High Vacuum Angle Valve, XL Series

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

CJ2X/CUX/CQSX/CQ2X/CM2X

MK(2) 10 Note) 15 Note) 1 pc. 5 5 Note) Please consult with SMC for shorter stroke length than indicated in the table.

CJ2X/CUX/CQSX/CQ2X/CM2X

MK(2) 10 Note) 15 Note) 1 pc. 5 5 Note) Please consult with SMC for shorter stroke length than indicated in the table.

OMR0031

Note 5) Cables are not included. 15 - 3.2 2 Parts description Details of the parts of the controller. (1) (2) (3) Remove the housing. (10) (8) (4) (5) ON (6) ON (7) OFF 1 2 3 4 5 6 (9) Pulse input signal switch (default) No.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LEC Y 10 5 5 Motorless 0 0 500 1000 1500 2000 0 0 500 1000 1500 2000 2500 3000 LAT Speed [mm/s] Speed [mm/s] When the stroke of the LEJB40 series exceeds 1000 mm, the work load is 10 kg.

Bag Filter

B to Nominal filtration accuracy of 5, 10, 25, 50, 100 m can be selected.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

6 NC 14 21.3 32.4 NT 3.5 5.3 6.5 NE 27 35.5 56.5 NH 2 3 4 NX 5.8 8.5 10.5 NW 48.2 71.8 82.1 NV 3.4 5.5 6.6 Model MY2H16G MY2H25G MY2H40G PF 3.5 5.5 17 Z 160 210 330 X 6 7.5 9 XX 12 14 23 Y 5 5 8 VV 10.5 15.3 29 TT 12.5 19.3 35.4 U 4 5 6 UU 3 4.4 2 SS 9.7 14 21.5 R 5 5 8 RR 5.3 8.5 11 RW 40 50 53.5 QW 40 60 57 PP 5.3 8 16 Q 152 198 312 QQ 16.4 20.4 25.5 PB 40 60 70 PA 40 60 100 PC 7.2 8.2

MNB

4@3 #5 t @7 $5!5@4 !8@0!7 !9i @2 q r y#0 $0 $2 w $3 #8 @9 A C B Section A !2 !2 #4 @6 #9 @8 $4 #2 #1 #6 #7 $6 !0 u @5 !6 @1 !1 $7 o $8 e $1 !2 Section B Section C 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Parts list Description Material Note Parts list No. No.

Digital Gap Checker

L 1 ISA-5-1 73.0 2 ISA-5-2 135.5 3 ISA-5-3 173.0 4 ISA-5-4 210.5 5 ISA-5-5 248.0 6 ISA-5-6 285.5 1.25 8 4.5 7.5 5.5 35 35 With 3 tapping screws (3 x 8) Bracket for centralized lead wire ISA-20 Lead wire with connector ZS-31-B ZS-31-C Straight 5 m Right angle 5 m Centralized lead wire ISA-19-m Stations Part no. 2 ISA-19-2 3 ISA-19-3 4 ISA-19-4 5 ISA-19-5 6 ISA-19-6 15 3-Color Display

IR1000/2000/3000

AL 14-5-21

CHKD/CHKG

CHS CH2 Minimum Auto Switch Mounting Stroke CHA (mm) Related Products D-M9 D-M9V D-Y59 D-Y69 D-Y7P D-Y7PV D-M9W D-M9WV D-M9A D-M9AV D-A9 D-A9V D-Z7 D-Z80 Auto Switch Mounting Number DD-Y7W D-Y7WV D-Y7BA 1 pc. 2 pcs. 5 5 10 10 15 5 10 10 15 15 Operating Range (mm) Auto switch models Bore size 20 25 32 40 50 63 80 100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV 4.5 4.5 4 7 5 5.5 7.5 11 D-Y59/Y69 D-Y7/Y7V

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Band mounlina stvle 15, 30 45, 60 1 5 . 3 0 . 4 5 . 6 0 . 7 5 . 1 0 0 . 1 2 5 . 1 5 0 See Best Pneumatcs Vo ume 6 ior ava lab e alto swilches. ' See Besl Fneurnatcs Vo ume 6ior standard stroke lenqlhs 0n Port location on head cover Bore sizes: 2Omm, 25mm, 32mm, 4omm Many popular made-to-order options are available such as high temperature, rod boot, adjustable stroke, and many others.

Compact

10 0.06 ST 15, 20 0.04 0.04 ST 15, 20 0.04 ST 5, 10 0.02 0.02 0.02 ST 5, 10 0.00 0 5 10 15 0.00 0 5 10 15 0.00 0 5 10 15 Load [N] Load [N] Load [N] MXZ16 MXZ16 MXZ16 0.15 0.15 0.15 Table displacement [mm] Table displacement [mm] Table displacement [mm] ST 25, 30 ST 25, 30 ST 25, 30 ST 15, 20 0.10 0.10 0.10 ST 15, 20 ST 15, 20 ST 5, 10 0.05 0.05 0.05 ST 5, 10 ST 5, 10 0.00 0 5 10 15 20 25

2/3 Port Valve

C.O. 4 220V AC 50/60Hz 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 10 5 24V DC 6 12V DC 7 240V AC 50/60Hz 15 2 9 Other 20 3 Option 25 4 1 1 1 2 Valve size 5 to 7 32 5 1 4 1 2 40 6 50 7 Note) Only air operated type.

Compact Cylinder

With Magnet for Auto Switch With Magnet for Auto Switch Bore size [mm] 12 16 20 25 32 Port size M3 x 0.5 M5 x 0.8 Stroke [mm] 5 or more 5 or more 5 or more 5 or more 5 or more Male connector (with hexagon socket head) Bore size [mm] 12 16 20 25 32 Port size M3 x 0.5 M5 x 0.8 Stroke [mm] 5 or more 5 or more 5 or more 5 or more 5 or more AS121F-M3-04

Round Type Hydraulic Cylinder

(n 2) 2 20 + 35 55 + 35 (n 2) (n = 2, 3, 4, 5) D-M9 5 20 CHQ 55 (n = 2, 4, 6) Note 3) (n 2) 2 55 + 35 (n 2) (n = 2, 3, 4, 5) 20 + 35 D-M9W 10 20 55 CHK (n = 2, 4, 6) Note 3) (n 2) 2 60 + 35 (n 2) (n = 2, 3, 4, 5) 25 + 35 D-M9A 10 25 60 CHN (n = 2, 4, 6) Note 3) (n 2) 2 50 + 35 (n 2) (n = 2, 3, 4, 5) 15 + 35 D-A9 5 15 50 CHM CHM (n = 2, 4, 6) Note 3) (n 2) 2 35 + 35 (n 2) (n = 2,

Rotary Cylinder Series MRQ Size: 32, 40 1

5 !6 !7 !8 !

MK

5 !6 !7 !8 !

Process Pump

No power supply required Range of operating conditions Inlet air pressure (MPa) 0.3 to 0.85 0.3 to 1.0 5 to 50 5 to 55 Inlet air temperature (C) Note 1) 5 to 55 Ambient temperature (C) Outlet air atmospheric pressure dew point (C) 5 to 50 Standard performance 20 Inlet air flow rate (L/min (ANR)) Note 2) 625 62 125 250 375 Standard performance conditions Outlet air flow rate (L/min (ANR))

Modular Type Filter Regulator Series AW

2) Note 3) Pressure gauge Symbol 0.2MPa Note 3) Note 4) AD37 AD37NNote 5) AD47 AD47NNote 5) AD47 AD47NNote 5) Float type auto drain N.O.