Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

7 M4 x 0.7 8 10 A 15 8.5 M5 x 0.8 1214

Prevents Micro-Bubbles

Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Plug Tubing size Plug Body class Body class Symbol 2 3 4 5 Body class 2 3 4 5 2 to 5 2 to 5 LVC 6 1/4" 6 1/4" LVA 2 2 8 8 10 3/8" 10 3/8" Base type LVH A Stacking type 10 3/8" 10 3/8" Manifold stations LVD 3 3 12 1/2" 12 1/2" 02 2 stations LVQ 12 1/2" 12 1/2" 05 5 stations 4 4 LQ 19, 3/4" 19, 3/4" 12 1/2" 12 1/2" LVN 5

RLQ

RLQB32-20 RLQB32-25 RLQB32-30 RLQB32-40 RLQB32-50 RLQB32-75 RLQB32-100 RLQB40-20 RLQB40-25 RLQB40-30 RLQB40-40 RLQB40-50 RLQB40-75 RLQB40-100 RLQB50-30 RLQB50-40 RLQB50-50 RLQB50-75 RLQB50-100 RLQB63-30 RLQB63-40 RLQB63-50 RLQB63-75 RLQB63-100 M5 x 90l M5 x 95l M5 x 100l M5 x 110l M5 x 120l M5 x 145l M5 x 170l M5 x 100l M5 x 105l M5 x 110l M5 x 120l M5 x 130l M5 x 155l M5 x 180l M6 x 120l

Round Type Hydraulic Cylinder

M10 x 1.25 M14 x 1.5 M16 x 1.5 12 M4 10 10 7 5.5 5.5 6.5 M4 set screw (1 pc.) 30 10 16 22 60 46 30 12 M4 10 10 7 5.5 5.5 6.5 36 12 16 30 80 56 40 12 M5 12 13 7 9 7 10 M5 set screw (1 pc.) 44 12 24 30 88 64 43 16 M5 12 13 9 9 10 10 Y-type double knuckle joint Bracket pin 20: Y-020B 25: Y-032B 32: Y-04D 40: Y-04B 2 x D drill through RR1 RR1 C1 Chamfer NDH10 NDH10 MM C E1 E1 C1 Chamfer NZ NZ

Auto Switch Guide

x 0.8 x 16 20M5 x 0.8 x 20 Data M5 x 0.8 x 25 Dimensions ( ): Denotes the values of D-A44C D-A3C D-A44C 2-M5 x 0.8 x 12 Hexagon socket head cap bolt Tightening gland 2-M5 x 0.8 x 12 Hexagon socket head cap bolt Tightening gland G 1/2 G 1/2 Applicable cable O.D. 6.8 to 9.6 Applicable cable O.D. 6.8 to 11.5 Hexagon socket head cap bolt Hexagon socket head cap bolt Indicator light Most sensitive

CL

50 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 23 25 28.5 33 11 11 10 10 14 14 13 14 11 11 11 12 5.5 7 7 9 38 41 41 41 86 96 97 105.5 20 24 24 24 5 6 6 8 19.5 24 24 24 141 151 154 169 33 38 39 44 M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25 Up to 200 Up to 300 Up to 300 Up to 300 0.25 stroke Long Stroke/Refer to pages 9-2-30 to 9-2-32 for mounting dimensions except the table below.

CQS

M5 X 40 l M5 X 45 l M5 X 50 l M5 X 55 l M5 X 60 l M5 X 65 l M5 X 70 l M5 X 75 l M5 X 80 l M5 X 85 l 40 45 50 55 60 65 70 75 80 85 M3 X 30 l M3 X 35 l M5 X 40 l M3 X 45 l M5 X 50 l M3 X 55 l 30 35 40 45 50 55 6.5 8.5 Note 1) The appropriate plain washer must be used for through-hole mounting.

CXWM/CXWL

CXWL20-25 CXWL20-50 CXWL20-75 CXWL20-100 CXWL20-125 CXWL20-150 CXWL20-175 CXWL20-200 8-26-42 41 Series CXWL Slide Unit: Build-in Shock Absorber Slide Bearing Type 20 With End Lock: CXWL20Stroke/25 to 200 R 4-M5 x 0.8 thread through From opposite side 4-7.5 counterbore depth 4.5 2 x 2-M6 x 1.0 Thread depth 12 2-M10 x 1.0 Adjusting bolt 11 depth 21 (An adjusting bolt M10 x 1.0 x 14l to the

2–4

A B Hs A B Hs Symbol 32 40 50 34 37.5 43.5 3.5 6 8.5 6.5 10.5 12 38 41.5 47.5 The dimension inside ( ) is for D-A72. 35 38.5 44.5 6.5 9 12 6.5 9 12 9.5 13.5 11.5 9.5 13.5 11.5 31.5 35 41 38.5 42 48 6 (6.5) 8.5 (9) 11.5 (12) 6.5 9 12 9 (9.5) 13 (13.5) 11 (11.5) 9.5 13.5 11.5 Bore size (mm) 9 Compact Cylinder/Guide Rod Type Series CQM The number of surfaces and grooves where an auto switch

CE

42.5 25, 50, 75, 100, 125, 150, 175, 200 106 M8 x 1.25 10 8 28 25.5 78 15.5 10 36 53.5 Q R T V Y N O P Bore size (mm) 12 20 47 7 53.5 22 7 M4 x 0.7 M5 x 0.8 50 15 62.5 36 5 5.5 M6 x 1 M5 x 0.8 Refer to page 11 regarding the rod end nut which is included.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

J (mm) DRB 7 8 12 12 17 NA Model PE 2.2 2.8 2.7 2.7 RA M4 x 0.7 M5 x 0.8 M8 x 1 M8 x 1 LC MA MB MC MD ME NB 4.5 7.5 9.5 12 16.5 P M3 x 0.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc1/8 PA 22.5 25 42 50 69.5 PB 24 27 44.5 55 75.5 PC 8 10 11.5 14 14.5 PD 4.5 6 7 8.5 11 RC 2 2.5 4 4 6 RD 5.7 6 9 9 12.4 MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M4 x 0.7 M6 x 1 7.5 11 15 20 25 14.5 19 28.5 35.5

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

J (mm) DNA Model P M3 x 0.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc1/8 PA 22.5 25 42 50 69.5 PB 24 27 44.5 55 75.5 PC 8 10 11.5 14 14.5 PD 4.5 6 7 8.5 11 PE 2.2 2.8 2.7 2.7 RA M4 x 0.7 M5 x 0.8 M8 x 1 M8 x 1 RB 7 8 12 12 17 RC 2 2.5 4 4 6 RD 5.7 6 9 9 12.4 LC MA MB MC MD ME NB 4.5 7.5 9.5 12 16.5 MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M4 x 0.7 M6 x 1 7.5 11 15 20 25 6 7 10 12 15 9 12.5

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

9 4 15.5 0.5 29 22 8 14 1 5 9 24 3.5 M3 x 0.5 17 3 25 31 41 8.5 9.5 10.5 10.5 -0.004 -0.012 0 -0.043 12 5 15.5 0.5 M3 x 0.5 34 25 9 18 1.5 6 10 29 3.5 M3 x 0.5 21 3 29 36 48 11 10 11.5 11 -0.004 -0.012 0 -0.043 14 6 17 0.5 M4 x 0.7 42 34.5 10 20 1.5 7 10 36 4.5 M4 x 0.7 26 4 36 44 59 M5 x 0.8 14 13 D12 13 -0.005 -0.014 0 -0.043 16 8 1 4.5 17.5 M5 x 0.8 50 47.5 13 22 2 8 12 43 5.5 M5

Compact Cylinder with Air Cushion and Lock Series RLQ

Model C D Mounting bolt M5 x 90l M5 x 95l M5 x 100l M5 x 110l M5 x 120l M5 x 145l M5 x 170l M5 x 100l M5 x 105l M5 x 110l M5 x 120l M5 x 130l M5 x 155l M5 x 180l M6 x 120l M6 x 130l M6 x 140l M6 x 165l M6 x 190l M8 x 125l M8 x 135l M8 x 145l M8 x 170l M8 x 195l RLQB32-20 RLQB32-25 RLQB32-30 RLQB32-40 RLQB32-50 RLQB32-75 RLQB32-100 RLQB40-20 RLQB40-25 RLQB40-30 RLQB40-40 RLQB40-50 RLQB40-75

High Vacuum Angle Valve

A XLFV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLFV-16-2 41 18.5 8.5 2.7 3 XLFV-25-2 45.5 22.5 8.5 2.7 3 XLFV-40-2 54.5 35 8.5 2.7 3 XLFV-50-2 71 35.5 12 4 2 XLFV-63-2 80.5 44 12 4 2 XLFV-80-2 90.5 60 12 4 2 13 Aluminum High Vacuum Angle Valve Double Acting, O-ring Seal RoHS XLG Series How to Order q w e r t y u XLG 2 M9N 16 A XLG

Series IDG

Page 41 Precautions .

Environment

SpeedWork Load Graph (Guide) For Step Motor (Servo/24 VDC) LECPA Horizontal Vertical LEY25m LEY25m for acceleration/deceleration: 2000 mm/s2 80 35 LEF 70 30 Lead 3: LEY25C Horizontal work load [kg] 29 Vertical work load [kg] 60 LEJ Lead 3: LEY25C 50 20 LEL Lead 6: LEY25B 40 Lead 6: LEY25B 15 30 LEM 10 20 18 Lead 12: LEY25A 7 LEY LEY 12 10 Lead 12: LEY25A 0 0 LES 0 300 200 400 100 500 600

Compact Hydraulic Cylinder

M9NW M9PW M9BW M9NA1 3-wire (NPN) Diagnostic indication (2-color indicator) IC circuit 5 V, 12 V 12 V Relay PLC 24 V 3-wire (PNP) 2-wire Yes Grommet 3-wire (NPN) IC circuit 5 V, 12 V Water resistant (2-color indicator) M9PA1 M9PAV1 3-wire (PNP) 2-wire 4-wire M9BA1 M9BAV1 12 V 5 V, 12 V F79F IC circuit Diagnostic output (2-color indicator) A96V A72 A93V2 A96 A72H A93 A90 Relay PLC IC circuit

IDG

Drain Discharge Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 115 Drain Drain (Maintenance space 100 mm or more) M5 x 0.8 5.5 M5 x 0.8 IDG10V/20V IDG10HV/20HV Port size 1/4, 3/8 70 A 41 59 C Purge air for dew point indicator 14 22 IN OUT 35 10 129 11 (B) Purge air

Compact Cylinder

) CL CD hole H9 CZ M CX M CU CZ CW RR (mm) Hexagon socket head cap screw Bore size (mm) -0.2 -0.6 CDH9 CL CU CW CX CZ M RR 20 25 32 40 50 63 8 3 12 20 16 35 22 9 M5 8 3 12 20 16 40 26 9 M5 10 5.5 12 22 26 45 32.5 9.5 M6 12 5.5 15 25 28 51 38 12 M6 12 6.5 15 27 32 64 46.5 12 M8 16 6.5 20 32 40 74 56.5 16 M8 8 Series C55 Proper Auto Switch Mounting Position (Detection at Stroke End) and Its