CEx-OMQ0010

j k L 2. 7. 8. 1. 9. 2. 10. 11. ()70% ()35% 1. 15% 1. 2. 3 3. () 1. 0.1~1.0MPa 0.3~0.5MPa 0~60 ()35% 2. ) 1. 1. 2. 2. 3. 1. 1. ( 2. 6 ) 3. 2. 50% 4. (6 ) 3. 5. 4. () 0.5 5. 1 2 3. F.G. 1. 4. 1 ISO VG32 1. 2. 1. 2. 3. 1. 2 1. 2. 2. 14.5mT CE2 1.5~2 15,000 18cm 3. 4. IP65 5.

LC6D/LC6C

LJ1 LG1 LC1 LX LC6D/LC6C Switches LC6C Power Connector Cable LC6D Connector Cable Model LC6-1-C2--X252 Model LC6-1-C1--X258 Electric actuator LC6D Electric actuator LC6C Cable length 1 1m 3 3m 5 5m Cable length 1 1m 2 2m 5 5m Power connector Cable length: 1 to 5m Motor cable b Cable length: 1 to 5m 13 12 11 10 6 5 4 3 2 1 a Motor cable 7 13 12 11 10 9 8 6 5 4 3 2 1 Switch cable 14 15 16 17

ZSE F/ISE

1 min, between all lead wires and enclosure 2 M or more (at 50 VDC) between all lead wires and enclosure 10 to 500 Hz with 1.5 mm amplitude or 98 m/s2, whichever is smaller 980 m/s2 in X, Y, Z directions 3 times each (Not energized) 3% F .S. or less of measured pressure at 25C in temperature range of 0 to 50C Pressure receiving area: Stainless steel 630, Fittings: Stainless steel 304 02:

q"s

models are not Applicabl model Specitications 6 E Sel orergur max. 0.1 MPa ,o o Sel pressure ma-x. 0.5 MPa 3 o o Set pressure max. 0,9 MPr 5 O_l o Connection Rc 1/4 02 o o, Connection Rc 3/8 03 r) o Connectlon Rc 'l12 o4 o Bracket B O ,l Brackel c c :l: 6 A Connection NPTI/4 N02 _l ., connection NPT3/8 N03 C c co$nection NPT1/2 N04 a) Connection G 1/4 F02 o ll Connection G 3/8 F03 C al Connection

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

s 1 x 10 -10Pam3/s 1MPa 1MPa 100kPa 100kPa Rated pressure range 0 0 0 0 -100kPa -100kPa Output Switch output 2 outputs NPN or PNP Analog output Output voltage 1 to 5V Features 2 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 How to Order M ISE50 02 22 L For positive pressure ZSE50 02 M F L 22 For compound pressure Piping specifications Option 02 T2 G2 R 1/

PSxx-OMM0002CN

JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: 2) : : : 1. 2. 3. 1. 2. 3. 4.

REC

Reed switch Solid state switch Relay, PLC 100 V, 200 V Yes Connector Terminal conduit DIN terminal Grommet 12 V 2-wire 24 V PLC Relay, PLC 100 V, 200 V Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC circuit Grommet 2-wire 12 V Connector IC circuit 3-wire (NPN) 2-wire Terminal conduit 5 V, 12 V Relay, PLC Yes 24 V 12 V 3-wire (NPN) 3-wire (PNP)

Quick Exhaust Valve Series AQ 1

30 to 60C) 1 4 8 3 Note) AQ1500 and AQ1510 are not available. 3 4 Type Port size Symbol 0 5 Type Applicable model Diaphragm Lip AQ2 to AQ5 AQ1 Only Port size Applicable series M5 01 02 03 04 06 M5 x 0.8 AQ1500 AQ1510/2000 AQ2000/3000 AQ3000 1 8 Standard 1 4 0 1 M5 x 0.8 8 3 1 8 Note) AQ150 only 1 2 AQ5000 3 4 Thread type Metric thread (M5) Rc NPT G Nil N F Caution Be sure to read before handling

3 Port Air Operated Valve Series SYJA300 1

(R) 1 (P) 3 (R) Pilot pressure (MPa) Pilot pressure range 0.5 N.C.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

(mm) Note) Type 04 06 08 10 12 4 6 8 10 12 Port size Elbow Universal 2 3 01 02 03 04 R 1/8 R 1/4 R 3/8 R 1/2 Made to Order (For details, refer to page 659.) Control type Note) For applicable tubing O.D. selection, refer to the Model.

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

Bore size With One-touch fitting U01 U02 U03 U04 1 8 1 4 3 8 1 2 Needle Valve/Flow Characteristics AS2201F-01, AS2211F-01 AS2301F-01, AS2311F-01 AS2201F-02, AS2211F-02 AS2301F-02, AS2311F-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (/min (ANR)) Flow rate (/min (ANR)) Effective area (mm2) Effective area (mm2) Number of needle rotations Number of needle rotations AS3201F, AS3211F

Related Products

Large effective area Low power consumption 1/4 67 111 31 55 40 64 (Max. 73) AVL2000-*02 Manual/Manual solenoid lock out Modular design 1/4 67 20.5 111 31 55 34 40 64 (Max. 73) AVL2000-*02-*DZM 3/8 76 118 36 57 48 64 (Max. 73) AVL3000-*03 How to Order 3/8 76 12.5 118 36 57 34 48 64 (Max. 73) AVL3000-*03-*DZM 1/2 98 133 47 61 52 64 (Max. 73) AVL4000-*04 G 20 00 F DZM R 5 02 AVL 1/2 98

Booster Relay Series IL100

3 o !3 q !8 !6 IN2 OUT2 !8 !7 !6 o IL220 !3 r e !2 w u y i !9 !5 @1 OUT IN1 !1 q @2 @0 IN2 !4 q Component Parts Replacement Parts No. Description Material Note 1 Body Aluminum alloy Silver baking finish Model Order no. Contents IL201 KT-IL201 Set of left nos. u, i, o, !2, !3, !6, !7, !8, !9 IL211 KT-IL211 Set of left nos. u, i, o, !0, !2, !3, !6, !7, !8, !

VHS

VHS400-02 VHS401-02 VHS400-03 VHS401-03 VHS400-04 VHS401-04 Pipipng direction VHS500-06 VHS501-06 SA Right IN1 (P) 3 4 1 2 3 8 1 4 Port size Effective area (mm2) Weight (kg) VA 1 (P) 2 (A) 21 105 76 54 35 35 57 93 2 (A) 3 (R) SA 0.25 0.34 Left or right to the front face of the handle.

Quick Exhaust Valve Series AQ

30 to 60C) 1 4 8 3 Note) AQ1500 and AQ1510 are not available. 3 4 Type Port size Symbol 0 5 Type Applicable model Diaphragm Lip AQ2 to AQ5 AQ1 Only Port size Applicable series M5 01 02 03 04 06 M5 x 0.8 AQ1500 AQ1510/2000 AQ2000/3000 AQ3000 1 8 Standard 1 4 0 1 M5 x 0.8 8 3 1 8 Note) AQ150 only 1 2 AQ5000 3 4 Thread type Metric thread (M5) Rc NPT G Nil N F Caution Be sure to read before handling

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

Port size ASV Model M3 x 0.5 ASV120F-M3 0.3 0.3 AK M5 x 0.8 ASV220F-M5 1.3 1.3 R 1/8 ASV310F-01 8 7 ASS R 1/4 ASV310F-02 8 7 R 1/8 ASV410F-01 14 13.5 ASR R 1/4 ASV410F-02 14 13.5 R 3/8 ASV410F-03 14 13.5 ASF R 1/4 ASV510F-02 27 23 R 3/8 ASV510F-03 29 27 R 1/2 ASV510F-04 29 27 10-32 UNF 1.3 1.3 ASV220F-U10/32 NPT 1/8 ASV310F-N01 8 7 NPT 1/4 ASV310F-N02 8 7 NPT 1/8 ASV410F-N01 14 13.5 NPT 1

PSxx-OMG0005CN

1. 2. 3. 4

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate

Regulator for 2 MPa ARX 20

Regulator for 2 MPa ARX 20 How to Order ARX2 0 01 Regulator Options None Nil 1348112 G36 10 01 G46 10 02 G36 4 01 G46 4 02 G36 P10 N01 G46 P10 N02 G36 P4 N01 G46 P4 N02 1348110A B Regulating pressure range Bracket 0.05 to 0.85MPa 0.05 to 0.30MPa 0 1 ARX20 Nil F ARX21 Nil F Thread type G Pressure gauge Rc NPT G Nil N F ARX20N ARX21N P Port size Panel nut 1/8 1/4 01 02 Option

Speed Controller with Residual Pressure Release Valve: Standard Type Series AS



E In-line Type (Metal Body) 1

Free flow Controlled flow Model Applicable cylinder bore size (mm) Effective area (mm2) Weight (g) Port size Flow rate (/min (ANR)) Flow rate (/min (ANR)) Flow rate (/min (ANR)) AS2000E-01 AS2000E-02 AS3000E-02 AS3000E-03 AS4000E-02 AS4000E-03 AS4000E-04 90 1/8 1/4 1/4 3/8 1/4 3/8 1/2 340 5.2 250 3.8 20, 25, 32, 40 115 32, 40, 50, 63 810 12.3 810 12.3 130 40, 50, 63 80, 100 1670 25.5 1670