Vacuum

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SMC Pneumatic Clean Series

MM 2-LC LX D D I LZ 20, 25 Width across flats B2 Standard port MM Relief port 45 45 Width across flats NA LT N 4-LD N X Y S + Stroke X Y Z LS + Stroke Z + Stroke ZZ + 2 x Stroke 32, 40 (mm) 11 8 8 8 Z H H2 H1 S P N I F A 13 8 AL D K MM NA NN B1 B2 G 54 47 47 40 B ZZ 188 154 152 144 LX 55 40 40 40 LH 30 28 28 25 LT LS LD 4 4 4 4 LC 75 55 55 55 LZ X Y 40 32 25 20 Bore size 1/8 27 25 25 21 24

Shock Absorbers and Rate Controls

70-&' r q.oo 3, 24.4 l z.9 -3r 5l 25 ,{ 25 N/A 14.3 L45 300 e.60 -g' r 2.rof're.oo t? 25.4 12.9'3r ) t 25 25 PM2050g[(S] 306 l9.0fdo ?

HRX-OM-X084

Model number Serial number Type and quantity of refrigerant How to read the serial number y R 001 April 2020 W R 001 Year Symbol Remarks Month Symbol Remarks Serial no. 4 R Repeated from O to Z in alphabetical order, with O for January and Z for December 2020 y 2021 Z 5 S Repeat ed from A to Zin alphab etical order 2022 A 6 T Fig 1-1 Position of product label HRR Series 1.4 Product Label

VFR

How to Order Sub-plate Assembly System Components System Solenoid valve Speed controller Silencer Tube bore x Length Pilot type Nil R External pilot Internal pilot AS2000-01 (S = 2.5 mm2) AN110-01 (S = 35 mm2) AS3000-02 (S = 12 mm2) AN110-01 (S = 35 mm2) AS3000-02 (S = 12 mm2) AN110-01 (S = 35 mm2) AS4000-02 (S = 21 mm2) AN110-01 (S = 35 mm2) AS4000-02 (S = 21 mm2) AN110-01 (S = 35 mm2) T0425

HRX-OM-X071

Displays only when the maint / 123 Electric conductivity ( S/cm) RESET DIPV / 1In the case of option Z, Z1, non-display. 2 400V type only 3 Option DM only.

MGG

C 4-O D Q 2-P T U W E S K L B AA A X AB I J R AP Y + Stroke V Z + Stroke Non-locking type Locking type 8-AF AC AD AE With rod side locking Q Y + Stroke R With head side locking For standard strokes Dimensions not marked with an "" are the same as standard.

XM, XY

M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) Nil XL H0 Solid state auto switch y Number of auto switches/Detecting position XLQ Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

0 Driver type*6 Nil Without option B With lock Nil Without cable S Standard cable R Robotic cable (Flexible cable) Compatible driver Power supply voltage [V] Nil Without driver A1 LECSA1-S 100 to 120 A2 LECSA2-S 200 to 230 B1 LECSB1-S 100 to 120 B2 LECSB2-S 200 to 230 C1 LECSC1-S 100 to 120 C2 LECSC2-S 200 to 230 S1 LECSS1-S 100 to 120 S2 LECSS2-S 200 to 230 11LEJS 11LEJS 25Au Vacuum port

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Light/Surge voltage suppressor Applicable model A VZ3000 VZ5000 Series Series VZ1000 ARBZ3000-00-P Nil None Z With light/surge voltage suppressor C S With surge voltage suppressor Indicator light is not available for grommet type.

3

AB B MK MK Basic (mm) MK2T A B C D E F Yh9 G 45 52 64 77 H 16 16 20 20 I 9 9 11 14 J 7 7 8 10.5 K M6 x 1.0 M6 x 1.0 M8 x 1.25 M10 x 1.5 L 10 10 14 18 S 31.5 29 34 34.5 T 10.5 9 11.5 10.5 W 14 15 19 19 X 3 3 3.5 3.5 Z 6.5 6.5 7.5 7.5 AA 4.5 5 7 7 AB 1 1 1 1.4 AC 5.5 5.5 6.6 9 AE 1/8 1/8 1/4 1/4 Model 30 30 37 48 MKB32-Z MKB40-Z MKB50-Z MKB63-Z 0 0.062 0 0.062 0 0.062 0 0.062 49.5 57 71 84

Compact

. 600 0.51000(0.4 + 0.4) 1000 LEC = T1: Acceleration time [s] Time until reaching the set speed LEC S = 0.2 [s] T1 = V/a1 [s] T3 = V/a2 [s] T4 = 0.3 [s] T2: Constant speed time [s] Time while the actuator is operating at a constant speed T3: Deceleration time [s] Time from the beginning of the constant speed operation to stop T4: Settling time [s] Time until positioning is completed LEC

SYJ300/500/700

VS VFN X port (External pilot) M5 x 0.8 A port 1/8, 1/4 4-4-37 38 Series SYJ700 How to Order Light/Surge voltage suppressor Rated voltage Electrical entry for G, H, L, M and W Electrical entry for D Nil Without light/surge voltage suppressor Nil Without light/surge voltage suppressor DC S Z R U With light/surge voltage suppressor (Non-polar type) S Z With surge voltage suppressor With surge

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

2.2 For rail mounting (mm) F Model AA Z S M J H MXP6-5 2 45 5 37 33.5 38 25 MXP6-10 9.5 60 10 47 48.5 53 35 8-8-15 15 Series MXP Dimensions: MXP10 2-M3 x 0.5, depth 3 Z 3 Metal stopper 2-M3 x 0.5, depth 5 V K 5 4 G Max. 5.5 Max. 3.5 N 20 M Stroke: S MXP10-10 A Piping port Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

TDe8 TT TX TY TZ Without rod boot With rod boot (One side) (Both sides) H Z ZZ e f h l Z ZZ Z ZZ 40 M14 x 1.5 27 1/4 42 11 20 45 153 15 0.032 0.059 22 85 62 117 51 162 255 43 11.2 59 1/4 stroke 170 263 170 271 50 M18 x 1.5 30 3/8 46 10 21 50 168 15 0.032 0.059 22 95 74 127 58 181 284 52 11.2 66 1/4 stroke 189 292 189 300 63 M18 x 1.5 31 3/8 48.5 13 23 60 182 18 0.032 0.059 28 110 90 148 58

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Bore size A B C CD (cd) CX CZ D GA GB H MM NA NB R S U Z ZZ 10 15 12 14 3.3 3.2 12 4 8 18 28 M4 x 0.7 12.5 22.5 5 46 8 82 87 16 15 18.3 20 5 6.5 18.3 5 8 23 28 M5 x 0.8 12.5 27.5 8 47 10 85 93 6 Smooth Cylinder Double Acting, Single Rod Series CJ2Y Dimensions CJ2Y-Z CM2Y-Z CG1Y-Z MBY-Z CA2Y-Z CS2Y CQSY CQ2Y-Z CJ2X-Z CM2X-Z CQSX CQ2X CUX Double-side bossed (E) CJ2YE Bore size Stroke Z NDh8

ISO Standard Hydraulic Cylinder

Air release Rod side cushion valve Rod side air release B A S S NB TY TY ZZ + Stroke S + Stroke TX M H TZ Stroke range Bore size (mm) V SS BB J K C P F NB A G M MM NA PJ B D E GA GB H MA TD TX TZ S Y Z ZZ 32 54 25 to 800 44 45 33.2 35 12 M6 x 1 7.5 M14 x 1.5 56 45 68 103 5.5 128 153.5 7 1/4 12 23 18 14 46 18 30 43 15 16 60 -0.016 -0.043 40 57 25 to 800 61 63 41.7 37 18 M8 x 1 10 M16 x 1.5

Cylinder with Lock

Step M z Precautions on Model Selection Caution Specific Product Precautions Working Principle Find the maximum load speed: V [mm/s] from the load movement time: t [s] and the movement distance: st [mm]. 1.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Piston speed mm/s Piston speed mm/s Piston speed mm/s Technical Data 1207 Mechanically Jointed Rodless Cylinder Linear Guide Type MY1H Series 25, 32, 40 RoHS How to Order M9BW 25 300 MY1H Z Linear guide type Linear guide type Made to Order Refer to page 1209 for details.

High Vacuum Angle Valve

D-M9N(M)(L)(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.