Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base).

Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base).

Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base).

Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base).

Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base).

Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base).

Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base).

Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base).

Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base).

Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base).

2

to 0.2 MPa setting G36-4-01-L G46-4-01-L Note 1) Assembly of a bracket and set nuts Note 2) in round pressure gauge part numbers indicates a pipe thread type.

CATALOG

P L U G VQ 1 2 4 0 1 B L O C K VA LV E 23 04 06 08 01 03 07 Courtesy of Steven Engineering, Inc. !

ZP

1 1000 V = D 2 x L x (L) For the conductance, the equivalent conductance can be found in 8.

ZP

1 1000 V = D 2 x L x (L) For the conductance, the equivalent conductance can be found in 8.

Table of Contents

NPT thread Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32 1/4 5/16 3/8 1/2 From One-touch fitting to male thread B Bushing type AKB 01 A 01 S With seal (Standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction Female/Male

AC

Y60 Interface G36-10-01 G36-10-01G46-10-02 G46-10-02 G46-10-02 G46-10-02 G46-10-02 G36-10-01 1.0MPa G27-10-R1 Pressure gauge (G27-10-R1)(4) G36-2-01 G36-2-01 G46-2-02 G46-2-02 G46-2-02 G46-2-02 G46-2-02 G36-2-01 0.2MPa AD43 AD43 AD44 AD44 AD44 AD44 AD44 N.O.

Table of Contents

01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-01-01 ZH05BL-01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 57 12 3.2 31.5 Rc 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 60 12 3.2 33.5 5.8 2

ZP

1 1000 V = D 2 x L x (L) For the conductance, the equivalent conductance can be found in 8.

Table of Contents

Model Model L D L D TCU0805-1-N-X6 TCU0425-1-N-X6 1 N x 8 31 3 to 90 L x 5.2 + 200 N x 4 18 1 3 to 90 L x 5.9 + 200 8 5 TCU0805-2-N-X6 TCU0425-2-N-X6 2 42 3 to 40 L x 3 + 200 N x 16 L x 4.4 + 200 N x 8 2 3 to 90 4 2.5 28 TCU1065-1-N-X6 TCU0425-3-N-X6 1 52 3 to 45 L x 5 + 200 N x 10 N x 12 3 3 to 63 L x 2.9 + 200 28 10 6.5 TCU1065-2-N-X6 TCU0604-1-N-X6 2 3 to 35 N x 20 52 L x 3 + 200 N x 6

Proposals for Energy Saving

Model Description AR1000 AR2000 B220 AR2500 B320 AR3000 B420 AR4000 AR4000-06 B640A Note 3) AR5000 AR6000 Bracket B120 B220 B420 B640A Note 3) Note 1) Note 2) G36-10-01 G36-10-01 G46-10-02 G46-10-02 G46-10-02 G46-10-02 G27-10-R1 1.0MPa G36-10-01 Pressure gauge 0.2MPa (G27-10-R1) G36-2-01 G36-2-01 G46-2-02 G46-2-02 G46-2-02 G46-2-02 G36-2-01 Auxiliary Pneumatic Equipment Air Preparation Equipment