T/TIA

Color KK130 T0604-250-X64 T0604-500-X64 200 200 475 475 52 52 120 200 5.1 9.4 Black, White D1 DM KDM KB D2 D3 W KR KA KQG2 KG KFG2 MS KKA KP LQ MQR T T IDK 463

Vacuum System Peripherals:

impedance ZU Approx. 6.5 k Voltage type Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Approx. 2.7 k Preset input Right angle type cable connector Straight type cable connector ZL 1 to 5 VDC (Load impedance: 1 k or more) 4 to 20 mA (Sink type) (Load impedance: 250

VXA21/22

Normally closed (N.C.) (8A) 6 1.05 19 8 1.7 31 1.5 0.4 340 10 1.9 34 4.5 0.61 11 250 1.0 6 1.05 19 3 8 (10A) 8 1.7 31 340 0.4 10 2.4 43 (15A) 10 2.4 43 1 2 420 Note) Refer to p.4.0-14 the glossary for detail of max. operating pressure differential and max. system pressure.

Mounting: Front Flange, Bore Size: 40mm, Thread: NPT Thread, Full Stroke: 250mm, First Stroke: 200mm, Auto Switch: A73--Reed, DC Volt.>5,<24, AC Volt.<100, LED, Vertical, Lead Wire or Prewired Connector: 3m, Number: 4 pcs.

Cylinder (Tube) Inner Diameter(φ): 250, Stroke(mm): 120, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: No, Valves: Presence, Cushion: With cushions on both sides, Operating Pressure(MPa): 0.05 to 0.97, Port thread type: Rc, Auto Switches

Speed Controller: Standard Type Large Flow In-line Type AS Series

L3 (1) Model Port size Max. 1 4 1 2 120 150 AS800 AS900 74 93 204 262 192 250 80 94 1 1 , 2 Note 1) L3: Reference dimensions Note 1) L3: Reference dimensions 655

High Vacuum Angle Valve

Vibration resistance allows for normal operation up to 30 m/s2 (45 to 250 Hz), but continuous vibration may cause a decline in durability. Arrange piping to avoid excessive vibrations or shocks. I High-temperature type (H0, H4, H5) 1. For models with a heater, take care not to damage the insulation components of the lead wires and the connector section. 2.

Compact Cylinder

OUT 241 402 563 IN 317 528 739 Unit: g Without Auto Swtich 40 OUT 377 628 880 Cylinder stroke (mm) Bore size (mm) IN 495 825 1150 10 60 80 100 125 150 5 15 20 25 30 35 40 45 50 50 OUT 589 982 1370 20 228 254 306 357 422 487 124 111 137 150 163 176 189 202 215 IN 841 1400 1960 25 292 323 386 448 526 603 168 152 183 199 214 230 246 261 277 63 OUT 935 1560 2180 32 451 495 584 673 785 896 273 250

Free Mount Cylinder

Stroke (mm) Model 60 40 30 25 20 15 10 5 50 70 80 90 100 27 (32) 30 (40) 34 (44) 37 (47) 40 (50) 44 (54) 51 (61) 58 (68) 65 (75) C(D)UW6-D 44 (49) 49 (59) 53 (63) 58 (68) 62 (72) 67 (77) 76 (86) 85 (95) 94 (104) C(D)UW10-D 74 (99) 81 (111) 88 (118) 95 (125) 102 (132) 109 (139) 123 (153) 137 (167) 151 (181) C(D)UW16-D 132 (165) 145 (182) 158 (195) 171 (208) 184 (221) 197 (234) 223 (260) 250

Ionizer

sensor (mm) Ionizer 600 mm Feedback sensor Installation height of feedback sensor Charged plate 640 A Series IZS31 Technical Data 3 Static Neutralization Characteristics 4) Flow rate Pressure characteristics Position Detection Switch Flow Sensor Pressure Control Pressure Sensor 0.7 300 380 620 780 0.6 1100 Supply pressure (MPa) 0.5 1260 1500 0.4 1900 0.3 2300 0.2 0.1 0 0 50 100 150 200 250

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 06 (3/4 Rc), Element Type: B (Sintered Metal, Bronze Material), Nominal Filtration Accuracy: 120 μm, Element Seal Material: N (NBR), Accessory: B (Bracket)

Material: C (Aluminum Cover, SPCD Case, NBR Gasket/O-ring, Nylon Seal), Element Length: B [ℓ500 (ℓ250 x 2)], Port Size: 06 (3/4 Rc), Element Type: B (Sintered Metal, Bronze Material), Nominal Filtration Accuracy: 120 μm, Element Seal Material: N (NBR)

Material: C (Aluminum Cover, SPCD Case, NBR Gasket/O-ring, Nylon Seal), Element Length: A (ℓ250), Port Size: 03 (3/8 Rc), Element Type: B (Sintered Metal, Bronze Material), Nominal Filtration Accuracy: 120 μm, Element Seal Material: N (NBR), Accessory: B (Bracket), Made to Order: X77 (Differential Pressure Indicator)

Seal), Element Length: A (ℓ250), Port Size: 04 (1/2 Rc), Element Type: S (Sintered Metal, Stainless Steel Material), Nominal Filtration Accuracy: 120 μm, Element Seal Material: N (NBR), Accessory: B (Bracket)

Material: E (Aluminum Cover, SPCD Case, NBR Gasket/O-ring, Nylon/Fluororesin Seal), Element Length: A (ℓ250), Port Size: 06 (3/4 Rc), Element Type: S (Sintered Metal, Stainless Steel Material), Nominal Filtration Accuracy: 120 μm, Element Seal Material: T (Fluororesin), Accessory: B (Bracket)

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 03 (3/8 Rc), Element Type: B (Sintered Metal, Bronze Material), Nominal Filtration Accuracy: 120 μm, Element Seal Material: T (Fluororesin), Accessory: B (Bracket)

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 03 (3/8 Rc), Element Type: S (Sintered Metal, Stainless Steel Material), Nominal Filtration Accuracy: 120 μm, Element Seal Material: T (Fluororesin)

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 03 (3/8 Rc), Element Type: S (Sintered Metal, Stainless Steel Material), Nominal Filtration Accuracy: 120 μm, Element Seal Material: T (Fluororesin), Accessory: B (Bracket)

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 04 (1/2 Rc), Element Type: S (Sintered Metal, Stainless Steel Material), Nominal Filtration Accuracy: 120 μm, Element Seal Material: T (Fluororesin)

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: A (ℓ250), Port Size: 04 (1/2 Rc), Element Type: S (Sintered Metal, Stainless Steel Material), Nominal Filtration Accuracy: 120 μm, Element Seal Material: T (Fluororesin), Accessory: B (Bracket)