VZ3000

G H (Mounting hole) Manual override (Non-locking) (Mounting hole pitch) (Mounting hole pitch) (Lead wire length) G: 300 mm H: 600 mm (Piping port) (PE port) (Lead wire length) L plug connector (L) VZ3140-L-01 M plug connector (M) VZ3140-M-01 300 (Lead wire length) 300 : With light/surge voltage suppressor DIN terminal (D) VZ3140-D-01 Built-in speed controllers VZ3150Applicable cable O.D.

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

JXCx-OMT0005CN

DRV C RESET <> 66 - <>12 1 [] A [a ] (01-103) [] C RESET 2 [SW] A [a ] <> <> (01-144) D RESET SVON <> <> <>(M24V) (01-145) D RESET SVON <> <> <> (01-146) D RESET SVON <> 67 - <> <>(DC24V) D RESET SVON (01-147) <> <> <> (01-148) D RESET SVON <> <> (01-149) D RESET SVON <> <> Communicati on error. (01-150) D RESET SVON <> (01-192) E <> <> <> ON(SVON ON)

IIIIIII

EX: NVM121-N01-01S NVM131-01-01 NVM131-01-35 NVMl51-01-35 NVMl21-01-02 NVM13t-01-02 NVM120-N01-00 130-N01-00 F.O.F.'lbs.

Mechanical Valves Series NVM, NVFM, NVZNI

EX: NVM121-N01-01S NVM131-01-01 NVM131-01-35 NVMl51-01-35 NVMl21-01-02 NVM13t-01-02 NVM120-N01-00 130-N01-00 F.O.F.'lbs.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

plug connector (M) (A) 2 1 (P) 3 (R) M plug connector (M) N.O.

KJ

K Reducer Elbow: KQ2L M Applicable fitting size d (inch) Model L2 A M Min. port size Applicable tubing O.D.

OMS0020

1 0 to Note1) 11 AREA A Position 1 [m] Note1) 1 0 to Note1) 12 AREA A Position 2 [m] Note1) 1 0 to Note1) 13 AREA B Position 1 [m] Note1) 1 0 to Note1) 14 AREA B Position 2 [m] Note1) 1 0 to Note1) 15 Unused 4 Step Data No. 2 (Step Data No. 1Note6) 0-15 Same as above.

G15/G27

Model (Standard) Model (Made to Order) Pressure range (1) Indication unit Connection thread Note MPa G46-2-01/02 G46-4-01/02 G46-7-01/02 G46-10-01/02 G46-2-01 to 02M G46-4-01 to 02M G46-7-01 to 02M G46-10-01 to 02M GA46-10-01 to 02 Model Pressure range (1) Indication unit Connection thread Model Note MPa G46-2-01 to 02-C/C1 G46-4-01 to 02-C/C1 G46-7-01 to 02-C/C1 G46-10-01 to 02-C/C1 G46-

High performance type Step Motor Controller (Servo/24 VDC)

Product Outline 5 2.1 Product features 6 2.2 Product configuration 7 2.3 How to Order 8 2.4 Option 9 (1) Actuator cable [5 m or less] 9 (2) Actuator cable [8 to 20 m] 9 (3) Actuator cable for actuator with lock (for sensor and lock) [5 m or less] 10 (4) Actuator cable for actuator with lock (for sensor and lock) [8 to 20 m] 11 (5) I/O Cable 11 (6) Communication cable for controller setting

JXCx-OMY0008

(Circuit example) 0V 24VDC The stop is released switch Ry Stop Switch U Surge suppressor Ry: Relay Power supply plug 1 LK RLS (6) Ry (3) EMG (2) M 24V (1) C 24V Controller 0V (4) Input power 24VDC supply 0V Power supply plug 2 Ry (3) EMG LK RLS (6) (2) M 24V (1) C 24V Controller 0V (4) Input power 24VDC supply 0V Power supply plug 3 LK RLS (6) Ry (3) EMG (2) M 24V Controller (1) C 24V 0V

JXCx-OMY0006

(Circuit example) 0V 24VDC The stop is released switch Ry Stop Switch Surge suppressor Ry: Relay U Power supply plug 1 LK RLS (6) Ry (3) EMG (2) M 24V Controller (1) C 24V 0V (4) Input power supply DC24V 0V Power supply plug 2 LK RLS (6) Ry (3) EMG (2) M 24V Controller (1) C 24V 0V (4) Input power supply DC24V 0V Power supply plug 3 LK RLS (6) Ry (3) EMG (2) M 24V Controller (1) C 24V 0V

Direct Operated

J K M N Q R S T N.C., N.O., COM.

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

for pressure sensor controller (1 pc.) + Sensor cable (3 m) Description Part no.

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

Target position (01-149) Posn failed D SVON Input The connection with the higher-level devices is disconnected. A Communication error occurred (01-150) RESET Communi Do not interrupt the connection between the PC and teaching box when the electric actuator is being operated by upperlevel devices.

HRX-OM-X084

Altitude [m] 1. Max. ambient 2. Cooling capacity temp.

HRX-OM-W002

Altitude [m] 1. Max. ambient 2. Cooling capacity temp.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS2200M-01-X214 Note) Throttle valve is only compatible with the part no. of the meter-out type. 721 AS-M Series Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

Miniature Fittings M3, R(PT) 1/8, M5 Series M

L4 L1 L2 L3 M d O.D.

H/DL/L/LL

(mm) Connection thread R Model Effective area (mm 2) Weight (g) A L2 M L1 1 8 4 L04-01 33 10 21.8 30.9 15 3.5 32.7 10 14 10 1 4 1 8 L04-02 L06-01 40 36 14 10 34.9 30.9 34.7 33.8 Applicable tubing 1 4 3 8 1 8 6 L06-02 L06-03 L08-01 43 55 46 12 10 14 35.8 37.5 36 9 21.8 34.9 36.9 31.9 16 14 17 12 1 4 3 8 1 4 L08-02 L08-03 L10-02 52 61 68 8 14 12 17 38 39.7 40.7 19 23.3 35.9 37.9 36.9 16 14