Speed Controller with

Metric Size Applicable tube Tube size 4 6 8 10 12 23 04 06 08 10 12 Applicable series 3.2 TMH-23J TMH-04J TMH-06J AS1002F AS2002F AS2052F AS3002F AS4002F TMH-06 TMH-07 TMH-08 TMH-10 TMH-12 TMH-13 Holder for speed controller Note) The applicable TMH for AS1002F-02 is not available.

One-touch Fittings

28.4 6 14 1/4 KQ2Y10-02GS 17 15.9 15.6 17 20.6 28.6 20.6 44.6 15.6 40 28.4 7.5 24.5 3/8 KQ2Y10-03GS 17 15.9 15.6 17 20.6 29.5 20.6 45.1 15.6 40 28.4 7.5 25 1/2 KQ2Y10-04GS 22 15.9 15.6 17 20.6 33.5 20.6 47.8 15.6 40 28.4 7.5 47.4 Connection thread (With sealant) 10 Release button dimensions 12 1/4 KQ2Y12-02GS 17 18.5 18.2 17 23 29.9 23 48.3 17 57.4 45.4 9 27.6 3/8 KQ2Y12-03GS 17 18.5

Prevents Micro-Bubbles

28 PA SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 PAX 4-R3 4-R3 (Max. 91) 325 PB (Max. 91) 191 87 60 87 60 112 112 17-5-37 35 Series LV Fitting Assembly Procedure Assemble fittings following the procedure shown below.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Note 3) For the inch-size One-touch fittings, refer to page 4-14-40.

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

) AS32l1FSl-U03-08 8 13.2 22.7 33 28 14.2 AS32l1FSl-U03-10 10 15.9 26.7 37 15.6 39 (40) AS32l1FSl-U03-12 12 18.5 29.7 40 26.8 17 41 (42) AS42l1FSl-U04-10 10 1/2 24 (23.8) VCHC 3/8 19 16.6 55.4 54 50.2 48.8 ASR ASQ 15.9 18.8 27.4 40.3 (40.2) 36.2 64.1 62.5 57 55.4 15.6 26 29 10 19 60 (59) AS42l1FSl-U04-12 12 18.5 30.8 43.7 (43.6) 35.1 17 62 (61) AS42l1FSl-U04-16 16 23.8 34.8 47.7 (47.6) 32.7

KN Series Nozzles for Blowing

Weight (g) L1 M Width across flats H1 H2 Nozzle size D Model KN-04-100 KN-04-150 KN-06-100 KN-06-150 KN-06-200 KN-08-150 KN-08-200 KN-10-250 KN-10-300 KN-10-350 KN-10-400 KN-10-600 KN-12-350 KN-12-400 KN-12-600 KN-16-400 KN-16-600 KN-20-400 KN-20-600 13 14 19 20 22 28 30 35 36 37 30 28 54 55 40 77 79 117 112 15 15 16 16 16 16 16 17 17 17 17 17 17 17 17 17 17 17 17 27 27.7 30.1 30.8 31.5 33.8

OMU0023

Modbus ASCII protocol (ASCII notation) Request data : 01 08 0 1234 B1 [CR,LF] Response data (normal response) : 01 08 0 1234 B1 [CR,LF] (ASCII hexadecimal notation) Request data 3Ah 30h 31h 30h 38h 30h 30h 30h 30h 31h 32h 33h 34h 42h 31h 0Dh 0Ah Response data (normal response) 3Ah 30h 31h 30h 38h 30h 30h 30h 30h 31h 32h 33h 34h 42h 31h 0Dh 0Ah ii.

25

Comparison of potential amplitude between AC type and dual AC type (Installation height of sensor: 300 mm) 40 AC type Surface potential of workpiece (V) 20 25 V or less Dual AC type IZS42 0 20 40 Time Independent Dual AC type is implemented.

Piping: Base Mounted Common SUP Individual EXH, Flat Cable, Stations: 8 Stations, A, B Port: ø4 One-touch Fitting

Piping: 20 (Body Ported/Common SUP Common EXH), Stations: 8 Stations, A B Port Size: 00T (NPTF)

Piping: 42 (Base Mounted Common SUP Common EXH), Stations: 8 Stations, A B Port Size: 01 (Rc1/8)

Piping: 42 (Base Mounted Common SUP Common EXH), Stations: 8 Stations, A B Port Size: 01N (NPT 1/8)

Piping: 42 (Base Mounted Common SUP Common EXH), Stations: 8 Stations, A B Port Size: 01T (NPTF1/8)

Piping: 42 (Base Mounted Common SUP Common EXH), Stations: 8 Stations, A B Port Size: C6 (ø6 One-touch Fitting)

Piping: 42 (Base Mounted Common SUP Common EXH), Stations: 8 Stations, A B Port Size: N7 (1/4" One-touch Fitting)

Piping: 42 (Base Mounted Common SUP Common EXH), Stations: 8 Stations, A B Port Size: N7N (1/4" One-touch Fitting NPT)

Piping: 42 (Base Mounted Common SUP Common EXH), Stations: 8 Stations, A B Port Size: N7T (1/4" One-touch Fitting)

Piping: 43 (Base Mounted Common SUP Individual EXH), Stations: 8 Stations, A B Port Size: N3T (5/32" One-touch Fitting)

Piping: 43P (Base Mounted Common SUP Individual EXH, Flat Cable), Stations: 8 Stations, A, B Port: C4 (ø4 One-touch Fitting)

Piping: Body Ported/Common SUP Common EXH, Stations: 8 Stations, A B Port Size: NPT