VHK

26.2 36 18.7 31 58 17 9.7 7.2 VHKl-02S-06F 18 41 60.4 24.3 36.1 65.2 26.2 39 16.5 3.5 16.8 18.7 11 1.2 31 54 14 32 59 17 6 8 VHK-B1A 44.5 14.5 27 22 16.5 26 VHKl-02S-08F VHKl-02S-10F 22 46 73.8 30.5 43.3 76.3 31.5 44.8 21.5 4 20.8 21.8 14 3.2 49 68 19 63 70 22 10 12 VHK-B2A 49 17 1 30 25 21.5 31 VHKl-02S-12F VHKl-03S-06F 18 41 62.4 24.3 38.1 66.2 26.2 40 16.5 3.5 16.8 18.7 11 1.2 41 56 17

Modular F.R.L. Unit

6 75.5 41 86 AC50, AC55, AC60 AC50B, AC55B, AC60B Replacement parts Description Material Part no.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position type 7 Series VQ5000 Base Mounted Type How to Order Manifolds

VQ5000

3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position type 7 Series VQ5000 Base Mounted Type How to Order Manifolds

SQ1000/2000

B 4 16 () 17 5 SOL. A 4 () 18 6 Station 6 SOL. B 19 17 () 7 20 SOL. A 8 5 () Station 7 21 SOL. B 9 18 () 22 10 SOL. A 23 6 () 11 Station 8 SOL.

CY1

2 0.5 12 4 27 25.5 26 24 14 25 14 24 5 14 M4 x 0.7 x 6 6.5 CY1R15 10.5 8 4.2 2 0.5 17 5 33 31.5 32 30 17 31 17 30 8.5 17 M5 x 0.8 x 7 8 CY1R20 9 9.5 5.2 3 1 22.8 6 39 37.5 39 36 21 38 24 36 7.5 24 M6 x 1 x 8 9 CY1R25 8.5 9.5 5.2 3 1 27.8 6 44 42.5 44 41 23.5 43 23.5 41 6.5 23.5 M6 x 1 x 8 8.5 CY1R32 10.5 11 6.5 3 1.5 35 7 55 53.5 55 52 29 54 29 51 7 29 M8 x 1.25 x 10 10.5 CY1R40 10 11 6.5

Table of Contents

Specifications. 4 4 6 8 8 9 9 10 11 11 12 12 13 14 15 15 15 15 16 17 17 17 18 19 19 20 20 21 22 25 31 31 31 31 35 35 35 39 39 39 41 41 41 43 45 47 47 48 54 63 63 65 67 67 68 69 69 70 71 72 72 73 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Dimensions .

Series KG Stainless Steel One-touch Fittings

8 KGY08-03 17 47 30.5 37 1 8 KGY10-01 27 49.5 31 R(PT) 1 4 3 8 KGY10-02 KGY10-03 50.5 52 30 32 17 29 10 21 28.4 40.0 18.5 26.5 17 39 1 2 KGY10-04 36 54.5 66 31 41 22 1 4 3 8 KGY12-02 KGY12-03 53.5 55 31 33 17 12 22 45.4 57.4 20.9 17 28.5 1 2 KGY12-04 37 57.5 22 68 3 8 KGY16-03 26.5 38 20.9 34 25 81 (81) 113 (113) 65.5 112 16 22 1 2 KGY16-04 41 67 116 Reference dimensions after R(PT) thread

MGP

17 56 62 81 91 300 300 3.5 3.5 3.5 4.5 41 46 54 64 15 17 29 29 50 56 72 82 25 27 39 39 37 38 44 50 12 16 20 25 16 M5 x 0.8 18 M6 x 1.0 26 M6 x 1.0 MGPM (slide bearing)/Dimensions A, DB, E MGPL (ball bushing)/Dimensions A, DB, E (mm) (mm) A E DB A E DB Over 100st Over 50st to 100st Over 50st to 100st Bore size (mm) Bore size (mm) Over 100st Over 30st to 100st Over 30st to 100st Over 100st

Best Pneumatics Vol. 14

Metal bowl AL Optional specifications B B B B B N.C.: Gray N.O.: Black B B O S O S M5 x 0.8 Width across flats 17 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 (mm) Standard specifications Accessory specifications With pressure gauge With auto drain Bracket mounting size Model Port size C D B A L 5.5 7 7 9 9 K 12 14 14 18 18 G 30 41 41 50 50 H 24 35 35 40 40 J 33 F 43 57

VQ5000

B 2 A 4 A B 3 B 2 A 4 A B 2 A 34.5 48 68.5 P = 41 B 2 A 4 A 1 A X 12 Stations R4.5 15.5 17 22 51 69 117 2-Rc 1/8 (External pilot port) 107.8 179 (Single, Double, 3 position, Rubber type) 184.5 (3 position, Metal type) D side 2-6-16 17 Base Mounted Series VQ5000 Plug-in Unit Bottom ported drawing 2-G 3/4 Conduit port 2n-Rc 1/2 4(A), 2(B) port VQC 144.5 143 112.5 83.5 55.5 M5 ground screw

10

45 20 19 72 13 M10 x 1.5 10 22 16 5 M22 x 1.5 38 3/8 114 34 102 102 11.5 14 258 100 40 37 114 41 89 30 55 20 19 72 16 M10 x 1.5 10 26 16 5 M26 x 1.5 38 1/2 114 40 124 124 17 15 258 125 54 50 136 41 110 32 60 27 19 97 16 M12 x 1.75 13 27 20 6 M27 x 2.0 38 1/2 120 50 148 148 17 15 314 With Rod Boot [mm] Bore size [mm] d e f l h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400

High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Stainless Steel One-touch Fittings Series KG

8 KGY08-03 17 47 30.5 37 1 8 KGY10-01 27 49.5 31 R(PT) 1 4 3 8 KGY10-02 KGY10-03 50.5 52 30 32 17 29 10 21 28.4 40.0 18.5 17 26.5 39 1 2 KGY10-04 36 54.5 66 31 41 22 1 4 3 8 KGY12-02 KGY12-03 53.5 55 31 33 17 12 22 45.4 57.4 20.9 17 28.5 1 2 KGY12-04 37 57.5 22 68 3 8 KGY16-03 26.5 38 20.9 34 25 81 (81) 113 (113) 65.5 112 16 22 1 2 KGY16-04 41 67 116 Reference dimensions after R(PT) thread

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

24 23.5 29 36 HR 30 36 41 51 62 HS 8.5 7.5 6.5 7 8 K 14 11 15 13 15 B 8 9.5 9.5 11 11 HT 17 24 23.5 29 36 J x E M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 C 4.2 5.2 5.2 6.5 6.5 HB 17 21 23.5 29 36 CB 2 3 3 3 5 CR 0.5 1 1 1.5 2 D 16.6 21.6 26.4 33.6 41.6 F 8 9 8.5 10.5 13 G 5 6 6 7 7 GP 33 39 44 55 65 GW 31.5 37.5 42.5 53.5 63.5 H 32 39 44 55 67 HA 30 36 41 52 62 Model

Sine Cylinder Series REC

4 60 75 20 20, 25, 32 25 22 19.5 40 32 13 10 17 10.5 10 45 4 60 75 26 32 22 19.5 40 32 13 12 17 10.5 11 45 4 60 75 26 40 24 21 52 41 16 14 22 13.5 12.5 50 5 66 36 82 32 MM N NA NN P S Z ZZ H1 H2 I K KA Bore (mm) 20 30 M20 x 1.5 1/8 37 200 146 M8 x 1.25 20 5 8 33.5 5 6 25 34.5 M26 x 1.5 1/8 41 204 146 M10 x 1.25 20 6 8 37.5 5.5 8 32 42.5 M26 x 1.5 1/8 41 217 159 M10 x 1.25 22 6 8 46.5

Sine Cylinder Series REC

4 60 75 20 20, 25, 32 25 22 19.5 40 32 13 10 17 10.5 10 45 4 60 75 26 32 22 19.5 40 32 13 12 17 10.5 11 45 4 60 75 26 40 24 21 52 41 16 14 22 13.5 12.5 50 5 66 36 82 32 MM N NA NN P S Z ZZ H1 H2 I K KA Bore (mm) 20 30 M20 x 1.5 1/8 37 200 146 M8 x 1.25 20 5 8 33.5 5 6 25 34.5 M26 x 1.5 1/8 41 204 146 M10 x 1.25 20 6 8 37.5 5.5 8 32 42.5 M26 x 1.5 1/8 41 217 159 M10 x 1.25 22 6 8 46.5

Series KP/KPQ/KPG

38 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 4 4 4 D1 18 10.4 20.7 10 D1 8 A L2 6 10 10 19.5 12.8 22.8 D2 H Connection threads 10 (R) 8 26 18 15.2 21.5 26.3 12 (R) 2-Applicable tubing 10 41 18.5 29 24 29.4 17 M L1 M L1 17 12 58 20.9 46 25 31.4 22 D1 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.

Series KP/KPQ/KPG

38 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 4 4 4 D1 18 10.4 20.7 10 D1 8 A L2 6 10 10 19.5 12.8 22.8 D2 H Connection threads 10 (R) 8 26 18 15.2 21.5 26.3 12 (R) 2-Applicable tubing 10 41 18.5 29 24 29.4 17 M L1 M L1 17 12 58 20.9 46 25 31.4 22 D1 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.

Cylinder with Lock

5 17 M22 x 1.5 38 38 3/8 227 34 102 102 7.5 14 303 100 10 26 41 5 16 5 17 M26 x 1.5 38 40 1/2 247 40 124 124 9.5 15 323 Bore size S ZZ 32 149 200 40 163 218 50 180 242 63 192 254 80 237 313 100 257 333 With Rod Boot [mm] Bore size d e f l 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 901 to 1000 32 54 36 23 12.5 25 37.5