Free Mount Cylinder

F FK FL FY GC GA Model Air port Vacuum port M5 x 0.8 M5 x 0.8 M5 x 0.8 16.5(1) ZC(D)UKR16 ZC(D)UKR20 ZC(D)UKR25 ZC(D)UKR32 Rc 1 8 M5 x 0.8(2) 7 20 32 2 6 7 8 13 17 28 19 5 8 9 10.5 26 32 40 40 50 62 3 4 5 8 10 12 9 10 11 8 10 12 16 20 24 20 22 29 33 43.5 51.5 21.5 22 22.5 19 21.5 23 M5 x 0.8 M5 x 0.8 Rc 1 8 6.6 5 to 50 8 5 to 50 11.5 5 to 50 SA H HA J L P Q QA R S T W Y Z Model ZC(D)UKR16

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

CE-compliant Valve mounting direction Stations R port Nil Pilot valve is opposite the A port side. 02 2 stations A A M5 x 0.8 Nil R port P R Q CE-compliant : : A A M5 x 0.8 A port M3 x 0.5 P port M5 x 0.8 Pilot valve is on the A port side. 20 S 20 stations P port M5 x 0.8 A port M3 x 0.5 Note) For more than 10 stations, supply air to both sides of P port and exhaust air from both sides of

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

AS120-M5 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 522 Series AS Speed Controller: Standard Type Elbow Type (Metal Body) Note) The flow characteristics are representative values.

3 Port Solenoid Valve Metal Seal Series VZ200 1

x 0.8, Rc 1/8 C4, C6 C4, C6 Rc 1/8 VZ215VZ225Base mounted (Without sub-plate) VVZ200-31A-2 VVZ200-32A-2 M5 x 0.8 Rc 1/8 VZ212--M5 VZ222--M5 Body ported VP Port size Applicable valve model VG VV3Z2-20-061 VP Blanking plate VVZ200-32A-1 VVZ200-31A-1 S070 Screws and Gasket Assembly Part No.

KA

<M5, M6> <M5, M6> A D2 M L1 L2 D1 Part No.

Antistatic One-touch Fittings Series KA

M5, M6 M5, M6 L2 M A D1 D2 L1 Part No.

Series M Miniature Fittings M3, R(PT) 1/8, M5

M3 male -M3 male M-3N P. 92 M5 M5 M-5ALHN-6 P. 91 Bulkhead union M-5E 6/4 P.90 Panel mount connection. M5 female -M5 female Plug Barb elbow(H) For soft nylon tube. Body rotates at 360 around the stud axis. 3.18/2.18 M-5ALHU-3 To plug unused M3 port.

CL

x 0.8 pressurized locking port Pneumatic locking and spring and pneumatic locking Piping port M5 x 0.8 Manual unlocking cam M5 x 0.8 unlocking port Unlocked when pressurized 71 46 6 Head cover port in axial direction (R) M5 x 0.8 Rod side cylinder port 31 Lock nut M14 x 1.0 M5 x 0.8 Head side cylinder port 5 5 32 34 48.5 6.5 M6 x 1.0 6 20 18 Width across flats 10 18 9.5 11.5 65 39 20 14

CL

Double Acting, Single Rod Rod Side Flange Style (F) E D P CLJ2F1619 16 2 8 Silencer 12 25.5 Spring lock CL Piping port M5 x 0.8 CL1 Head cover port in axial direction (R) MLGC Manual unlocking cam M5 x 0.8 pressurized locking port Pneumatic locking and spring and pneumatic locking 71 46 6 M5 x 0.8 unlocking port Unlocked when pressurized CNG 31 M5 x 0.8 Rod side cylinder port Lock nut MNB

Process Pump Series PA3000/5000/PAX1000 Series PB1000

by suction Transfer of liquid by pressure Atomizing of liquid Stirring of liquid II Prevents sticking of liquids Series PA3000/5000 Process Pump Automatically Operated Type (Internal Switching Type) How to Order 1 1 PA 3 03 0 PA3000 Option Body size Nil N Body only With silencer 3 5 3/8 standard 1/2 standard For AIR EXH: AN200-02 Liquid contact body material Connection port size 03 04 06

Process Pump Series PA3000/5000/PAX1000 Series PB1000

suction Transfer of liquid by pressure Atomizing of liquid Stirring of liquid Prevents sticking of liquids Features 2 Process Pump Automatically Operated Type (Internal Switching Type) Series PA3000/5000 How to Order 1 1 PA 3 03 0 PA3000 Option Body size Nil N Body only With silencer 3 5 3/8 standard 1/2 standard For AIR EXH: AN200-02 Liquid contact body material Connection port size 03 04 06

ASD

Metric size Inch size With One-touch fitting 04 06 08 10 12 01 03 05 07 09 11 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT AS N ASP Bore size ASN M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 AQ ASV AK ASS Needle Valve/Flow Characteristics (Inlet Pressure: 0.5 MPa) ASR ASD230F ASD330F ASD430F ASF 100 200 400 Flow

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

port U10/32 port M3 port M5 port U10/32 port Meter-in type Meter-in type M3 port M5 port U10/32 port M3 port M5 port U10/32 port 15-9-4

VQ7-6/7-8

Mounting bolt M5 X 115 with SW M5 X 35 with SW M5 X 15 with SW M5 X 45 with SW M5 X 60 with SW M5 X 65 with SW M5 X 70 with SW M5 X 75 with SW M5 X 90 with SW M5 X 95 with SW M5 X 100 with SW M5 X 105 with SW Size SMC SMC SMC SMC SMC Option mounting diagram SMC SMC SMC SMC Spacer 2 SMC Spacer 2 Interface regulator Spacer 1 Throttle valve spacer SMC Release valve spacer Spacer 2 Spacer 1 Spacer

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

ASN AQ ASV AK How to Order VCHC F S 1 0 03 06 3 2 AS ASR ASQ Hexagon lock nut Round lock nut J Nil Lock nut option Speed controller Option None Electroless nickel plated Nil N Body size 1 2 3 4 M5 standard 01, 02 standard 03 standard 04 standard Tube size Note) With seal 04 06 08 10 12 4 6 8 10 12 Made to Order Refer to page 612 for details.

Auto Switch Guide

MLU ML1C Auto switch mounting screw M5 x 0.8 x 16 l 1.

48

(M3, M5, and G threads) Use SMCs recommended grease. Grease pack part number: GR-S-010 (10 g) M3, M5, Rc port, NPT port Use the correct tightening torques listed below.

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

Note) Elbow 06 08 10 12 6 8 10 12 Control type Meter-out Meter-in 0 1 Note) For applicable tubing O.D. selection, refer to the Model on page 603. Port size With One-touch fitting 01 M5 M5 R 1/8 R 1/4 R 3/8 R 1/2 02 03 04 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

1 Thread size M5 01 02 03 04 M5 x 0.8 R R R R 1 8 1 4 3 8 1 2 M5 port only Note 1) AS221: Electroless nickel plated Note 2) AS221: Steel Note 3) Meter-in type: Black zinc chromated 15-9-8 2 Speed Controller with One-touch Fitting Elbow Type (Metal Body) Series AS Flow Rate and Effective Area AS321-03 AS421-04 AS221-01 AS221-02 AS121-M5 Model Tubing O.D. 12 10 10 8 6 8 4, 6 6, 8 Controlled

AS

VCHC AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 AS1201F-M5-02, AS1211F-M5-02 AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS2201F-01, AS2211F-01 AS2301F-01, AS2311F-01 ASS Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa ASR ASQ Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Number of needle rotations Number of needle rotations Number of