CJ2

Component Parts No. q w e r t y u i No. o !0 !1 !2 !3 !4 !

VM

VH421-02 to 06 VH431-02 to 06 3 (Exhaust center) Rc 3/4: 58 2 position 3 position 3 4 2 1 Flow direction 4(B) 90 45 45 Flow direction 2 (A) Flow direction 4(B) Flow direction 2 (A) VH422-02 to 06 VH432-02 to 06 2 (Position) N Rc 3/4: 185 1 2 VH6 VH600-06/10 9.7 3 (Exhaust center) 3/4, 1 Rc 1: 194 3 4 5-8-7 2 Series VH How to Order VH 2 0 1 02 1(P) port location Hand valve R L 1(P) port 180

AR20-B to AR60-B

Note 3) 0.02 to 0.2 MPa setting G36-4-01-L G46-4-01-L gauge embedded type Standard GC3-10AS [GC3P-010AS (Pressure gauge cover only)] Square Note 4) 0.02 to 0.2 MPa setting GC3-4AS [GC3P-010AS (Pressure gauge cover only)] NPN output: Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] Digital pressure switch Note 5) NPN output: Wiring top entry ISE35-R-25-MLA [ISE35-R-25-

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

In the case of liquid: P Q = 1.9 x 106Av (9) G Q : Flow rate [l/min] Av : Flow coefficient [m2] P : Pressure difference [MPa] G : Relative density [water = 1] In the case of saturated aqueous vapor: Q = 8.3 x 106Av P(P2 + 0.1) (10) Q : Flow rate [m3/s] Av : Flow coefficient [m2] P : Pressure difference [Pa] P1 : Relative density [MPa]: P = P1 P2 P2 : Relative density [MPa] Front matter 4

Series KV2 Fittings

Union 90 Elbow KV2L_ _-00 D2 D1 Applicable Tube M L Q D1 D2 M L App. Tube OD (inch) Q M Min. Flow Dia.

RZQ

RB RA W 4-O1 T Section a-a' Basic style (Through-hole): RZQB 2-RR 50, 63 Flat washer (Included) 4-HR 2-RR Flat washer (Included) b 2-N 4-O 4-N b' Section b-b' (mm) Bore size (mm) A B C D FB G H I J K L M N O1 O P Q RA RB RR RH T W E FA Z 32 100.5 82.5 14 22.4 12.5 9 M8 x 1.25 60 4.5 17 18 34 5.5 M6 x 1.0 9 Rc1/8 24.5 14 10 5.5 7 4.5 49.5 45 33 14 40 110 92 16 28 52 35 14 9 M10 x 1.5 69 5

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

4 @2 !3 w @4 @3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !6 !7 !8 !1 @1 !2 q @0 u !8 !7 MSQAA (High precision type) !9 e r Component Parts Description Material Description Material No. q w e r t y u i o !0 !1 !2 !3 !4 No.

LX

4 L-M6 C 4H9 Refer to Cross section C-C.

Rotary Table/

4 @2 !3 w @4 @3 !6 !7 !8 !1 @1 !2 q @0 u !

39

M N O P Q J K L M N O P Q Part no.

Vacuum Pad

] D : Piping diameter (mm) L : Length from ejector and switch valve to pad (m) V : Piping capacity from ejector and switching valve to pad (L) Q2: Max. flow from ejector and switching valve to pad by piping system Q2 = C x 55.5 L/min [ANR] Q : Smaller one between the Q1 and Q2 L/min [ANR] C : Conductance of piping [dm3/(sbar)] Adsorption response time T2 = 3 x T1 Piping capacity 3.14 4 1

ARM10/11

block gauge pressure supply block L side L side switch block Nil A B C D E F G H J K L M N O P Q R F.R.L.

ARM10/11

block gauge pressure supply block L side L side switch block Nil A B C D E F G H J K L M N O P Q R F.R.L.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Description Body class Symbol Bracket assembly LQ-GBL J, K 1, 2 J type K type 1, 2, 3, 4, 5, 6 L, M L type M type (for short piping) Table 1 Tubing size symbols Part No. Description Replacement parts Tubing O.D.

Slider Type Ball Screw Drive/11-LEFS Series

upper limit Suction flow rate: 0 L/min 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] LAT Suction flow rate: 20 L/min ISO Class 5 upper limit LZ 10 10 LC3F2 Suction flow rate: 40 L/min ISO Class 4 upper limit ISO Class 4 upper limit 1000 1000 Suction flow rate: 20 L/min Suction flow rate: 50 L/min 100 100 Suction flow rate: 30 L/min 10 10 1 1 0 0.1 0.6 0.5

SL5200

MPa -0.1 to 1.1 MPa 0 to 1.4 MPa 0 to 3 MPa V3 L 1 H 2 4 Sample Order Number Port w q w q w q SL5802S e q FV4 FV4 FV4 FV4 w FV4 FV4 FV4 FV4 r 2PW 3PW 3PW 4PW 0 V3 V3 MPA MPA 2PW 3PW 4PW 1 1) Other range available.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Shock absorber Port variations R L R L Tighten the four unit fixing bolts equally to secure the unit body. R R R R L L L L R L R L L R Slide table operating direction 8-14-26

VEX1

, with lead wire L plug connector, without lead wire L plug connector, without connector M plug connector, with lead wire M plug connector, without lead wire M connector, wihtout connector DlN connector 1 8 1 4 1 4 3 8 1 2 1 2 3 4 12 L LN 12 LO 32 M 32 MN MO 50 D 1 1 DO DlN terminal, without connector 1 4 11 4 70 G Grommet, 300mm lead wire 1 H 50 Grommet, 600mm lead wire 11 4 2 90 70 E Grommet

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Nil C 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min 04 20 40 The cable and connector are shipped unassembled.

Cylinder with Lock Series MNB

mm) N S U V T P J MM GR GE GF K L Q RR H VA W Z ZZ 32 27 154 13 6.5 34 1/8 10.5 M6 x 1.0 M10 x 1.25 4 88.5 18.3 6 23 37 47 13 6.5 224 234.5 40 27 161 13 8 39.5 1/4 11 M6 x 1.0 M14 x 1.5 4 96.5 19.5 6 23 41.5 51 16.5 9 235 246 50 31.5 183 17 9 47 1/4 15 M8 x 1.25 M18 x 1.5 5 111.2 22.4 7 30 47.5 58 20 10.5 271 286 63 31.5 197 17 8.5 55.5 3/8 15 M8 x 1.25 M18 x 1.5 9 123.5 20.7 7 30 55 58 23