CRBB-OM00004

Table 1 Moment of inertia Size Allowable kinetic energy (J) 10 0.00015 15 0.00025 20 0.0004 30 0.015 40 0.03 How to calculate the load energy E : Kinetic energy (J) I : Moment of inertia (kg m Speed (rad/s) : Rotation angle (rad) 1803.14 rad t : Rotation time (s) 1 E = I 2 2 2 = t Table 2 Safety operable rotation time adjustment range Size Rotation time ( s / 90) 10 0.03 to 0.5 15

NCA1

CJ1 2 to 20 in/s (50 to 500 mm/s) 2 to 20 in/s (50 to 500 mm/s) Piston speed (50 to 500 mm/s) CJP Cushion Air cushion standard Basic style, Foot style, Rod side flange style, Head side flange style, Clevis style, Side tapped style, Center trunnion style, Head side trunnion style, Side lug style, Rod side trunnion style Basic style, Foot style, Clevis style, Rod side flange style, Head side

NCA1

CJ1 2 to 20 in/s (50 to 500 mm/s) 2 to 20 in/s (50 to 500 mm/s) Piston speed (50 to 500 mm/s) CJP Cushion Air cushion standard Basic style, Foot style, Rod side flange style, Head side flange style, Clevis style, Side tapped style, Center trunnion style, Head side trunnion style, Side lug style, Rod side trunnion style Basic style, Foot style, Clevis style, Rod side flange style, Head side

7

knuckle joint Press-fit spring pin 3 x 22 L 10 +0.022 H8 0 13 Press-fit spring pin 3 x 22 L Shaft: 10 Hole: 10 13 0.040 d9 0.076 +0.022 H8 0 24 24 C7 C7 30 +0.5 +0.2 12 0.1 0.3 12 41.2 26 24 18 36 36 D48 48 Please contact SMC for details of the CKGA32 series.

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

steel rod Rod side nose mounting Head side pivot mounting Double end mounting Block mounting O O O O O O O S S O O O O O O NCA S S S S S O O O S O O N N S S S S S S N N N O O O O S 1 1 1 1 1 2 1 1 1 3, 4 1 DN S S S S S S O O O O N S S O S S S O O O O N -X N N O N N N O O O O O N N N O O O O O 20N N O O O O O O N N O O O O S Data N O O O O S O O O O O O O O O 1, 5, 6 O Combination

Nozzle Type Ionizer

Blow Velocity Distribution (Supply Pressure: 0.3 MPa) qEnergy saving static neutralization nozzle IZN10E-01 wHigh flow rate nozzle IZN10E-02 0 0 100 100 Distance [mm] Distance [mm] 200 200 4 m/s 14 m/s 300 300 11 m/s 3 m/s 400 400 8 m/s 2 m/s 500 30 30 20 10 0 10 20 500 30 30 20 10 0 10 20 Distance (Horizontal) [mm] Distance (Horizontal) [mm] 8 IZN10E Series Flow Rate Characteristics qEnergy

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

-SS5V1-10 10-SS5V2-10 10-SS5V3-10 10-SS5V4-10 Note) The values are for individually operated 2 position type manifold bases with 5 stations.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

, 15, 20 25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25 Bore sizes (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed

5 Port Solenoid Valve SY Series

One-touch fitting for 8 C8 One-touch fitting for 10 One-touch fitting for 8 One-touch fitting for 10 One-touch fitting for 12 SY7000 3 position closed center C10 C8 C10 C12 V 6 VDC S 5 VDC 3 SY9000 R 3 VDC Rated voltage For AC ( Hz) 50 60 Thread type 3 position exhaust center One-touch fitting (Inch size) 1 100 VAC 2 200 VAC Nil Rc Symbol Port size Applicable series 4 F G 5 32" One-touch

AC Servo Motor Driver (Pulse input type)

(Note) The value will be -1500 to 1500 kpulse/s when kpulse/ -9 s 9 inputting command pulse.

MXH

300 (mm/s) or Less 10 1 20 16 0.1 10 6 0.01 20 40 60 80 100 0 Overhang L (mm) 8-2-12 11 Compact Slide Series MXH Selection Graph (4) to (12) (Horizontal mounting) Maximum Speed 100 mm/s or Less Maximum Speed 500 mm/s or Less Maximum Speed 300 mm/s or Less Graph (10) Load Eccentricity 50 mm Graph (7) Load Eccentricity 50 mm Graph (4) Load Eccentricity 50 mm 10 1 10 1 0.1 MX Weight m (kg) Weight

Series LX Acceleration Time Guide

/Ball Screw Specification (Horizontal) LXFH5BC LXPB2BC/LXSH2BC LXPB5BC/LXSH5BC 30 30 30 Transfer load Transfer load Ultimate speed (mm/s) Ultimate speed (mm/s) Ultimate speed (mm/s) Ultimate speed (mm/s) 10kg 3kg 20 20 20 Transfer load 6kg 2kg 10kg 3kg 1kg 6kg 10 10 10 0kg 0kg 3kg 0kg 0 0.01 0.02 0.03 0.01 0.02 0.03 0 0 0.01 0.02 0.03 0.04 Time (s) Time (s) Time (s) LXFH5BD LXPB2BD/LXSH2BD

2/3 Port Valve

(No need to add options "S" and "L".)

MXH Series Compact Slide

2 Maximum speed 300(mm/s) or less 10 1 20 16 0.1 10 6 0.01 20 40 60 80 100 0 Overhang L(mm) 1 kg = 2.2046 lb 28 Compact Slide MXH Series Model Selection Method Selection Graphs 4 to 12 (Horizontal Mounting) Maximum speed 100mm/s or less Maximum speed 300mm/s or less Maximum speed 500mm/s or less Graph 4 Load eccentricity 50mm Graph 7 Load eccentricity 50mm Graph 10 Load eccentricity 50mm

48

Grease pack part number: GR-S-010 (10 g) M3, M5, Rc port, NPT port Use the correct tightening torques listed below.

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

CXS-XB19 Dimensions CXS15--XB19 S ZZ 12 7 6 18 20 1 30 Z SS 2-3 x 16l AW (spring pin) 12 2-4.3 through 2-8 counter bore depth 4.4 45 0.2 50 0.2 45 0.2 48 25 56 58 6.3 5 2.1 M4 x 0.7 x 14.5l and M4 x 0.7 (hexagon bolt) (hexagon nut) 2-M5 x 0.8 (through) 1 9 2-M3 x 0.5 (through) 30 (Z) 4-M4 x 0.7 thread depth 5 (same on reverse side) 3 10 Model S ZZ Z SS CXS15-10-XB19 10 89 70 38.5 8 CXS15

AC Servo Motor Driver (CC-Link Type)

Example using a 20[mm] Lead Actuator with target travel speed of 500[mm/sec] Rotations per second Travel distance per second Travel distance per rotation Rotation Speed (rpm) = {Speed (mm/s) Lead (mm) }60 (S) = {500 (mm/s) 20 (mm) }60 (s) =1500 (rpm) The rotation speed must be a value between 0 and the allowable actuator speed. The actuator will not operate if set to 0.

ZQ-OM01401

-*ZQ000MA-K25L-*ZQ000MA-J15L-FPD ZZQ1A-ROC *ZQ000MA-K15L---S *ZQ000MA-K25L---S EA EB FA FB EC EE FC FE *ZQ3MAK1 5L--S *ZQ3MAK2 5LK--S EA EB FA FB EC EE FC FE *ZQ000MAJ1 5LF *ZQ000MAK1 5L*ZQ000MAK2 5LEA EB FA FB EC EE FC FE *ZQ000MAK1 5L--S *ZQ000MAK2 5L--S 36 - No.ZQ-OM01401-B 11. ,,, 11.1 / ZQ05A 0.35MPa -100 30 -100 -80 25 [L/min (AMR) ] -80 [L/min (AMR) ] [kPa] [kPa] 20 -60 -60 15

CEx-OMQ0011

Nm N M1 M M3 W W2 W W4 ML2B25 10.0 1.2 3.0 200.0 58.0 65.0 100.0 ML2B32 20.0 2.4 6.0 300.0 80.0 96.0 150.0 ML2B40 40.0 4.8 12.0 500.0 106.0 140.0 250.0 ML2B25 ML2B32 ML2B40 J 0.43 0.68 1.21 18 ML2B/M1 ML2B/W1 ML2B/W1 0 0 0 Nm 0 0 0 N N 0 m/s m/s m/s ML2B/M2 ML2B/W2 ML2B/W2 N m N N m/s ML2B/M3 m/s m/s 20 ML2B/W3 ML2B/W3 10 Nm 5 3 2 1 N N m/s m/s m/s ML2B/W4 500 N 00 N

Wedge Cam Operation Provides

0.6MPa 40 40 Holding force (N) Holding force (N) 0.5MPa 0.5MPa 30 30 L L 0.4MPa 0.4MPa 20 20 0.3MPa 0.3MPa 10 10 0.2MPa 0.2MPa 0 0 10 20 30 40 50 60 10 20 30 40 50 60 Holding point L(mm) Holding point L(mm) MHK2-20D MHK2-20D 80 60 70 Pressure 0.6MPa Pressure 0.6MPa 50 60 Holding force (N) Holding force (N) 50 40 0.5MPa 0.5MPa 40 30 0.4MPa 0.4MPa 30 20 0.3MPa 0.3MPa 20 10 10 0.2MPa 0.2MPa