CNA (mm) 40 50 63 80 100 l f h LX LY MM N P Q H S T V W X Y ZZ (One side) (Both sides) 263 292 306 369 399 271 300 314 378 408 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 43 52 52 65 65 11.2 11.2 11.2 12.5 14 59 66 66 80 81 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 42 50 59 76 92 70 80 93 116 133 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8
(mm) 40 50 63 80 100 l f h LX LY MM N P Q H S T V W X Y ZZ (One side) (Both sides) 263 292 306 369 399 271 300 314 378 408 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 43 52 52 65 65 11.2 11.2 11.2 12.5 14 59 66 66 80 81 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 42 50 59 76 92 70 80 93 116 133 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8
20 8 11 11 13 16 100 110 130 160 180 42 50 59 76 92 80 90 105 130 150 60 70 86 102 116 12 12 15 18 18 9 9 11.5 13.5 13.5 32 40 40 52 52 16 20 20 25 30 44 52 64 78 92 MK(2) RS Q G Bore size (mm) LL MM N Q S W H ZZ d e f h With rod boot Without rod boot l ZZ RS H A 40 50 63 80 100 86 83 83 84 85 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 38 43.5 49 63 73 84 90 98 116
20 8 11 11 13 16 100 110 130 160 180 42 50 59 76 92 80 90 105 130 150 60 70 86 102 116 12 12 15 18 18 9 9 11.5 13.5 13.5 32 40 40 52 52 16 20 20 25 30 44 52 64 78 92 Up to 600 601 to 1000 MK(2) Up to 750 751 to 1000 Up to 750 751 to 1000 RS Q G Bore size (mm) LL MM N Q S W H ZZ d e f h With rod boot Without rod boot l ZZ RS H A 40 50 63 80 100 86 83 83 84 85 M14 x 1.5 M18 x 1.5 M18 x
B A IN OUT M 2 x P Port size I J F K L (D) (mm) Model Conduit Conduit terminal Electrical entry Port size P A B C E F I J K L U D M V 62.5 (68.5) T T 62.5 (68.5) 126.5 (134.5) 76.5 (84.5) 76.5 (84.5) U 107.5 (113.5) 29 5 C VXD2 30 71 20 4.5 17 51 32.5 38.5 35 3/4 108 77 47.5 6 D VXD2 1 33 35 95 22 4.5 20 59.5 45.5 49.5 42 110.5 79.5 50 ( ): Denotes the Normally Open (N.O.) dimensions. 152
(inch) Connection thread UNF NPT H (Width across flats) 8.4 9.6 <10-32 UNF> <10-32 UNF> Min. port size D1 Note) D2 L1 M A Weight (g) Model L2 L3 Applicable tubing L1 M 5 18 6 18 19 16 19 37 30 38 67 60 70 85 104 10 14 11 15.5 14 11.5 14 17.5 17 20 20.5 17.5 19.5 21 24 12.7 15.5 2.3 2.5 2.5 2.8 3.5 2.3 20 29.5 20 29.5 29.5 27 29.5 38.5 31 38.5 45 41 45 42 50 16.5 25.5 16 25.5 25.5 23.5 25.5
53-SS5Y5-20-05 1 set (Type 20, 5 station manifold base part no.)
0.5, 1, 5, 10 20, 50, 75, 100 EH EB ES Plating fluids, General acids, Alkali fluids, Industrial water, Cooling water Polypropylene 0.5, 1, 5, 10 20, 50, 75, 100 EHM P.41 General acids, High-temperature fluids EHK Glass fiber 1, 5, 10, 20 Paper P.42 Cotton, Phenol impregnated, (Epoxy adhesion) 5, 10, 20 Hydraulic oil, Lubricating oil, Fuel oil EP Micromesh Stainless steel 304 (Epoxy adhesion
45 50 25 55 65 Vertical 2 4 0.5 7.5 15 4 10 20 2 2 23 Up to 450 10 to 700 5 to 360 20 to 1100 12 to 750 6 to 400 24 to 1200 16 to 800 8 to 400 30 to 1200 20 to 850 10 to 300 451 to 500 10 to 600 5 to 300 20 to 1100 12 to 750 6 to 400 24 to 1200 16 to 800 8 to 400 30 to 1200 20 to 850 10 to 300 501 to 600 20 to 900 12 to 540 6 to 270 24 to 1200 16 to 800 8 to 400 30 to 1200 20 to 850 10
Large variations may occur depending on the surrounding environment (variation on the order of 30%). 6 to 20 Auto switch model Bore size (mm) D-A9 A D-F9 B C D D-A9 D-F9 D-A9 D-F9 D-A9 D-F9 30 6 26 46 42 46 42 26 30 10 28 32 48 44 48 44 28 32 15 17.5 21.5 76.5 72.5 56.5 60.5 20 19.5 23.5 87.5 83.5 39.5 35.5 67.5 71.5 Note) Auto switches cannot be installed in Area C in the case of 15. 25
(Refer to Specific Product Precautions 4 on the next page for details.) 1.5 01: R 1/8 T1: NPT 1/8 ZSE40(F)/ISE40 W1 2-M4 x 0.7 thread depth 4 20 30 Rc 1/8 MPa 7 19 20 30 OUT2 OUT1 SET R 6.5 6.4 18.35 Atmospheric release port Lead wire length 600 (3000) 3.5 12.4 7.8 7 2.5 2.6 30 15.2 42 10.7 For splash proof use (IP65), insert an air tube into the atmospheric release port.
20 50 98 70 84 44.5 11 6.4 117.5 16 3.3 316 280 46 20 196 11 20 98 50 70 44.5 84 13 319 11 6.4 117.5 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.
Q G RS H A Bore size (mm) LC LH LS LT LX LY Z ZZ X S LZ Y RZQ 10 5.5 14 83 2.3 33 25 19 108 6 65 42 9 16 5.5 18 92 2.3 42 30 21 119 6 74 54 9 MI W S 20 6.8 25 137.5 3.2 40 40 20.5 166 8 97.5 55 20 25 6.8 28 142.5 3.2 40 47 24.5 175 8 102.5 55 20 CEP1 CE1 Rod side flange style: MQMLF 6 CE2 20 ML2B 2.3 C J G5-S 33 42 27.5 2-5.5 66 + Stroke 93.5 + Stroke CV MVGQ 10, 16, 20, 25 CC RB FY J FT
20.5 166 8 97.5 55 20 25 6.8 28 142.5 3.2 40 47 24.5 175 8 102.5 55 20 CEP1 CE1 Rod side flange style: MQMLF 6 CE2 20 ML2B 2.3 C J G5-S 33 42 27.5 2-5.5 66 + Stroke 93.5 + Stroke CV MVGQ 10, 16, 20, 25 CC RB FY J FT FX FZ H 2-FC S + Stroke ZZ + Stroke D-X 20Bore size (mm) FC FT FX FY FZ H ZZ S Data 10 5.5 2.3 33 20 42 28 101 65 16 5.5 2.3 42 24 54 30 114 74 20 7 4 60 34 75 40.5 151 97.5 25
55 175 20 8 25 Front flange type/MQMLF 6 20 33 42 27.5 2.3 2-5.5 66 + Stroke 93.5 + Stroke 10, 16, 20, 25 FY FT FX FZ H 2-FC S + Stroke ZZ + Stroke (mm) Bore size (mm) FC FT FX FY FZ H S ZZ 5.5 2.3 33 20 42 28 65 101 10 5.5 2.3 42 24 54 30 74 114 16 7 4 60 34 75 40.5 97.5 151 20 7 4 60 40 75 44.5 102.5 160 25 15 Series MQM Lateral Load Resisting Low Friction Cylinder Metal Seal Refer to
DC24V 2. 20 3. 4. 5. 6. 7. 8.
-42 Individual VV3PA5-41 Common VPA500 Common 2 to 20 stations W = 190n + 150 3/8 VPA544 VV3PA5-42 Individual VV3PA7-41 Common VPA700 2 to 20 stations W = 410n + 380 1/2 VPA744 VV3PA7-42 Individual Note) Supply pressure to 1(P) ports and exhaust air from 3(R) ports on both sides for 10 stations or more.
weight m (kg) Load weight m (kg) 80 100 80 10 10 80 5 10 20 29 30 50 49 300 200 100 5 10 20 29 30 50 49 300 200 100 Stroke (mm) Stroke (mm) 8-19-16 Compact Guide Cylinder Series MGP Horizontal Mounting (Ball bushing bearing) (19) l = 50 mm, V = 400 m/s (20) l = 100 mm, V = 400 m/s MGPL12 to 25 5 MGPL12 to 25 5 25 25 25 25 25 25 MX Load weight m (kg) Load weight m (kg) MTS 20 20 20 20 20
W .TOea TT XIUS ' Z ZZ l ~/ t ~ ~ 20 27 Y. 42 11 20 45 153 8 15 !
20 10 21 16 KQ2R10-16 20.9 50.5 (29.5) 42 25.5 12 16 KQ2R12-16 20.9 50.5 58.3 (46.1) 37 25.5 22 Note) ( ): Values for soft nylon.