3 Port Air Operated Valve VPA3145/3165/3185 Series

1 1 4 1 1 1 1 4 1 2 VPA3185 118 13 2 132 14 80 95 140 52 140 41 81 105 2 1575

WRF100

WRF100-T200/T240/T270 WRF-T/T-type clamp arms (Without cover) 2 x M12 x 1.75 depth 24 4 x M8 x 1.25 depth 12 15 60 108 15 80 600.05 +0.015 0 2 x 8H7( ) depth 12 (2 x 4 x M5 x 0.8 through) For limit switch mounting C B A0.5 55 55 1000.3 Switch mounting bracket Note 2) 12 70 12 Fulcrum 13 40 15 10 F 2 x 4 x M10 x 1.5 depth 12 107 Note 3) 70 2 x 2 x 8H7 +0.015 0 ( ) depth 12 60 1 52 (58.7) (70) 95

Clean Regulator/Fluororesin Type

56 95 Tube extensions 80 Pilot port Rc, NPT 1/8 12 R 132 100 42.3 91 116 1 2 SMC 4 x 6.5 (Mounting hole) 80 16 OUT IN 19 6 38 38 100 886 SRF Series Made to Order Specifications: Please contact SMC for detailed dimensions, specifications and lead times.

MK

Operating range RB Model C 8 8 8 8 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 x 50l M3 x 60l M3 x 50l M3 x 60l M5 x 75l M5 x 85l M5 x 75l M5 x 85l M5 x 85l M5 x 95l M5 x 75l M5 x 85l M6 x 95l M6 x 130l M8 x 100l M8 x 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50

REC

RS H A 17 24 27 29 0.7 W W W 500 82 103 116 127 0.3 RZQ Bushing (Bearing) fR U 62 79 89 97 0.5 Lateral load applied to rod end (fR) N 100 MI W S 52 66 75 81 0.7 50 CEP1 33 43 49 53 0.3 23 31 36 39 T 0.5 10 CE1 5 18 25 29 31 0.7 REC40 REC32 REC25 REC20 CE2 Rod side flange style: F Head side flange style: G 182 167 148 118 0.3 Foot style : L 1 L ML2B 140 128 114 90 0.5 W W W 0.5 F 117 108 95

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Slide table Note 4) The plots indicate the 95% upper reliability limit value for time series data up to 500 thousand operation cycles. (Cylinder: CYP32-200, Workpiece weight: 5 kg, Average speed: 2000 mm/s) Series Variations Note 5) The data above provide a guide for selection but is not guaranteed.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

d e DS: DIN terminal DZ: DIN terminal with light GS: Grommet with PCB CS: Conduit U V E Applicable cable 6 to 12 G1/2 U E 300 U E 500 NPT1/2 T T T DN: DIN terminal without connector WN: M12 connector E U E U T T Glossary of Terms [mm] Size Port size A B C D E F I J K L M Grommet Grommet with PCB T U T U 50 3/4 110.6 29 36 71 18 4.5 17 51 32.5 38.5 35 51.9 28.5 57.6 38 60 1 131 33 42 95

Hydraulic Filters

Petroleum, Water-glycol, Emulsion: NBR; Phosphoric ester: FKM, EPDM Model Flange port size Note) Rated flow rate (L/min) Model/Rated Flow Rate FHIA-04 FHIA-06 FHIA-08 FHIA-10 FHIA-12 FHIA-16 FHIA-20 FHIA-24 FHIA-28 FHIA-32 1/2B 30 3/4B 50 1B 95 1 1/4B 150 1 1/2B 220 2B 350 2 1/2B 550 3B 770 3 1/2B 1000 4B 1300 The symbol represented by indicates the type of applicable hydraulic fluid.

Fluoropolymer Piping Equipment

L2, L2 22.5 19.5 21 40 39 54 53 25 6.4 13.7 9 18 LQ3A34 66 65 21.3 15.4 LQ3A36 66 26.7 20.5 LQ3A37 44 41 82 79 7.5 33.4 26.3 LQ3A41 (E,E): Reference dimension for the inserted tubing from the end surface of the nut (E),L1,L2: Nut material PVDF dimensions W: Width across flats dimension 21.3 15.4 22 LQ3A42 26.7 20.5 LQ3A43 33.4 26.3 LQ3A44 49 47 88 86 60.3 52.5 LQ3A51 26.5 24 32 57 54.5 95

Thermo-chiller

Fluid level indicator Circulating fluid return port (CH2) Rc1/2 Power cable entry Applicable wire total: 14.5 to 18.5 Circulating fluid outlet (CH1) Rc1 Communication cable entry Applicable wire total: 6.5 to 10.5 Drain port Rc1/4 Caster (unfixed) with locking lever 14 HRLE Series Compact Dual/Basic Type for Lasers Dimensions HRLE090-W-20/40 484 385 150 Anchor bolt mounting position 965 95

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

S32Stations -M5 Station 2 41.5 33.5 Station 20 230.5 222.5 3 52 44 4 62.5 54.5 5 73 65 6 83.5 75.5 7 94 86 8 104.5 96.5 9 115 107 10 125.5 117.5 11 136 128 12 146.5 138.5 13 157 149 14 167.5 159.5 15 178 170 16 188.5 180.5 17 199 191 18 209.5 201.5 19 220 212 Station L1 L2 10-SS5YJ3-32, S32Stations -C4 Station 2 42.5 33.5 Station 20 231.5 222.5 3 53 44 4 63.5 54.5 5 74 65 6 84.5 75.5 7 95

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

24.8 53 10.5 85.6 44 30.7 66.4 M38 x 1.5 41 29.4 40 45.8 6.5 8 53 2.3 31.1 38.5 19 7 1/4, 3/8, 1/2 3.5 33.8 1/8 28.9 70 10.5 91.7 44 35.8 70.8 M42 x 1.5 50 33.8 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 3/4 3 33.8 1/8 30.4 75 8 93.2 44 35.8 70.8 M42 x 1.5 50 33.8 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 3/4, 1 3.2 43.3 1/8 40 90 7 125.2 44 43 80.3 70 43.3 66 65.8 11 13 90 3.2 1 3.2 43.3 1/8 44.5 95

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

When determining particle generation grades, the 95% upper confidence limit of the average particle concentration (average value), when each specimen is operated at a specified number of cycles Note 2) is considered. The plots in the graphs indicate the 95% upper confidence limit of the average particle concentration of particles with a diameter within the horizontal axis range.

Series 10-, 21- AW-B Filter Regulator

Note) D E 6 7 7 7 14 19 21 21 28.5 38.5 42.5 42.5 30.2 31.1 35.5 37 2.3 2.3 2.3 2.3 3.2 55 53 70 70 90 15.4 8 10.5 10.5 13 5.4 6.5 8.5 8.5 11 43.9 45.8 54 55.5 65.8 34 40 54 54 66 30 41 50 50 70 30 38.4 38.4 47.5 63 66.4 74.3 74.3 80.3 26 29.4 37.3 37.3 43.3 44 44 44 44 44 72.4 85.6 91.7 93.2 175.5 11 10.5 10.5 8 6.5 91.4 121.9 153.9 155.9 242.6 25.5 24.8 28.9 30.4 42.2 40 53 70 75 95

Support Guide/11-LEFG Series

When determining particle generation grades, the 95% upper condence limit of the average particle concentration (average value), when each specimen is operated at a specied number of cycles Note 2) is considered. The plots in the graphs indicate the 95% upper condence limit of the average particle concentration of particles with a diameter within the horizontal axis range.

Modular Type Lubricators Series AL

with drain cock & level gauge Metal bowl with drain cock With drain cock Metal bowl with drain cock With drain cock Optional/Semi-standard specifications Metal bowl with level gauge B B B B B B B Dimensions B Barb fitting Applicable tubing: T0604 Model Standard specifications Optional specifications Bracket mount P M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 A 25 40 53 70 75 90 95

m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateStandard250.22

m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateStandard450.44

HEC_W-E

. :-40 to 70 C (No dew condensation and avoid freezing inside by draining water completely) Storage environment Humidity : 5 to 95%RH Environment : No corrosive gas, solvent such as thinner and flammable gas Indication accuracy: +/0.2 C. Stability: +/0.01 to 0.03 C (recirculating fluid OUT is directly connected with IN) Accuracy related to temp.

Air cylinder (Series compatible with secondary batteries)

D-M9-900 1 D-M9W-900 80 40 (n 4 90 40 (n 4 85 40 (n 4 95 40 (n 4 15 40 (n n n=(4,8,12,16) n=(4,8,12,16) n=(4,8,12,16) n=(4,8,12,16) n=(2,4,6,8) (Different surfaces and same surfaces) 65 70 10 55 60 D-M9V-900 1 D-M9WV-900 55 30 (n 4 65 30 (n 4 60 30 (n 4 70 30 (n 4 10 30 (n n=(4,8,12,16) n n=(4,8,12,16) n=(4,8,12,16) n=(4,8,12,16) n=(2,4,6,8) 15 Auto switch Connection and Example 16 3.