-2J C2SF-2J C2SF-2J C3LF-8 C4LF-8 C3LF-8 AD37-8 AD47-8 AD37-8 Metal bowl with level gauge AD38-8 AD48-8 AD38-8 C3LF-8J C4LF-8J C3LF

Air Fittings Fitting Series For Special Environment

O e b u t ) h c n i ( . n i M e l o h . a i d e z i S d . o N t r a P D L 1 A M . t W ) f g ( 8 / 3 1 1 7 0 R R K 3 6 . 0 ) 6 1 ( 5 6 . 1 ) 2 4 ( 9 7 . 0 ) 0 2 ( 5 7 . 0 ) 9 1 ( 8 1 . 0 ) 6 . 4 ( 0 2 4 / 1 2 / 1 3 1 7 0 R R K 3 6 . 0 ) 6 1 ( 5 6 . 1 ) 2 4 ( 1 7 . 0 ) 8 1 ( 1 9 . 0 ) 3 2 ( 8 2 4 / 1 2 / 1 3 1 1 1 R R K 2 8 . 0 ) 8 . 0 2 ( 3 8 . 1 ) 5 . 6 4 ( 9 8 . 0 ) 5 . 2 2 ( 4 9 . 0 )

-fl Seies

Plus as y {09194 NvvFs2ooo-3oA-O Nvvzs3ooo.2 :O M anifu ld I nte rio, Wirin g Manifuld I nterior Wiring St8ndard wiring Wlring wilh controlunit -9a!aptr'14q Standard whing Witing with controlunii , _ ^ ; y ! j , , r l / r r r r ) l . *'ll-r:lt-Br, . l , *'ll I tl!s!",,+r i lr .2 +' I P'6u63! .h ,-,\-15r r | ,3'41. ,."'"*1t ':li-", r I l,*,-Jl i LL_-!!!" j6 r-, l!-:r" l ,..F!3a r-, ,..F!

MY1

Data MY1B16 to 100 MY1M16 to 63 MY1C16 to 63 MY1H16 to 40 L L R L L L L R R R R R L R R L Note 2) Note 2) R R L L O-ring L R Slide table operating direction Piping tube Note 2) For bottom piping, refer to the figure above.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

CXWM/CXWL

For dimensions of 25 stroke, refer to page 8-26-28. 8-26-27 26 Series CXWM 25 With End Lock: CXWM2525 stroke R 2 x 2-M6 x 1.0 thread depth 12 +0.012 0 2 x 2-6H7 depth 8 2-M10 x 1.0 Adjusting bolt 2-Rc 1/8 Plug (R 1/8) (Cylinder port) 4-5.5 through 4-9.5 counterbore depth 5.5 2-Rc 1/8 Cylinder port 2-Rc 1/8 Plug (R 1/8) (Cylinder port) 2-RB1006 shock absorber (Housing installed on single side

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Plus as y {09194 NvvFs2ooo-3oA-O Nvvzs3ooo.2 :O M anifu ld I nte rio, Wirin g Manifuld I nterior Wiring St8ndard wiring Wlring wilh controlunit -9a!aptr'14q Standard whing Witing with controlunii , _ ^ ; y ! j , , r l / r r r r ) l . *'ll-r:lt-Br, . l , *'ll I tl!s!",,+r i lr .2 +' I P'6u63! .h ,-,\-15r r | ,3'41. ,."'"*1t ':li-", r I l,*,-Jl i LL_-!!!" j6 r-, l!-:r" l ,..F!3a r-, ,..F!

Vacuum Unit

Pressure switch for vacuum assembly (With 2 mounting screws) ZK2 ZS A E A G M r Wiring t Other specifications Construction !

S Couplers

1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/2 R 3/4 R 1 R 3/4 R 1 R 1 1/4 R 1 R 1 1/4 R 1 1/2 R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/2 R 3/4 R 1 R 3/4 R 1 R 1 1/4 R 1 R 1 1/4 R 1 1/2 1/8 1/8 1/4 1/4 With check valve 1/2 1/2 3/4 3/4 Without check valve 1 1 1 1/4 1 1/4 Female thread type Female thread type Body size Port size Part no.

LEC-OM07605CN

PC10] [P r . PC09] 0 0 1 (MO1-LG ) [P r . PC10] 0 0 2 (MO2-LG ) ) [Pr. PC11][Pr. PC12]-999mV999mV [mV] PC11 M01(1) -9 PC12 M02(2) 20 (2) MO1(1)M02(2)[Pr. PC14][Pr.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

(B) 2 (A) 4 (B) 2 (A) 4 Effective area (mm2) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 3 (R) (B) 2 (A) 4 JIS Symbol 1 3 position pressure center 3 position pressure center (B) 2 (A) 4 (B) 2 (A) 4 3 (R) 1 (P) (Single) 0 (Fully open) (Fully closed) 1 2 3 4 5 6 7 1 (P) 5 (R1) 3 (R2) 1 (P) 3 (R) How to order valve with built-in speed controller SYJ5 5 When using SYJ553 model the speed controller must be opend