Bag Filter

100 50 20 1 Low 1 Fluid indicator Water, Coolant (water-soluble), Cleaning fluid Equivalent to honey Coolant (oil-based) 100 200 300 400 500 FGF1 Paint 300 600 900 1200 1500 FGF3 35 58 85 90 95 100 Flow coefficient (%) 500 1000 1500 2000 2500 FGF5 These relationships between fluids and kinematic viscosity are for guideline purposes only.

Microspeed Cylinder

Bore size (mm) 20 25 32 40 20 25 32 40 Clean room series Standard stroke (mm) 10(Relieving type) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 11(Vacuum type) Specifications Bore size (mm) 10(Relieving type) 11(Vacuum type) 20 20 25 32 40 25 32 40 Fluid Proof pressure Maximum operating pressure Minimum operating pressure Air 1.5MPa (217psi) 1.0MPa (145psi) 0.035MPa (5.1psi) 0.025MPa (3.6psi

MRQ

Symbol Long Stroke (101 to 200 mm) -X10 4 Refer to the table of number of the auto switches mounted below.

Modular F.R.L. Unit

Optional specification Note 2) With barb fitting B With drain guide B Metal bowl B 85 123 166 166 200 200 276 292 293 Metal bowl with level gauge Model B AC10 AC20 AC25 AC30 AC40 AC40-06 AC50 AC55 AC60 161 161 195 195 272 287 288 160 160 194 194 271 286 287 186 186 220 220 296 312 313 4 F.R.L.

Regulator for 2 MPa ARX 20

300 400 500 600 700 800 900 1000 0 0 100 200 300 400 500 600 700 800 900 1000 Flow rate l/min(ANR) Flow rate l/min(ANR) ARX21-01 ARX21-02 0.35 0.35 0.30 0.30 Downstream pressure MPa Downstream pressure MPa 0.25 0.25 0.20 0.20 0.15 0.15 0.10 0.10 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 Flow rate l/min(ANR) Flow rate l/min(ANR) Pressure

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

16 16 16 L = 120mm L = 120mm L = 120mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 Table displacement mm Table displacement mm Table displacement mm 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250 Load N 150 100 50 200 250 Load N 150 100 100 400 500 Load N 300 200 3 Precision Air Slide Table

Compact and Low Profile Design Rodless Cylinder Series MY2H/HT, MY2C, MY3A/3B, CY1F

300 400 500 600 700 800 900 1000 1200 1400 1600 1800 2000 MY3A/3B 3000 16, 25, 40, 63 CAT.S20-153 English cat.no.ES20-153 Mechanical Joint Rodless Cylinder/Compact and Low Profile Series MY2H/HT Series MY2H/HT Standard stroke (mm) Bore (mm) Model Guide 50 100 150 200 250 300 350 400 450 500 550 600 700 800 900 1000 1200 MY2C 16 Cam follower guide High precision guide Single axis MY2H 25

Title not found

10.90 7.10 2.60 1.75 1.15 0.80 250 4.05 2.65 1.80 1.20 300 5.80 3.85 2.55 1.70 350 7.90 5.15 3.55 2.35 400 10.30 6.75 4.55 3.05 450 5.80 3.80 500 7.10 4.70 www.poweraire.com 1-800-526-7661 25 Section IV: Charts Air Flow Loss Through Pipes Instructions: Find the factor from the chart below according to the pipe size and SCFM.

Title not found

10.90 7.10 2.60 1.75 1.15 0.80 250 4.05 2.65 1.80 1.20 300 5.80 3.85 2.55 1.70 350 7.90 5.15 3.55 2.35 400 10.30 6.75 4.55 3.05 450 5.80 3.80 500 7.10 4.70 www.poweraire.com 1-800-526-7661 25 Section IV: Charts Air Flow Loss Through Pipes Instructions: Find the factor from the chart below according to the pipe size and SCFM.

T/TIA

Color KK130 T0604-250-X64 T0604-500-X64 200 200 475 475 52 52 120 200 5.1 9.4 Black, White D1 DM KDM KB D2 D3 W KR KA KQG2 KG KFG2 MS KKA KP LQ MQR T T IDK 463

Direct Operated Precision Regulator Modular Style Series ARP3000 1

) VEX 0.25 0.25 0.20 0.20 AMR 0.15 0.15 ITV 0.10 0.10 IC 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 VBA Flow rate (/min (ANR)) Flow rate (/min (ANR)) VE VY1 G Pressure Characteristics PPA Inlet pressure: 2.0 MPa Outlet pressure: 0.8 MPa Flow rate: 60 /min (ANR) Inlet pressure: 2.0 MPa Outlet pressure: 0.3 MPa Flow rate: 60 /min (ANR) AL

2/3 Port Valve

Normally closed (N.C.) (8A) 6 1.05 19 8 1.7 31 1.5 0.4 340 10 1.9 34 4.5 0.61 11 250 1.0 6 1.05 19 3 8 (10A) 8 1.7 31 340 0.4 10 2.4 43 (15A) 10 2.4 43 1 2 420 Note) Refer to p.4.0-14 the glossary for detail of max. operating pressure differential and max. system pressure.

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

, 350, 400, 450, 500, 600, 700, 800 12-REA40 12-REA50 50 1300 Non-lube 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 12-REA63 63 Note 1) Stroke exceeding the standard stroke but below the maximum manufacturable stroke is available as special orders.

VS 8-2/VS 8-4

(A) 4 (B) 2 Flow-rate Characteristics 1 (P) 5 (R1) 3 (R2) 4, 2 5, 3 (A, B EA, EB) 1 4, 2 (P A, B) Flow-rate characteristics Series Response time (msec) Mass (g) 4-position dual 3-port valve Note) (A) Type of actuation Seal C [dm3/(sbar)] C [dm3/(sbar)] Cv b Cv b (A) 4 (B) 2 140 140 170 170 185 185 185 185 185 185 170 225 215 260 250 285 275 285 275 285 275 250 0.30 0.50 0.30 0.50 0.30

Series 12-REA Sine rodless cylinder

, 350, 400, 450, 500, 600, 700, 800 12-REA40 12-REA50 50 1300 Non-lube 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 63 12-REA63 Note 1) Stroke exceeding the standard stroke will be available upon request as special product.

EXxx-OMZ0016

number. *2: Select a protocol before performing pairing (V.2.0: 1 Mbps, V.1.0: 250 kbps).

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

C2F6 CH4 Halocarbon 116 Methane C2H2 CHF3 Acetylene Halocarbon 23 C2H2F4 CO2 Halocarbon 134A Carbon Dioxide C2HF5 H2 Halocarbon 125 Hydrogen C3F8 He Halocarbon R218 Helium C3H6 Kr Propene Krypton C3H8 N2 Propane Nitrogen C4F8 Ne Halocarbon C318 Neon C4H8 O2 Butene-1 Oxygen CBrF3 Xe Halocarbon 13B1 Xenon CCl2F2 Halocarbon 12 Following symbols indicate toxic gas (allowable concentration 200

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

, 350, 400, 450, 500, 600, 700, 800 12-REA40 12-REA50 50 1300 Non-lube 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 63 12-REA63 Note 1) Stroke exceeding the standard stroke but below the maximum manufacturable stroke is available as special orders.

Round Type Hydraulic Cylinder

Yes A90V Grommet IC circuit 100 V or less No Yes No Yes No 100 V, 200 V Relay PLC 200 V or less 12 V Connector 2-wire 24 V IC circuit 24 V or less PLC Terminal conduit 100 V, 200 V Yes Relay PLC DIN terminal Grommet Diagnostic indication (2-color indicator) 1 Water resistant type auto switches can be mounted on the above models, but in such case SMC cannot guarantee water resistance

Vacuum Pad

100 200 200 0 0 0 0 30 10 104 or less 104 or less Volume resistivity (7cm) > 5 > > > > > > > Heat aging > > > > > > > > > > Weather resistance 5 > > > > 5 > > > > Ozone resistance Gas permeability resistance > > /5 /5 /5 /5 > > > > > > > > /5 /5 Gasoline/Gas oil /5 > > /5 /5 Benzene/Toluene > > > > 5 5/> > > > > > Alcohol /5 /5 /5 /5 /5 Ether > > Ketone (MEK) /5 /5 /5 5 5 Ethyl acetate