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J r + ' + t i t t t t t l t | l , b o r j | | | , ' l l l " ' r e , l l l t t l Sealtype . | | E ' r l Valve s-port Body Ported liT T.T""n l l l l E f f i . I r F I l f f i r ] Pilot valve specifications I I il*d*drffir -.

C95Series

FX f~ Rod Ilange / (F) S1r,*-~ llin!1l'" Immj 32 -700 50 7 5 10 64 72 32 36 79 90 25 31 ", 40 -800 55 9 7 10 Cushi()(\ vl\lve Port 4 50 -1000 70 9 12 12 90 45 50 110 120 36,S 39.5 63 1000 80 9 12 12 100 80 1000 100 12 14 16 126 63 153 45.5 J()a, -1000 120 14 1 6 I. 150 75 176 54 FE FT Head Iionge/ (G) Head flange 101m) ' ~," BoreSiW .

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

1 L = 50 mm Max. speed = Over 200 mm/s !

Power Clamp Cylinder

Leave a space for wiring a proximity switch. 191 Power Clamp Cylinder 40, 50, 63, 80 Series CKZT How to Order CKZT Clamp Cylinder (Without Arm) 63 TN 120 T Power clamp cylinder European type Switch type T P TURCK P&F Bore size 40 50 63 80 40 50 63 80 Arm mounting position 30 45 60 75 90 105 120 135 30 45 60 75 90 105 120 135 Cylinder port Nil TN G NPT CKZT Clamp Arm 40 A015 C S Mounting hole

Vacuum Unit

100 100 100 Vacuum pressure [kPa] 80 90 90 60 80 80 40 Suction flow (High-noise reduction silencer exhaust) Vacuum pressure 70 70 Port exhaust 20 Silencer exhaust/Complex exhaust Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 Suction flow (Port exhaust) 60 60 Suction flow [L/min (ANR)] 50 50 Flow Rate Characteristics Suction flow (Silencer exhaust/ Complex exhaust) Suction flow (Silencer exhaust

Refrigerated Air Dryer

IDF-AB500 IDF-AB501 IDFA4E to 75E IDFA100F to 150F 50 70 M10 Stainless steel 4 A Mounting hole diameter: 10.5 103 A IDFAE/F Series Specific Product Precautions 1 Be sure to read this before handling the products. Refer to back page 50 for Safety Instructions and pages 6 to 8 for Air Preparation Equipment Precautions.

5 Port Solenoid Valve SY Series

wire Without connector 50 60 2 200 VAC Hz M M plug connector 50 60 110 VAC Hz [115 VAC Hz] MN MO M8 connector Without connector cable W0 3 50 60 50 60 50 60 4 220 VAC Hz [230 VAC Hz] Note) For connector cable of M8 connector, refer to page 225.

Rotary Actuator/Vane Type

F E Y2 F Y2 CRQ2X MSQX L L E MRQ 2 x Q4 2 x Q4 K K C B D G D G B C U H U H M T N M T 25.5 N (34.5: Connector type) 2 x R 1 2 x R Auto switch P P W1 W Auto switch Size: 20, 30 Size: 40 W W 2 67 8 15 8 When D-M9m is used 32.5 1.

Free Mount Cylinder

Cylinder Pad (ZP02 to 50) Rod dia. (mm) 2 4 6 8 10 13 16 20 25 32 40 50 Bore size (mm) Pad (ZPT02 to 50-B4 to 10) Cylinder 4 6 8 10 13 16 20 25 32 40 50 Rod dia. (mm) Model Thread dia.

RHC

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B L F G Basic style Axial foot style Rod side flange style Head side flange style Bore size Auto switch 20 25 32 40 50 63 80 100 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm Nil Without auto switch For the applicable

LEY-OM007

-10 (INC) c 10[mm] 0 10 20 30 40 50 [mm] -27- 4 a b c d e f g h i j k No. 1 2 mm/s mm mm/s^2 mm/s^2 % % mm/s % mm mm mm 0 ABS 100 20.00 3000 3000 80 40 30 100 10.00 20.00 20.00 No.00[mm] 20[mm]20[mm] 1 10 W [mm] c [mm] k 20 0 10 20 30 40 50 [mm] INP 2 k INPON g 30 W [mm] c [mm] k 20 0 10 20 30 40 50 [mm] INP INPOFF () k g BUSYONOFF -28- 5 a b c d e f g h i j k No. 1 2 mm/

Wedge Cam Operation Provides

External Holding Force Internal Holding Force MHK2-12D MHK2-12D 25 20 Pressure 0.6MPa Pressure 0.6MPa Holding force (N) 20 Holding force (N) 15 0.5MPa 0.5MPa 15 0.4MPa 10 0.4MPa 10 0.3MPa F F 0.3MPa 5 5 0.2MPa 0.2MPa 0 0 10 20 30 40 50 10 20 30 40 50 Holding point L(mm) Holding point L(mm) External hold Series MHK2 Internal hold Series MHK2 MKH2-16D MHK2-16D 50 50 Pressure 0.6MPa Pressure

Speed Controller with One-touch Fitting

AS-F e !

0.4

Bore size MB, CA2 series Pressure 0.5 MPa Load factor 50% Stroke 500 mm CM2 series Pressure 0.5 MPa Load factor 50% Stroke 300 mm CJ2 series Pressure 0.5 MPa Load factor 50% Stroke 60 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQC1101 800 700 600 500 400 300 200 100 0 VQC2101 It

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I f "n pcs I Non-rotating rod Standard Auto switch See ctalDg N302 for avajlabie Rod boot'r.

100

40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 Vacuum pressure [kPa] Vacuum pressure [kPa] ZL3H ZL3H04P ZL3M ZL3M04P Suction flow rate [L/min (ANR)] 100 50 200 150 300 250 350 0 Suction flow rate [L/min (ANR)] 100 50 200 150 300 250 350 0 23 Multistage Ejector ZL3/ZL6 Series Flow Rate Characteristics (Representative value) ZL6M (04P) Supply pressure: 0.35 MPa/0.37 MPa (With valve) ZL6H (

Slider Type/Ball Bushing Bearing

Displacement of Section A when force acts on Section F Displacement of Section A when force acts on Section F F A F Guide central axis (1 axis type) F For the double axis type, this is the cylinders central axis.

ITV

Output deviation factor (% F .S.) 0.6 0.5 0.4 Return 0.2 0 0 0.2 0.4 0.5 Out 0.6 0.8 0 25 50 75 1 1 2 3 4 1 5 100 Input signal (%F .S.)

MQQ

Action D Double acting Cylinder stroke Bore size (mm) Standard stroke (mm) Mounting Bore size 10, 20, 30, 40 10 Through hole & double end tapped (standard) Foot type Front flange type Rear flange type Double clevis type B L F G D Note) 10 16 20 25 28 10mm 16mm 20mm 25mm 28mm 10, 20, 30, 40, 50, 60 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 75, 100 25 10, 20, 30, 40, 50, 75, 100 28 Note

PFxx-OMS0001CN

L/min [P_2] OUT2 50 L/min [H_2] OUT2 PFMC7202 [P_1] OUT1 1000 L/min [H_1] OUT1 100 L/min 1000 L/min [P_2] OUT2 100 L/min [H_2] OUT2 OUT1OUT2 [F 1]OUT1(29)[F 2]OUT2(47) -23No.PF-OMS0001CN-A <> 1 [P_1][n_1] [] 500 L/min OUT1OUT2[P_2][n_2] [F 1]OUT1(29)[F 2]OUT2(37) 30 (25) -24No.PF-OMS0001CN-A [] 2 [F 0] 2 F99 F1 F0 2 -25No.PF-OMS0001CN-A () () [F 0] [ rEF] [ ANR] 27 [ Uni