Aluminum High Vacuum Angle Valve

With Bypass Valve (Flange size: 80) (40) 148.5 3 117 (40) I G H H V A C 117 A U U M E V V A L Lead wire length: 500 mm (L type: 3000 mm) (40) XLA-16-X65 e u t w y Pilot port: Rc1/8 Bypass valve adjustment nut (Initial exhaust) Adjustment pitch: 1 mm/rotation Shaft seal (FKM) r Scraper (FKM) Pilot port: M5 0.2 Lock nut Width across flats 13 96 90 235 (Max. 13) 7.5 8-2 112 114 83 8-1 i !

CE2

RE A B Mounting bracket nut Unit holding tie-rod Bore size (mm) Nut Width across flats REC Socket Width across flats Socket JIS B 4636 2 point angle socket 10 10 40 JIS B 1181 Class 3 M8 x 1.25 JIS B 4636 CX 13 2 point angle socket 13 JIS B 4636 2 point angle socket 13 50 13 CY JIS B 4636 2 point angle socket 13 JIS B 4636 JIS B 1181 Class 3 M10 x 1.25 63 17 13 2 point angle socket 17 MQQ

Thermo-chiller

In locations where high frequency occurs 13. In locations where damage is likely to occur due to lightning 14.

HRX-OM-W069

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 CH1 abnormal low tank fluid level 1 CH1 low tank fluid level 2 CH2 Abnormal low tank fluid level 3 CH2 low tank fluid level 4 Reservation 5 Fan failure Alarm flag 1 6 Reservation 7 Reservation 8 CH1 abnormal rise of circulating fluid temperature 9

CEx-OMG0106

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

Rotary Table

Description Qty. 4 Seal 1 4 Seal 1 4 Seal 1 4 Seal 1 12 Gasket 1 12 Gasket 1 12 Gasket 1 12 Gasket 1 Parts included 13 Gasket 1 13 Gasket 1 13 Gasket 1 13 Gasket 1 in seal kit 17 Wear ring 4 17 Wear ring 4 17 Wear ring 4 17 Wear ring 4 18 Piston seal 4 18 Piston seal 4 18 Piston seal 4 18 Piston seal 4 26 Seal washer 2 26 Seal washer 2 26 Seal washer 2 26 Seal washer 2 Description Size 70

LC6D/LC6C

Terminal part no. 1 10 2 11 3 12 4 13 5 14 6 15 7 16 8 17 9 18 A mark is located on the connector number 1 side. 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 LJ1 LG1 LC1 LX LC6D/LC6C Switches View from the insertion side View from the wiring side Switches Home position switch: This switch indicates the home position. Connect this switch when returning to the origin point.

A

90 3.2 90 NAL6000 95 268 45 95 70 66 35 11 13 90 3.2 95 Courtesy of Steven Engineering, Inc. !

Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C

Terminal part no. 1 10 2 11 3 12 4 13 5 14 6 15 7 16 8 17 9 18 A mark is located on the connector number 1 side. 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 View from the insertion side View from the wiring side Switches Home position switch: This switch indicates the home position. Connect this switch when returning to the origin point.

Drain Separator for Vacuum Series AMJ 1

11 35 66 70 23 90 24 284 (285) 90 3/4, 1 AMJ5000 Note) ( ) is the case for metal bowl. 13-13-5

ZQ

XT53440 05 Number of stations 05 06 12 1 station 2 station 8 station 13-9-10

Auto Switch Guide

Weight Auto Switch Internal Circuit D-F7NV (g) D-F7NV D-F7PV D-F7BV Auto switch model DC (+) Brown 11 13 13 0.5 Lead wire length (m) 50 57 57 3 Main circuit of switch OUT Black 81 92 92 5 DC () Blue Dimensions 3.5 mounting hole D-F7PV Indicator light DC (+) Brown Main circuit of switch Main circuit of switch OUT Black DC () Blue D-F7BV OUT (+) Brown Most sensitive position OUT () Blue 7-9

CQS

For Safety Instructions and Actuator Precautions refer to pages 7-13-3 to 7-13-6.

HRS100/150

Refer to back page 50 for Safety Instructions and pages 13 to 16 for Temperature Control Equipment Precautions. Design Operating Environment/Storage Environment Warning Warning 1. This catalog shows the specifications of a single unit. 1.

CEx-OMQ0011

YES 14.5mT NO YES NO YES NO YES NO HYRODLESS NO YES 13 - 3-2. 14 - 3-3.

LEY-OM007

LEY-OM00701 / // LEY Series LEY LEYG LEYG Series () LEY Series () LEC Series /LEC6 . 2 /. 3 .3 .4 .6 /LEY. 9 .9 .11 .12 /LEYG. 13 .13 .15 .16 . 17 .17 .17 .20 .32 . 35 . 36 .36 .37 .38 .39 .40 .40 . 41 .41 .41 .44 .45 .47 . 48 -1- LEY / (ISO/IEC) (JIS)1)2) *1) ISO 4414:Pneumatic fluid power -General rules relating to systems.

LECA6_C

LEC-OM08001 DC24V / / LECA6 Series 1. . 4 2. . 6 2.1. . 6 2.2. 7 2.3 . 8 2.4 (). 9 (1) . 9 2. 9 3. 9 4. 10 5(). 10 6. 10 3. . 11 3.1. . 11 3.2. 12 3.3. . 13 1LECA6. 13 2DIN LECA6D. 13 3.4. 14 1. 14 2. 14 3. 15 4. . 16 4.1 CN1. 16 4.2 CN2CN3:. 16 4.3 CN4I/O . 16 1. 16 2. 17 4.4 CN5I/O . 17 5.

CQS

14 11 10.5 16 18 9 9.5 13 14 12 16 20 25 11 10.5 16 18 19.5 21.5 25 27 1 0.5 6 8 17 19 22.5 24.5 7 6 11.5 13.5 Bore size (mm) Anti-lateral load 1[3.5] 0.5[3] 3.5[-1] 5.5[-3] 6 5.5 9 10 12 16 20 25 0.5 1 5 7 6 5.5 9 10 0.5 1 5 7 17 19 22.5 24.5 10 9.5 13 14 5 5.5 9.5 11.5 5 4.5 0.5 1.5 10 9.5 13 14 5 5.5 9.5 11.5 19.5 21.5 25 27 Bore size (mm) Double acting: double rod 3.5[6] 3[5.5] 8[10.5

MXW

Body tapped H l Positioning hole D x H (mm) Max. screw-in depth l (mm) Max. tightening torque (Nm) Model Bolt D 5H9 + 0.030 depth 4.5 2.1 6 MXW8 M4 x 0.7 0 5H9 + 0.030 depth 4.5 6 2.1 MXW12 M4 x 0.7 0 Positioning hole D x H (mm) Max. screw-in depth l (mm) Max. tightening torque (Nm) Bolt Model 6H9 + 0.030 depth 5.5 9 4.4 MXW16 M5 x 0.8 0 6H9 + 0.030 depth 5.5 5H9 + 0.030 depth 4.5 13 4.4

VQ5000

A Unused A Unused A Unused A Unused A Unused A B A B A B A B A B A A A B A B A B A A A A 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 6 7 8 9 10 11 12 13 14 15 0 0 1 2 3 4 5 Type SC OMRON Corporation SYSBUS Wire System Type SD SHARP Corporation Satellite I/O Link System ADDRESS NO. STATION NO.