MQQ

bore RB I 4-N through M 0.2 D E K B + Stroke L M 0.2 A + Stroke E 25, 28 H effective thread depth C 2-Rc 1/8 2 x 4-OA effective depth RA Y Q F 2 x 4-OB Depth of counter bore RB E J I 4-N through M 0.2 D W B + Stroke K L M 0.2 A + Stroke E (mm) Bore size (mm) Stroke range (mm) A B F H C D E Y OA I J K L M N OB Q RA W RB 10 to 40 M3 x 0.5 M4 x 0.7 69.5 61.5 6 6 29 9 38 5 8 20 10 3.5 6.5 39.5

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

H G I J K L A B C D E F M R +0.058 0 -0.1 -0.2 -0.1 -0.2 -0.1 -0.3 -0.1 -0.3 AD-FI-20 AD-FI-25 AD-FI-32 9 9 16 16 +0.027 0 +0.027 0 +0.027 0 +0.027 0 36 38 55 55 16 18 22 22 9 9 12 15 20 25 32 40 10 10 15.5 15.5 20 20 24 24 14 14 20 20 M8 x 1.25 M10 x 1.25 M14 x 1.5 M16 x 1.5 20 25 32 40 46 46 56 64 28 30 40 43 60 60 80 88 22 22 30 30 16 16 16 24 10 10 12 16 30 30 36 44 M4 10 10 13 13 10

Thermo-chiller

50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] Circulating fluid temperature F [C] Circulating fluid temperature F [C] HRS100-W -20/40(50 Hz) HRS100-W -20/40(60 Hz) 14 14 Facility water temperature 90F (32C) 12 12 Cooling capacity [kW] Cooling capacity [kW] Facility water temperature 90F (32C) 10 10 8 8 6 6 4 4 Facility water temperature 104F (40C) Facility water temperature 104F (40C) 2

energy saving effect

Nil Rc F G (with Rc-G conversion fitting) N NPT (with Rc-NPT conversion fitting) Power supply 40 3-phase 380 to 415 VAC (50/60 Hz) Specifications Model HRSH100-Al-40-l HRSH150-Al-40-l HRSH200-Al-40-l HRSH250-Al-40-l HRSH300-Al-40-l Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) Refrigerant charge kg 1.27 2.1 2.1 2.8 2.8 Control method PID control Ambient temperature/Altitude

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support A MY-SA 2 x G F 2 x H E C D A B Side support B MY-SB 2 x J MY1B MY1B MY1H E A B MY1B C D MY1M (mm) MY1C A 61 70 87 B C D E F G H J Part no.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

0 V6 LEJS 40 500 A H q Accuracy e Motor type *1 r Lead [mm] Symbol LEJS40 LEJS63 H 24 30 A 16 20 B 8 10 w Size Symbol Type Output [W] Actuator size Compatible driver Nil Basic type H High precision type V6 AC servo motor (Absolute encoder) 100 40 LECYM2-V5 LECYU2-V5 V7 AC servo motor (Absolute encoder) 200 63 LECYM2-V7 LECYU2-V7 t Stroke [mm] *2 40 63 *1 For motor type V6, the compatible

RHC

Applicable bore (mm) C D d H Applicable bore (mm) C D d H 5 26 30 12.5 8 M8 x 1.25 15 M22 x 1.5 26 13 20 20 SOR-20 NT-02 6 32 36.9 16.5 8 M10 x 1.25 19.6 M24 x 1.5 32 17 25, 32 25 SOR-25 NT-03 8 38 43.9 21.0 9 M14 x 1.5 M30 x 1.5 25.4 38 22 40 32 SOR-32 NT-04 11 41 47.3 26 11 M18 x 1.5 31 M33 x 2.0 41 27 50, 63 40 SOR-40 NT-05 13 31 M22 x 1.5 37 32 80 NT-08 16 39 M26 x 1.5 47.3 41 100 NT-

MQQ

style Double clevis style B L F G D Note) 10 16 20 25 28 10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

MQQ

Stroke range (mm) A OA B C D E F H RB I J K L M N OB Q RA W Y 10 10 to 40 39.5 M4 x 0.7 31.5 6 6 29 5.5 M3 x 0.5 4 38 5 8 20 3.5 6.5 14.5 7 5 16 10 to 60 44 M6 x 1.0 34 8 8 36 5.5 M4 x 0.7 7 47 7 10 25.5 5.4 9 18 10 5 20 10 to 60 47.5 M6 x 1.0 37.5 10 10 40 5.5 M5 x 0.8 7 52 8 10 28 5.4 9 19.5 10 6 25 10 to 50, 75, 100 54 M6 x 1.0 42 12 12 45 8.5 M6 x 1.0 7 60 4.5 10 12 34 5.5 9 23

SMC Pneumatic Clean Series

WH E-0.05 E-0.05 I 0 0 KA AL G port 8-J F K C-0.1 A NA F H S + Stroke ZZ + Stroke (mm) A AL Bore size Standard stroke range B1 C D E F GA GB H H1 I J K KA MM NA P RA S WA WB WH 20 20 20 W ZZ 40 30 27 Up to 300 50 35 32 Up to 300 63 35 32 Up to 300 19 27 27 6 7 7 44 55 69 139 162 162 26 32 38 14 18 18 1/8 1/4 1/4 16 20 20 8 9 9 25 30 32 87 102 102 2 2 2 25 30 30 22<19> 26<24> 26<24> 15 17

CS1

(mm) S S U Z1 ZZ ZZ1 H h Z ZZ e f Z1 ZZ1 Z l 125 140 160 180 200 125 140 160 180 200 250 300 to 1000 98 302 110 273 302 75 40 133 296 325 273 296 325 98 35 0.2 Stroke Lube Non-lube Air-hydro Lube Non-lube Air-hydro to 1000 315 110 283 315 75 40 133 306 338 98 283 306 338 0.2 Stroke 98 40 to 1200 106 106 342 120 306 342 75 40 141 327 363 306 327 363 0.2 Stroke 45 to 1200 Lube Non-lube 111

MRHQ

point L mm Gripping point L mm MHS MRHQ16 MRHQ16 MHC Internal gripping 60 60 Pressure 0.2MPa MHT 50 50 Pressure 0.2MPa Overhang H mm Overhang H mm MHY 40 40 0.3MPa 0.3MPa 30 30 0.4MPa 0.4MPa 0.3MPa MHW 0.5MPa 0.5MPa 0.6MPa, 0.7MPa 0.4MPa 20 20 0.6MPa 0.5MPa MRHQ 10 10 Misc. 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Gripping point L mm Gripping point L mm DMRHQ20 MRHQ20 H 20100 Pressure 0.2MPa

Free Mount Cylinder

F FK B (mm) Bore size (mm) B C FY FK NA NB Y KI 6 10 16 20 25 32 13 15 20 26 32 40 22 24 32 40 50 62 20.5 22 28 33 43.5 51.5 11 12 13 16 20 24 M3 x 0.5 M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 6 7 6 8 10 12 14 15 18 20 28 32 10.5 11.5 15.5 19.5 24.5 30.5 (mm) F H Z Z Z Double acting Single acting, Retracted Single acting, Extended Action With auto switch Without auto switch Without auto

LX

F A A Lr Lr = 150mm L X F 60 Table displacement (m) Table displacement (m) Table displacement (m) 10 40 LXFH-100 50 LXFH-100 LXFH-100 8 40 30 LXFH-75 LXFH-75 6 30 20 LXFH-50 LXFH-50 LXFH-75 4 20 LXFH-25 LXFH-25 10 LXFH-50 2 10 LXFH-25 0.5 1 1.5 2 2.5 3 0.5 1 1.5 2 2.5 3 0.5 1 1.5 2 2.5 3 0 Weight (kg) 0 Weight (kg) 0 Weight (kg) Displacement at the section indicated by the arrow when a load

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

SQ1000/2000

plate assembly u F kit L kit T kit S kit P (J) kit q !

VCC

Description Symbol A B C D E Description For piping 12 x 9 40 swivel elbow For piping 10 x 8 40 swivel elbow For piping 10 x 7.5 40 swivel elbow For piping 8 x 6 40 swivel elbow For piping 6 x 4 40 swivel elbow Part no. VCKK1209-02F VCKK1008-02F VCKK1075-02F VCKK0806-02F VCKK0604-02F Symbol F G H J K Part no.

51

H ZZ MM Depth A1 CG1 20 25 32 40 50 63 80 100 Up to 200 18 22 22 30 35 35 40 40 15.5 19.5 19.5 27 32 32 37 37 35 40 40 50 58 58 71 71 94 102 104 114 144 144 178 179 Up to 300 CG3 CG3 Up to 300 Up to 300 Up to 300 JMB AL Up to 300 H A Up to 300 ZZ + Stroke ZZ + Stroke H MB Up to 300 Basic (mm) MB1 Bore size (mm) Standard stroke A AL B1 C D E F GA GB H1 H ZZ I J KA MM NA P S CA2 20 25 32 40

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

40 40 350 to 800 200 st or more 50 50 350 to 1000 250 st or more 8-21-30 30 Series MGG Guide Cylinder With End Lock Basic style: MGGB 63 to 100 4-F through, counterbore G Bottom 4-H M N C D HR HN (MAX.) 4-O Bracket (Refer to the table below.)

High Power Cylinder Series RHC

110 100 M12 x 1.75 thread depth 25 6 Series RHC Dimensions/Axial Foot Type 20 to 40 H GA Rc P Rc P GB F K F A WH NN Effective thread H2 I MM H1 NB ND D NE 4-LD LY LH LT NF E 10 E JD N 10 JC N NA S + Stroke X Y X Y LX LZ LS + Stroke ZZ + Stroke (mm) Bore size (mm) Stroke range (mm) Effective thread length A D E F GA GB H I JC JD K LD LH H1 H2 10 15.5 8 5 25 7 5 30.5 43 26 44 47.5 53.5 16