2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

50 40 30 20 10 00 50 100 150 200 Pressure loss [kPa] Pressure loss [kPa] 750 kPa 30 30 kPa 0 kPa 0 kPa 20 750 kPa 30 kPa 50 kPa 50 kPa 350 kPa 10 70 kPa 70 kPa 350 kPa 00 20 40 60 80 100 Flow [L/min] Flow [L/min] Flow Rate Characteristics (Reference Data) PF2M710(-L) PF2M705(-L) PF2M725(-L) 10 L/min 5 L/min 25 L/min 12 10 8 6 4 2 0 0 2 4 6 8 10 12 14 30 25 20 15 10 5 0 0 2 4 6 8 10 12 14

Square Tube Type Air Cylinder Series MB1

Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 11 11 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

m 80 200 60 MSQA3A (High precision type) 50 130 150 40 MSQA30 (High precision type) 20 0 10 20 30 40 50 60 70 18 16 14 12 10 8 6 4 2 0 Load N Load N MSQ7A MSQ50 MSQB50 (Basic type) MSQB7A (Basic type) 100 200 Displacement m Displacement m MSQA7A (High precision type) 80 150 60 120 40 50 MSQA50 (High precision type) 20 24 22 20 18 16 14 12 10 8 6 4 2 0 20 40 60 80 100 120 0 Load N Load N

Air Slide Table Series MXQ

MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 2 Series MXQ Theoretical Output IN OUT Application of the dual rod system generates double the output of conventional cylinders.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Load Weight Allowable Moment MY2H/m3 MY2H/M3 MY2H/M1 MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 20 20 20 20 Load weight kg Moment Nm Moment Nm Moment Nm MY2H40 MY2H40 MY2H40 MY2H40 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 4 4 3 3 3 3 MY2H16 2 2 2 2 0.2 MY2H16 MY2H16 MY2H16 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300 400500 1000 1500 100

Hydraulic Cylinders

Bore size (mm) 20 NTH-025 17 19.6 M10 x 1.25 16.5 6 25 NTH-032 19 21.9 M12 x 1.25 18 7 32 NTH-040 22 25.4 M16 x 1.5 21 10 40 NTH-050 27 31.2 M20 x 1.5 26 12 50 NTH-060 32 37 M24 x 1.5 31 14 63 NTH-080 41 47.3 M30 x 1.5 40 17 80 NTH-100 55 63.5 M39 x 1.5 54 20 100 NTH-125 70 80.8 M48 x 1.5 69 26 Weights Unit: g Standard stroke (mm) 5 Bore size (mm) 10 15 20 25 30 35 40 45 50 75 100 20 218

energy saving effect

Cooling Capacity HRSH300-A-20/4035 Ambient temperature 32C 30 Ambient temperature 43C 28 Cooling capacity [kW] 25 HRS 20 Ambient temperature 45C HRS 090 15 10 HRS 100/150 5 HRSH 090 5 10 15 20 25 30 35 0 HRSH HRSH Circulating fluid temperature [C] HRSE Pump Capacity HRZ HRSH100-A-20/40HRSH100-W-20/40HRSH150/200-A-20/40HRSH150/200/250-W-20/40HRZD HRW 0.6 0.6 60 60 Circulating fluid pressure

Auto Switch Guide

Auto Switch Specifications Grommet PLC: Abbreviation of Programmable Logic Controller D-Z7 (With indicator light) MX D-Z73 D-Z76 Auto switch model Applicable load Relay, PLC IC circuit MTS Load voltage 24 VDC 100 VAC 4 to 8 VDC (3) Max. load current and load current range 5 to 40 mA 5 to 20 mA 20 mA MY Contact protection circuit None Internal voltage drop 2.4 V (to 20 mA)/ 3 V (to 40 mA)

CLA

16 41 47.3 39 .cOP-SA 80 la:~ 76.5 66.5 5 4 04X25t eDNA 80 100 20~ .'

2 Phase Stepper Motor/Without Motor Brake Series LXS

Positioning Time Guide (for Horizontal Mount) For transfer load of 0kg For transfer load of 10kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 150 100 50 10 1 150 100 50 10 1 10 10 15.1 10.1 5.1 1.1 0.2 15.1 10.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 20 20 7.6 5.1 2.6 0.6 0.1 7.6 5.1 2.6 0.6 0.1 30 30 5.1 3.4 1.7 0.4 0.1 5.1 3.4 1.7 0.4

Auto Switch Guide

Auto Switch Specifications Grommet PLC: Abbreviation of Programmable Logic Controller D-Z7 (With indicator light) MX D-Z73 D-Z76 Auto switch model Applicable load Relay, PLC IC circuit MTS Load voltage 24 VDC 100 VAC 4 to 8 VDC (3) Max. load current and load current range 5 to 40 mA 5 to 20 mA 20 mA MY Contact protection circuit None Internal voltage drop 2.4 V (to 20 mA)/ 3 V (to 40 mA)

Auto Switch Guide

Auto Switch Specifications Grommet PLC: Abbreviation of Programmable Logic Controller D-Z7 (With indicator light) MX D-Z73 D-Z76 Auto switch model Applicable load Relay, PLC IC circuit MTS Load voltage 24 VDC 100 VAC 4 to 8 VDC (3) Max. load current and load current range 5 to 40 mA 5 to 20 mA 20 mA MY Contact protection circuit None Internal voltage drop 2.4 V (to 20 mA)/ 3 V (to 40 mA)

MTS

20 0.5 0.4 0.3 0.2 0.5 0.4 0.3 0.2 25 20 16 16 12 12 0.1 0.1 0 40 60 80 100 120 140 160 180 200 20 20 0 40 60 80 100 120 140 160 180 200 Overhang L (mm) Overhang L (mm) Graph (20) Stroke: Up to 150 stroke Graph (16) Stroke: Up to 150 stroke 10 20 10 20 2 3 4 5 2 3 4 5 Weight W (kg) Weight W (kg) 40 40 32 32 1 1 0.5 0.4 0.3 0.2 0.5 0.4 0.3 0.2 25 25 20 20 0.1 0 40 60 80 100 120 140 160 180

CE

150 -X 20 20 equivalent 25 to 300 32 25 to 400 2040 25 to 600 50 25 to 600 Data 63 25 to 600 Stroke reading cylinder Series CE1 Series CEP1 CEU1 CEU5 RS-232C RS-232C+BCD Extension Cable Count data output Output transistor mode Power supply voltage NPN PNP NPN PNP NPN PNP Cable length (m) Output transistor mode Power supply voltage 5 10 15 20 100 VAC 24 VDC 100 to 240 VAC Note) Detection

Basic Type/Direct Mount Type

Standard stroke 6 10 15 20 25 32 40 50 63 6mm 10mm 15mm Port thread type 20mm Bore size 6, 10, 15 Type M thread Rc NPT G Symbol 25mm 32mm Nil 20, 25, 32, 40 40mm TN TF 50, 63 50mm 63mm Standard Stroke Bore size (mm) Standard stroke (mm) Maximum available stroke (mm) 300 6 50, 100, 150, 200 500 10 15 20 50, 100, 150, 200, 250, 300 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 1000 1500 100

PF2A/PF2W

PF2A751/551 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 50 20 40 Pressure loss (kPa) Pressure loss (kPa) 15 30 10 20 5 10 Flow rate (l/min) 0 200 0 50 100 150200250 300 400 350 450 500 20 50 100 150 Flow rate (l/min) Sensor Unit Construction PF2A710/750 PF2A510

MQQ

, 75, 100 126 104 5.5 8 54 62 28 2-FD A + Stroke 25, 28 Bore size (mm) FZ L M 55 18 10 60 20 16 FV 64 20 20 65 22 34 25 72 22 FT 40 28 FX B + Stroke L FZ A + Stroke 4-FD Rear flange type/MQQLG 10, 16, 20 (mm) 25, 28 Bore size (mm) Stroke range (mm) A L 4-FD 2-FD 75 8 10 10 to 40 88.5 10 16 10 to 60 97 10 20 10 to 60 FV FV M 104.5 12 25 10 to 50, 75, 100 124 12 28 10 to 50, 75, 100 B +

CE

150 -X 20 20 equivalent 25 to 300 32 25 to 400 2040 25 to 600 50 25 to 600 Data 63 25 to 600 Stroke reading cylinder Series CE1 Series CEP1 CEU1 CEU5 RS-232C RS-232C+BCD Extension Cable Count data output Output transistor mode Power supply voltage NPN PNP NPN PNP NPN PNP Cable length (m) Output transistor mode Power supply voltage 5 10 15 20 100 VAC 24 VDC 100 to 240 VAC Note) Detection

Stroke Reading Cylinder and Counter

Series Variations CE1 Series CEP1 Series Standard stroke (mm) Standard stroke (mm) Manufacturable stroke range Manufacturable stroke range Bore size (mm) Bore size (mm) 25 50 75 100 125 150 175 200 300 500 25 50 75 100 250 400 12 20 32 40 50 63 12 equivalent 25 to 150 1 to 150 20 equivalent 25 to 300 1 to 300 Strokes other than standard strokes are available upon request.

LEC-OM02904

PB06 GD2 4.0 PB07 PG1 100 rad/s PB08 PG2 120 rad/s PB09 VG2 3000 rad/s PB10 VIC 20 ms PB19 VRF1 50 Hz PB20 VRF2 50 Hz PB29 GD2B 10.0 PB30 PG2B 84 rad/s PB31 VG2B 4000 rad/s PB32 VICB 50 ms PB26 CDP 0001 ( ) PB28 CDT 100 ms PB33 VRF1B 60 Hz PB34 VRF2B 60 Hz (b) OFF OFF ON 63.4 CDT100ms 100 4.0 10.0 4.0 120 84 120 3000 4000 3000 20 50 20 50 60 50