5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Internal pilot manifold L: Dimensions n: Stations External pilot manifold L: Dimensions n: Stations L n 2 98 87.5 70 14 L n 2 110.5 100 80.5 15 3 110.5 100 80.5 15 4 123 112.5 91 16 5 135.5 125 101.5 17 6 135.5 125 112 12 7 148 137.5 122.5 13 8 160.5 150 133 14 9 173 162.5 143.5 15 10 185.5 175 154 16 3 123 112.5 91 16 4 135.5 125 101.5 17 5 135.5 125 112 12 6 148 137.5 122.5 13 7 160.5 150

SZ3000

(Station 1) Light/surge voltage suppressor Side A: Orange Side B: Green (7.5) 43.5 Internal pilot manifold L: Dimensions n: Stations External pilot manifold L: Dimensions n: Stations L n 2 98 87.5 70 14 L n 2 110.5 100 80.5 15 3 110.5 100 80.5 15 4 123 112.5 91 16 5 135.5 125 101.5 17 6 135.5 125 112 12 7 148 137.5 122.5 13 8 160.5 150 133 14 9 173 162.5 143.5 15 10 185.5 175 154 16 3 123

MY1

The spacing of the side support must be no more than the values shown in the graphs at right. 200 200 190 190 (2100) (2100) (2100) 180 180 170 170 160 160 m 150 150 140 140 (2400) (2400) (2400) (2400) (2400) 130 130 l (1800) (1800) (1800) 120 120 Weight m (kg) Weight m (kg) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) 90 90 (1500) (1500) (1500) MY1CW63 MY1CW63 m 80 80

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

CJ216 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 16 Air cushion is not available for 21-/22-.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

CJ216 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 16 Air cushion is not available for 21-/22-.

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 C95 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CA1 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CS1 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150

Blow Gun Series VMG

VMG1-06-150-300 VMG1-06-200-300 VMG1-06-150-600 VMG1-06-200-600 VMG1-06-150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 Nozzle size Nozzle length 1.5 2 1.5 2 1.5 2 1.5 2 2.5 3 3.5 2.5 3 3.5 2.5

Aluminum High Vacuum Angle Valve

Heater assembly quantity 200/40 200/50 400/100 600/150 800/220 1200/350 100V H4 100C Heater assembly quantity used Heater power W (Nominal value) In-rush/Power consumption (Option symbolOperating voltage) 800/40 800/50 1600/100 2400/150 3200/220 4800/350 200V 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs. 3 pcs. 4 pcs.

VFS

Bore size Series CM Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm Average speed (mm/s) System 20 25 32 40 40 50 63 80 100 125 140 160 VK 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ A VF 0 VFR 800 700 600 500 400 300 200 100

CP95

See page 6-13-11 for dimensions. 20Mounting Accessory, Rod Data Rod clevis ISO 8140 Piston rod ball joint ISO 8139 Floating joint GKM KJ JA Bore size (mm) Supplied with bolts and safety devices 32 GKM10-20 KJ10D JA30-10-125 40 GKM12-24 KJ12D JA40-12-125 50 GKM16-32 KJ16D JA50-16-150 63 GKM16-32 KJ16D JA50-16-150 80 GKM20-40 KJ20D JAH50-20-150 100 GKM20-40 KJ20D JAH50-20-150 See page 6-13-

CP95

See page 6-13-11 for dimensions. 20Mounting Accessory, Rod Data Rod clevis ISO 8140 Piston rod ball joint ISO 8139 Floating joint GKM KJ JA Bore size (mm) Supplied with bolts and safety devices 32 GKM10-20 KJ10D JA30-10-125 40 GKM12-24 KJ12D JA40-12-125 50 GKM16-32 KJ16D JA50-16-150 63 GKM16-32 KJ16D JA50-16-150 80 GKM20-40 KJ20D JAH50-20-150 100 GKM20-40 KJ20D JAH50-20-150 See page 6-13-

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Rated voltage 12, 24 VDC, 100, 110 VAC Note) The withstand voltage specification for the wiring unit section conforms to JIS C0704, Grade 1 or its equivalent.

CQS

Rubber bumper is standard equipment for long stroke type. 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 Action 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 D Double acting 25 For "Manufacture of Intermediate Strokes", refer to page 7-4-5. Applicable Auto Switch/Refer to page 7-9-1 for further information on auto switches.

NCA1

150 150 2759 200 200 2760 250 200 2760 325 325 2761 400 325 2761 Stroke (In Inches and Hundredths of Inches) Bore 150 200 250 325 400 Note: Quantity is one piece.

CQS

Cylinder stroke (mm) Long stroke (mm) 35, 40, 45, 50, 75, 100 Bore size (mm) Standard stroke (mm) 5, 10, 15, 20, 25, 30 Action D Double acting 12, 16 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 25 Applicable Auto Switches/Refer to p.5.3-2 for further information on auto switch.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Movement MOD Speed Position Acceleration Deceleration Pushing force Trigger LV Pushing speed Moving force Area 1 Area 2 In position 0 1: Absolute 100 10 3000 3000 0 0 0 100 0 0 0.50 1 1: Absolute 100 100 3000 3000 0 0 0 100 0 0 0.50 2 1: Absolute 100 200 3000 3000 0 0 0 100 0 0 0.50 Note) The step data input range changes depending on the actuator model.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

/N.C. 2.2 0.40 0.55 2.6 0.31 0.60 163 (100) 4 position dual N.O./N.O. 2.7 0.24 0.57 2.3 0.36 0.54 Note 1) [ ]: Denotes normal position.

e-Rodless Actuator

(Wn) Weight (mn) Y-axis Yn Z-axis Zn X-axis Xn Z X Wa 5 mm 0.88 kg 0 mm 65 mm 111 Wb 42.5 mm 4.35 kg 0 mm 150 mm Y 210 Y Wc 42.5 mm 0.795 kg 111 mm 150 mm Wd 42.5 mm 1.0 kg 210 mm 150 mm n = a, b, c, d 3 Calculation of composite center of gravity m3 = mn = 0.88 + 4.35 + 0.795 + 1.0 = 7.025 kg 1 m3 X = x (mn x xn) 1 7.025 = (0.88 x 65 + 4.35 x 150 + 0.795 x 150 + 1.0 x 150) = 139.4 mm 1

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

, 150, 200 M5 x 0.8 12-CY3B10 10 500 50, 100, 150, 200, 250, 300 12-CY3B15 15 1000 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 12-CY3B20 20 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Rc1/8 NPT1/8 G1/8 12-CY3B25 25 (Both sides) Non-lube 12-CY3B32 32 1300 Rc1/4 NPT1/4 G1/4 12-CY3B40 40 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 12-CY3B50 50 12

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

12 14 30 25 20 15 10 5 0 0 2 4 6 8 10 12 14 6 5 150 kPa 350 kPa 150 kPa 150 kPa Flow [L/min] Flow [L/min] Flow [L/min] 4 3 350 kPa 350 kPa 2 750 kPa 750 kPa 750 kPa 1 0 0 2 4 6 8 10 12 14 Number of needle rotations Number of needle rotations Number of needle rotations PF2M711(-L) PF2M721(-L) 100 L/min 200 L/min PF2M750(-L) 50 L/min 120 100 80 60 40 20 0 0 2 4 6 8 10 12 14 240 200 160 120