ZX

Refer to pages 13-2-4 to 13-2-5 for ejector system unit. Refer to pages 13-2-32 for ejector system manifold. Refer to pages 13-2-40 to 13-2-41 for external vacuum supply system unit. Single unit Single unit 13-2-68 to 13-2-72 Manifold Manifold Refer to page 13-2-54 for external vacuum supply system manifold.

KJ

23 22 20 23 22 23 22 27 23 22 27 25 24 27 25 24 27 10 10 27.5 20.8 4 2.5 1.5 13 15.5 40.5 3.5 27.2 20.5 10 13 11 40.2 12 12 4 3 15.2 6 30.2 23.5 13 15 45.8 46.2 15.7 16 17 15.7 16 17 15.7 17 15.7 18.8 17 15.7 18.8 19 17.7 18.8 19 17.7 18.8 4 47.2 45.8 46.2 47.2 45.8 48.8 47.4 52.6 48.8 47.4 52.6 53.3 51.9 53.1 53.3 51.9 53.1 5 21 16.2 8 12 14 30.2 23.5 18 5 6 27 12 30 31.8 24.5 6.5 5.5 14

CL

15.5 18 4 6 3.5 55 8 8 73.5 13 20 Up to 300 20 26 10 12 8 69 90 45 17 19.5 22 7 9 4 64.5 9 8 83.5 13 Up to 300 25 26 12 20 10 69 90 45 17 19.5 22 7 9 4 64.5 9 8 83.5 13 Up to 300 32 32 14 20 10 76 100.5 52 22 21 24 8 11 4 70 8 11 90.5 16 Up to 300 40 H GR H1 I N NA K L P PG PH PL PW RR S U Z ZZ MM NN Bore size (mm) 1/8 1/8 1/8 1/4 M20 x 1.5 M8 x 1.25 189 180 11.5 127 9 38 20 19.5 22 12 5

Air Fittings & Tubing

Burst pressure Min. bending radius (mm) 100 15 20 30 60 75 75 60 48 36 24 25 13 20 to +60C (Water: 0 to 40 C) (No freezing) Operating temp. Nylon 12 Material Precautions How to Order Be sure to read before handling.

MNB

45.5 22 17 28 12 13 14 8.5 13 40 1/8 104 12 Up to 500 35 14 27 14 52 38 8 63 91 14 52.5 30 22 28 16 13 14 10 16.5 50 1/4 120.5 15 Up to 600 40 18 32 14 65 46.5 11 75 104.5 15.5 58.5 35 27 40 20 14 20 12.5 19 63 1/4 134.5 12 Up to 600 45 18 32 22 75 56.5 11 90 119.5 16.5 68 35 27 40 20 14 20 17.5 23 80 1/4 169 18 Up to 750 45 22 37 22 95 72 13 102 150 19 81 40 32 60 25 20 30 22 33 100 1/4

MNB

45.5 22 17 28 12 13 14 8.5 13 40 1/8 104 12 Up to 500 35 14 27 14 38 52 8 63 91 14 52.5 30 22 28 16 13 14 10 16.5 50 1/4 120.5 15 Up to 600 40 18 32 14 46.5 65 11 75 104.5 15.5 58.5 35 27 40 20 14 20 12.5 19 63 1/4 134.5 12 Up to 600 45 18 32 22 56.5 75 11 90 119.5 16.5 68 35 27 40 20 14 20 17.5 23 80 1/4 169 18 Up to 750 45 22 37 22 72 95 13 102 150 19 81 40 32 60 25 20 30 22 33 100 1/4

MXQ

Model F 22 25 21 26 27 N 4 4 6 6 6 G 6 13 11 21 H 23 26 28 28 NN 2 2 3 3 3 GA 13 13 29 39 49 HA 16 26 20 28 28 I 9 9 9 16 9 J 17 27 37 48 65 K 21.5 31.5 41.5 51.5 61.5 M 42 52 62 80 90 Z 41.5 51.5 61.5 79.5 89.5 ZZ 48 58 68 86 96 MXQ6-10 MXQ6-20 MXQ6-30 MXQ6-40 MXQ6-50 Note) Note) Note) Refer to the bottom view of MXQ6-30. 8-5-16 17 Air Slide Table Series MXQ With buffer (6): MXQ6-F 3-

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

DKeyway dimensions l b D (g6) D (g6) DD (h9) Port size Rc Model Model A B C F H J K S U W BA BB G M N UU L CA CB 20M8 x 1.25 Depth 8 144 (177) CRA1BW50 CRA1BS50 1/8 62 48 46 15 2.5 36 5 98 17 17 8.5 8.5 13 15 11 20 15 118 14 25 5 0 0.030 25 M10 x 1.5 Depth 12 163 (201.5) CRA1BW63 CRA1BS63 1/8 76 60 57 17 2.5 41 5 117 19.5 20 10 10 14 17 13 22 17 139 16 30 6 0 0.030 30 M12 x 1.75 Depth 13

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

22 25 30 G 11 13 15 19 CDRA1BW50 CDRA1BW63 CDRA1BW80 CDRA1BW100 15 17 20 25 118 139 167 202 14 16 19 24 15 17 20 25 Single Shaft Type The dimensions below show pressurization to B port

MNB

500 to 600 to 600 to 750 to 750 1/8 1/8 1/4 1/4 1/4 1/4 12 12 15 12 18 20 10 14 18 18 22 26 19.5 27 32 32 37 37 22 30 35 35 40 40 54 63 75 90 102 116 17 22 27 27 32 41 6 8 11 11 13 16 46 52 65 75 95 114 97 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 83 91 104.5 119.5 150 170 45.5 52.5 58.5 68 81 96 13 16.5 19 23 33 37.5 8.5 10 12.5 17.5 22 25 13 14 15.5

0.4

This allows for viable connections to take place without necessarily specifying whether the manifold station is double, single, or mixed wiring. 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM.

Table of Contents

TMH-06 26.5 10.6 11 20 10 11 7.2 4.3 7.1 TMH-07 TMH-09 TMH-08 TMH-10 TMH-11 34 14.6 14.2 28 14 14 9.6 4.3 9.5 TMH-12 TMH-13 15-9-13 1 Dual Speed Controller with One-touch Fitting Series ASD Model Enables bi-directional flow control.

CL

15.5 18 4 6 3.5 55 8 8 73.5 13 20 Up to 300 20 26 10 12 8 69 90 45 17 19.5 22 7 9 4 64.5 9 8 83.5 13 Up to 300 25 26 12 20 10 69 90 45 17 19.5 22 7 9 4 64.5 9 8 83.5 13 Up to 300 32 32 14 20 10 76 100.5 52 22 21 24 8 11 4 70 8 11 90.5 16 Up to 300 40 H GR H1 I N NA K L P PG PH PL PW RR S U Z ZZ MM NN Bore size (mm) 1/8 1/8 1/8 1/4 M20 x 1.5 M8 x 1.25 189 180 11.5 127 9 38 20 19.5 22 12 5

Table of Contents

10 20 20 20 20 Without coupling 148 Standard motor High rigidity direct acting guide LG1H 10 20 10 20 Horizontal With coupling 158 Non-standard motor 10 20 10 20 With coupling 168 Options Page 178 Construction 179 Mounting 181 Non-standard Motor Mounting 182 Deflection Data 183 Part Number Designations F 2 G X10 1 P A 100 LG1 21 H Frame material Aluminium alloy Stainless steel Nil W

Vacuum System Peripherals:

Check valve: Series AK 13-14-15 Manifold Specification Sheet 1. For ejector system: Series ZX 13-14-18 2. For vacuum pump servies: Series ZX 13-14-19 3. Series ZM 13-14-20 4.

AC

SAC1000, #1 + #2 + #3 + #13 SAC2000, #1 + #2 + #3 + #13 SAC2503, #1 + #2 + #3 + #13 SAC4000, #1 + #2 + #3 + #13 SAC4006, #1 + #2 + #3 + #13 SAC5000, #1 + #2 + #3 + #13 SAC6000, #1 + #2 + #3 + #13 AC1000 AC2000 AC2500, 3000 AC4000 AC4000-06 AC5000 AC6000 1.1-8 Air Combination Filter Regulator + Lubricator AC1010 to 4010 JIS symbol AC3010 AC2010 AC1010 Filter regulator Lubricator Standard Specifications

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

to 500 30 27 60 22 96 1/4 1/4 44 16 32 10 85 15 26 54 10 10 8 M8 x 1.25 50 Up to 600 20 to 600 35 32 70 27 108 1/4 1/4 52 20 40 10 95 17 27 59 13 12 11 M8 x 1.25 63 Up to 600 20 to 600 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 26 67 18 15 11 M10 x 1.25 80 Up to 750 20 to 750 40 37 102 32 129 1/4 1/4 78 25 52 14 113 21 30 72 23 17 13 M12 x 1.75 100 Up to 750 20 to 750 40 37 116 41 140 1/

Cylinder with Lock

37.5 37.5 13 M6 x 1.0 3 16 3.5 40 16 f8 57 28.5 42.5 48.5 73 1/8 16 115 38 35 13 59.5 44.5 M6 x 1.0 3 16 4.5 50 20 f8 66 33 49 55.5 78 1/8 16 122 46.5 40 14 64 47 M8 x 1.25 4 16 4.5 63 20 f8 78 39 52.5 59.5 90 1/4 16 134 56.5 45 14 73 53 M8 x 1.25 4 16 5.5 80 25 f8 98 49 64.5 71.5 113 1/4 17 170 72 45 20 92 65 M10 x 1.5 5 17 7.5 100 30 f8 116 58 73.5 80.5 131 1/4 17 188 89 55 20 109

MY1

58 70 88 104 14.6 7 20 24 29 35 14 14 13 17 17 39.5 45.5 53.5 67 83 106 129 30 32 38 50 57 3.6 3.6 3.5 4.5 4.5 5.8 5.8 6.5 8.5 10 14 14 40.8 40.8 46.7 67.3 67.3 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) RB0806 RB0806 RB1007 RB1412 RB1412 6 6 7 12 12 10 12 14 17 MY1M25 MY1M32 MY1M40 66 80 91 6 6 6 54 67 78 13 16 17.5 MY1M50 MY1M63 6 6 40 52 20 26 66 77 26 31 5.5 5.5

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Refer to pages 8-13-12 to 8-13-13 for detailed selection procedures. 8-13-6 7 Model Selection Series MY2 Moment/MY2C MY2C/M1 MY2C/M3 MY2C/M2 50 40 50 40 50 40 30 30 30 MX 20 20 20 MTS MY 10 10 10 MY2C40 CY Moment Nm Moment Nm Moment Nm MY2C40 MY2C40 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800