Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Nm Moment Nm Moment Nm 4 4 4 CX CY1F15 3 3 3 DCY1F10 2 2 2 -X CY1F15 CY1F15 20CY1F10 CY1F10 1 1 1 Data 0.5 0.5 0.5 500 100 300 50 500 100 300 50 500 100 300 50 Piston speed mm/s Piston speed mm/s Piston speed mm/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass

7.4

stations 76 10 Rc1/8 SS0752-C Manifold pitch: 8.5 mm Page 750 C Kit: Connector Max. 20 stations 115 20 M5 thread C2 (2) C3 (3.2) C4 (4) N1 (1/8") N3 (5/32") Rc1/8 Note 2) 115 20 S Kit: Serial transmission (EX510) Max. 16 stations Base Mounted SS0755-CC Manifold pitch: 7.5 mm Page 750 M3 (M3 thread) V2 (2 Barb fitting) V3 (3.2 Barb fitting) V4 (5 Barb fitting) C Kit: Connector Max. 20 stations

Low Profile Guide Type

Find the value of M1 max at 300 mm/s in Graph (1). 2a =M1/M1 max =1.47/14 =0.105 M1 L1 M3 = m x g x L2 = 3 x 9.8 x 0.04 = 1.176 [Nm] m x g Investigate M3. M3 Find the value of M3 max at 300 mm/s in Graph (3). 2b = M3/M3 max = 1.176/14 = 0.084 L2 m x g 3.

MHC2

5 10 Attachment mounting limiting range 16 11 2-M3 x 0.5 through Prepared hole dia. 2.6 through 5 2.5 2-M2 x 0.4 depth 6 (Mounting thread) 4 2 2 When closed 10 When open 30 13.6 14 20 12 0.05 10 4 6 +0.022 0 7H8 depth 1.5 29 (41) M3 x 0.5 (Finger opening port) 4 -0.005 -0.025 0.8 1.3 M3 x 0.5 Finger closing port 5.5 14.3 In the case of MHCA2-6S, finger opening port is a breathing hole.

MHC2

x 0.5 through Prepared hole dia. 2.6 through MHS 5 2.5 4.8 2 2 MHC MHT When closed 10 When open 30 4 MHY 2.5 14 20 12 MHW MRHQ 4 6 10 0.05 Auto switch mounting groove dimensions Misc. 36 D+0.022 0 7H8 depth 1.5 20(48) M3 x 0.5 Finger opening port 4 0.005 0.025 1.6 7 M3 x 0.5 Finger closing port 18 In the case of MHC2-6S, finger opening port is a breathing hole. 12-8-17 18 Series MHC2-6

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

mg/m3 (ANR) (0.8 ppm) Series AM Degree of quality 3 Note) 14-20-16 Degree of quality 2 Oil Mist Separators Oil smell Micro mist separator Eliminates foreign particles sized 0.01 m or more, or oil particles in aerosol state. 0.01 m (95% capture of the particle diameter) Series AMD 14-20-22 Degree of quality 1 0.1 mg/m3 (ANR) (0.08 ppm) Micro mist separator with prefilter It's an oil separator

Refrigerated Air Dryer

(per 1 m3) The amount of water at the intersection C the amount of water at the intersection H = the amount of condensed water 18.2 3.0 = 15.2 g/m3 Dew Point Conversion Chart 60 50 40 30 20 Pressure dew point (C) B A 10 1.5 MPa 1.3 MPa 1.1 MPa 0.9 MPa 0.7 MPa 0.5 MPa 0.3 MPa 0.1 MPa Atmospheric pressure 0 -10 -20 -30 -40 -50 C -60 -50 -60 -20 -10 0 10 20 30 -40 -30 Atmospheric pressure

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

70 100 300 500 1000 W Piston speed (mm/s) Graph (1) Moment M1, M3 M2 Allowable Moment (Static moment/Dynamic moment) 100 100 85 96 CY1HT32 CY1HT25 CY1H25 CY1H20 CY1H15 CY1HT32 CY1HT25 CY1H25 64 56 (Nm) 50 40 30 50 40 30 20 28 26 M1 M2 M3 M2 M3 M1 Model Model 20 CY1H20 CY1H15 16 Moment (Nm) Moment (Nm) CY1H10 CY1H25 1.5 2.5 1.5 28 26 28 13 10 10 CY1H15 CY1HT25 10 16 10 56 85 56 2 2.5 3 4

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

M8 x 1.25 x 8L (Bolt holder) 1 40 45 45 3 3 330.2 330.2 330.2 42 20 8 8 6.5 counter bore 5.5 (Same on the opposite side) 3.4 through 2-M3 x 0.5 through 3 3 6.5 45 45 M4 x 0.7 x 14.5L (Hexagon bolt) and M4 x 0.7 (Hexagon nut) M3 x 0.5 x 10L (Hexagon socket head cap bolt) 2-M4 x 0.7 through Steel ball Steel ball (14+ST) (16) 4 2-M3 x 0.5 through 6 (mm) ST 10 20 30 40 50 14+ST 24 34 44 54 64

ZR

For nozzle size 18, 20 M3 x 0.35 x 88 4 For nozzle size 10, 13, 15 + with function plate M3 x 0.35 x 89 4 [For ZSE4 spec.] [For ZSE4 spec.]

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

5 (Z) 20 (20) 4-M3 x 0.5 thread depth 4.5 (Opposite side: Same) 5 7 8.5 (mm) 7 2-5.1 Z ZZ SS S Model CXSW10-10 CXSW10-20 CXSW10-30 CXSW10-40 CXSW10-50 CXSW10-75 CXSW10-100 CXSW10-125 CXSW10-150 30 30 92 136 52 10 4-M5 x 0.8 thread depth 4.5 (Piping port) (Opposite side: Same) Standard stroke Long stroke (-XB11) 102 20 156 62 112 176 30 72 (Z) 122 196 82 40 4-M3 x 0.5 thread depth 5 4 (20

Smooth Cylinder/Low Speed Cylinder

40 12, 16, 20 25, 32, 40 50, 63, 80 100 10, 16 20, 25 32 6, 10 15, 20 25, 32 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25, 32 40, 50, 63 80, 100 32, 40 50, 63 80, 100 20, 25, 32 40, 50, 63 80, 100 20, 25 32, 40 50 6, 10 16 6, 10 16, 20 10, 15 25 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion on both ends Shock absorber (CX2: Option) Rubber

Table of Contents

10 20 20 20 20 Without coupling 148 Standard motor High rigidity direct acting guide LG1H 10 20 10 20 Horizontal With coupling 158 Non-standard motor 10 20 10 20 With coupling 168 Options Page 178 Construction 179 Mounting 181 Non-standard Motor Mounting 182 Deflection Data 183 Part Number Designations F 2 G X10 1 P A 100 LG1 21 H Frame material Aluminium alloy Stainless steel Nil W

1

B + Stroke Stroke A + 2 (Stroke) Width across flats MA 20Series MTS ZZ ML MH MT MI MK MA Bore size (mm) 20 25 32 40 Data 8 Width across flats 5.5 M3 x 0.5 150 18 47 16.5 15 8 12 Basic Style Width across flats 8 156 18 49 17.5 20 10 17 Bore size (mm) A B DA G GA GB GC GD GE GF 10 LC 158 18 49 17.5 20 10 17 Stroke ML + Adjustment 12 16 20 25 32 40 198 22 60 21.5 25 12 22 4 6 7 8.5 9 10.5 11.5

Table of Contents

Description Material Return spring Gasket Stainless steel NBR VFS3000-17-1 VFS3000-20 VFS3000-20 VFS3000-17-2 VFS3000-20 o !0 !1 Hexagon socket head screw Steel M3 x 32 M3 x 32 M3 x 32 !2 Detent assembly VFS3000-9A Refer to How to Order Pilot Valve Assembly on page 3-8-54. Pilot valve assembly !

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Max. 5.75 2-M3 x 0.5 2-M4 x 0.7 depth 8 6-M3 x 0.5 depth 4 Top ported: MSUB1-DE B port A port 2-M3 x 0.5 If the adjustment bolt is removed, rotation will be approximately 270 for the single vane type and 100 for the double vane type.

A

15 5, 10, 15, 20, 25, 30 30 25 5, 10, 15, 20, 25, 30, 40 60 32 5, 10, 15, 20, 25, 30, 40 60 40 5, 10, 15, 20, 25, 30, 40 60 Courtesy of Steven Engineering, Inc. !

Made to Order

CXS25 0.1 1.0 0.5 0.05 0.0 10 50 100 200 300 500 1000 1500 0 20 40 60 80 100 120 Stroke (mm) Cylinder speed Vp (mm/s) Dimensions J I K (mm) I 3.25 5 6 7 7 9 J 6.5 10 12 14 14 18 K 7 7 7 10 10 12 N M3 x 0.5 through-hole M3 x 0.5 through-hole M3 x 0.5 through-hole M4 x 0.7 thread depth 6 M5 x 0.8 thread depth 7.5 M5 x 0.8 thread depth 8 Bore size (mm) 6 10 15 20 25 32 -X -X 2-N 1747 Made to

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

15 17 20 25 118 139 167 202 14 16 19 24 15 17 20 25 Single Shaft Type The dimensions below show pressurization to B port

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

-20A P294030-20A P294030-20A @8 CRA180 Nickel plated Steel wire Needle valve P294040-23 P294040-20 P294040-20 P294040-20 @9 CRA1100 Nickel plated Steel wire Lock nut P294050-23A P294050-20A P294050-20A P294050-20A #0 Corresponding parts o, !