modular-press-e

7) IS1000M-60 IS1000M-50 Y510-(02) 03 IS1000M-20 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 Y610-03 (04) Y610-(03) 04 T-interface Note 6) Note 7) Y110-M5 Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 E100-M5 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure

Modular F.R.L. Pressure Control Equipment

7) IS1000M-60 IS1000M-50 Y510-(02) 03 IS1000M-20 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 Y610-03 (04) Y610-(03) 04 T-interface Note 6) Note 7) Y110-M5 Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 E100-M5 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

M1 Weight (g) 4 6 6 8 6 8 10 8 10 8 10 10 12 Applicable tubing O.D. d T H D1 D2 L1 L2 L3 Model AS121-M5-F04 AS121-M5-F06 AS221-01-F06S AS221-01-F08S AS221-02-F06S AS221-02-F08S AS221-02-F10S AS321-02-F08S AS321-02-F10S AS321-03-F08S AS321-03-F10S AS421-04-F10S AS421-04-F12S 16 17 17 18.5 17 18.5 21 18.5 21 18.5 21 21 22 13 13 34 31 54 50 52 86 81 93 88 154 146 21 21.5 25.5 26 M5 x 0.8 28.3

PA300/500/700

1/4,1/8 (Breathing port) M5 x 0.8 16.5 20.4 Body ported: VPA342VA B 20.4 16.5 NO NC 2(A) 26.5 21.5 2.25 Switch mark 26.7 23.2 Bracket (Mounting hole) 23.2 (PA port) Rc 1/8 (Mounting groove for M5 thread) 2-R2.7 PA 5 36 35 35 3.5 21.5 31 17.5 1.6 15 26.7 45 9 54.5 65.6 54.4 1(P) 3(R) 4.5 (Piping port) Rc 1/4,1/8 (Breathing port) M5 x 0.8 16.5 20.4 5-5-15 4 Series VPA300/500/700 Dimensions

REA/REB

-X214 AS3001F-08-X214 10 15 20 25 32 40 50 63 AS1201F-M5-04-X214 AS1301F-M5-04-X214 RS Q G AS2201F-01-06-X214 AS2301F-01-06-X214 2.

REA/REB

MQQ M Table (1) Recommended Speed Controller Bore size (mm) Model Elbow type RHC Straight type In-line type MK(2) AS1201F-M5-04-X214 AS1301F-M5-04-X214 AS1001F-04-X214 AS1001F-04-X214 AS2001F-06-X214 AS2001F-06-X214 AS2001F-06-X214 AS2001F-06-X214 AS3001F-08-X214 AS3001F-08-X214 10 15 20 25 32 40 50 63 AS1201F-M5-04-X214 AS1301F-M5-04-X214 RS Q G AS2201F-01-06-X214 AS2301F-01-06-X214 2.

Series KC Self-seal Fittings

Tube size/ Connecting female thread size Body size Type KBV1-M5 KBV1-M6 KBV2-M5 M5 0.8 M6 1 M5 0.8 M6 1 KBV1-04 KBV1-06 KBV2-06 4 6 KBV2-M6 KBV2-R1 KBV3-R1 KBV3-R2 KBV4-R2 KBV4-R3 KBV2-08 KBV3-08 8 Branch elbow module: KBZ 1 8 Rc(PT) KBV3-10 10 Applicable tube O.D. KBV3-12 12 KBV4-12 KBV4-16 Part No.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Can select female thread (M5 x 0.8).

Modular Type Lubricators Series AL

Example) AL30-03B-2R Symbol Description Body size 20 30 40 50 60 10 Metric thread (M5) Rc NPT G Nil Thread type N F + M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 Port size + Nil B Note 1) Option (Mounting) Without mounting option With bracket + Polycarbonate bowl 1000 cm3 tank 1000 cm3 tank (with switch) Lowest limit ON 1000 cm3 tank (with switch) Lowest limit OFF Metal bowl Nylon bowl

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

1 Thread size M5 01 02 03 04 M5 x 0.8 R R R R 1 8 1 4 3 8 1 2 M5 port only Note 1) AS221: Electroless nickel plated Note 2) AS221: Steel Note 3) Meter-in type: Black zinc chromated 15-9-8 2 Speed Controller with One-touch Fitting Elbow Type (Metal Body) Series AS Flow Rate and Effective Area AS321-03 AS421-04 AS221-01 AS221-02 AS121-M5 Model Tubing O.D. 12 10 10 8 6 8 4, 6 6, 8 Controlled

VP300/500/700

Common exhaust: VV3P7-41Stations 1-04 (G) (E) (T) (D, Y) N.C.

I

D 00 Without subplate 1% 0.5% + -0.5% M5 M5 0.007 00 Without subplate B M5 M5 0.28 01 18 0.41 2.5% 1% + -1% Base Mounted Type 00 Without subplate 2 01 18 0.9 02 14 1.4 00 Without subplate 02 14 2.0 3% 1.5% + -1% 4 03 38 3.3 04 12 3.9 A M5 M5 0.28 1 01 18 0.9 02 14 1.4 2.5% 1% + -1% Wiring: The use of three-core screened cable is strongly recommended with the screen earthed at the end away

Table of Contents

mounting screw M5 x 0.8 x 16 l 1.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

(UL standard V-0) Applicable model: ASV310F, ASV410F, ASV510F Inch size Note) Elbow: M3, M5 only Port size AS 04 06 08 10 12 03 07 09 11 13 M3 M5 U10/32 01 02 03 04 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 With One-touch fitting Thread type ASP Brass parts are all electroless nickel plated.

Modular Type Filter Regulator Series AW

With square embedded type pressure gauge (with limit indicator) With round pressure gauge (without limit indicator) With round pressure gauge (with limit indicator) With set nut (for panel mount) Applicable model AW10 to 40 AW10 to 40 AW30, 40 AW20 to 40 AW10 AW20 to 40 AW10 to 40 Port size Body size Symbol Port size Note 4) 10 20 30 40 M5 01 02 03 04 06 Note 4) M5 1/8 1/4 3/8 1/2 3/4 G

AS-FPQ/AS-FPG

Metric sizes Type 04 06 08 10 12 4 6 8 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 01 02 03 04 M5 x 0.8 1/8 1/4 3/8 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06 15

LEC-OM02704CN

AC200230V AC100120V 40 AC100120V 6 AC200230V L 1 L 1 PE L 2 2-M5 2-M5 L 2 L 3 CNP1 CNP1 N N P 1 P 1 P 2 P 2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L 11 L 11 L 21 L 21 U U CNP3 V CNP3 V M5 3.24[Nm] W W 11 2 11 (2) LECSC-S8 [mm] 40 6 5 6 6 (80) 170 CNP1 () CN1 CNP2 CNP3 6 (68) (25.5) MR-J3BA MR-J3BAT 1.0[kg] .

LEC-OM07605CN

b LECSS2-T9 c 12 12 1560.5 6 420.3 M5 d a 4.9 /LECS / 1./ YES [ ]NO [ ] 2.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

CYP

-06-X214 Caution 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Universal type (throttle valve) 10-AS2301F-01-06-X214 10-AS1301F-M5-06-X214 1.