MXU

of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-X 20Data (mm) Stroke (mm) 5 10 15 20 25 30 TS Z S NS LS BS 52.5 53 41.5 14 14 10 57.5 58 46.5 14 19 14 62.5 63 51.5 24 25 18 67.5 68 56.5 24 30 24 75.5 76 64.5 34 40 32 79.5 80 68.5 34 45 35 8-3-7 8 Series MXU Dimensions

SZ3000

SD RD 24 V OV VCAM FG CAM Vt BS+ BDH BDL BSFG 24 V 0 V 24 V 0 V +24V 24G DA DB DG FG Description Description Description LED LED LED PWR. Light ON with transmission power input, light Off without it Green light ON with circuit power input PWR.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

+ BDL BS24V 0V BDH BS+ BDL BS24V 0V 24V Master unit SI unit SI unit DG DB DA DG DB DA DG DB DA Master Connector with terminating resistance VSLD FG FG FG BDH CANL BDL FG CANH Class 3 ground Class 3 ground Class 3 ground Crimped connectors for junction Twisted pair with shielding V+ Terminating resistor 30 Cassette Type Manifold Series SZ3000 SI unit part numbers Symbol Specifications Part

MU

SMU50, #1 (#1+#11) MUB63 SMU63, #1 (#1+#11) (mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 Model MUB25 MUB32 MUB40 MUB50 MUB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27 BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET M5 X 0.8Depth11 M6 X 1Depth11 AL 19.5 23.5 27 32 32 BS

MXU

35 8-3-7 8 Series MXU Dimensions: MXU16 (mm) Stroke (mm) 5 10 15 20 25 30 TS Z S NS LS BS 65.5 66 52 24 24 20 65.5 66 52 24 24 20 75.5 76 62 34 35 30 75.5 76 62 34 35 30 85.5 86 72 40 45 40 90.5 91 77 40 50 45 8-3-8 9 Compact Slide Series MXU Construction MXU6 (6) MXU10 (10) MX MTS MY CY MG CX MXU16 (16) D-X With auto switch 20Data Component Parts No. q Note Hard anodized No. !

SZ3000

SD RD 24V OV VCAM FG CAM Vt BS+ BDH BDL BSFG 24V 0V 24V 0V +24V 24G DA DB DG FG LED name LED name LED name PWR Content Content Content Green light turns on when line power is input Turns on during supply of communication power, turns off when there is no input Turns on during supply of communication power, turns off when there is no input PWR PWR Light off: When unit is off-line or power

The cost effective and clean looking AC series allows you to pick a combination of modular style air preparation equipment that best suits your needs. The series, available in 8 size options to ensure optimum performance, offers energy savings, with higher flow rates. Simple assembly and maintenance reduces downtime. Pressure relief, 3 port valve, Accessory for AC series, Body sizes: 1/

7

CK1 CK1 45 CLK2 Clevis pin 6 60 9 CLKG 12 60 48 CKQ CLKQ Pedestal CK CLK KZZ KL2 KY KS CKQ Pedestal 15 80 K 35 45 50 30 95 KL1 16 5 50 KC 15 KX 25 34 KZ 57 Material: Rolled steel Unit: mm KZZ CKG50 CKP50 CKG63 CKP63 Option symbol Applicable clamp cylinder K CKG40 CKP40 KL1 KL2 KS KX KY KZ KC Part no.

CLK1

Pedestal KZZ KL2 KY KS 95 80 15 50 30 KQ 35 45 KC 50 5 25 KX KL1 57 34 16 15 KZ KZZ KL1 KL2 KX KZ KY KS KQ KC Type Applicable cylinder Bore size 50 63 40 CKA40-40-209A CLK1A40-75Y, CLK1A50-75Y, CLK1A63-75Y 402.5 406 398 167 75 132 222 35 69 59 0 70 CKA40-40-210A CLK1A40-100Y, CLKA50-100Y, CLK1A63-100Y 437.5 441 433 177 75 142 232 45 83 58 0 90 CKA40-40-211A CLK1A40-150Y, CLK1A50-150Y, CLK1A63

Clamp Cylinder with Lock Series CLK1

Pedestal KZZ KL2 KY KS 95 80 15 50 30 KQ 35 45 KC 50 5 25 KX KL1 57 34 16 15 KZ KZZ KL1 KL2 KX KZ KY KS KQ KC Type Applicable cylinder Bore size 50 63 40 CKA40-40-209A CLK1A40-75Y, CLK1A50-75Y, CLK1A63-75Y 402.5 406 398 167 75 132 222 35 69 59 0 70 CKA40-40-210A CLK1A40-100Y, CLKA50-100Y, CLK1A63-100Y 437.5 441 433 177 75 142 232 45 83 58 0 90 CKA40-40-211A CLK1A40-150Y, CLK1A50-150Y, CLK1A63

The cost effective and clean looking AC series allows you to pick a combination of modular style air preparation equipment that best suits your needs. The series, available in 8 size options to ensure optimum performance, offers energy savings, with higher flow rates. Simple assembly and maintenance reduces downtime. Pressure relief, 3 port valve, Accessory for AC series, Body sizes: 1/8

The cost effective and clean looking AC series allows you to pick a combination of modular style air preparation equipment that best suits your needs. The series, available in 8 size options to ensure optimum performance, offers energy savings, with higher flow rates. Simple assembly and maintenance reduces downtime. Pressure relief, 3 port valve, Accessory for AC series, Body sizes: 1/8

1

) 2 x 5.5 Without spacer With spacer 2 x M5 thread depth M 15 15 Spacer Grommet: GS Flat terminal: F Conduit: C 280 G F F G 11 300 G F Terminal part Flat terminal connector 11 23 9 H C 15 6.5 H C H C G1/2 Terminal: T DIN terminal: D F G Applicable cable O.D.: 6 to 12 F G Width across flats 22 G1/2 32 (44) H 31.5 25 C H C G1/2 J J Dimensions [mm] Model A B Bs C D E F L M P [inch] Grommet:

MLU

+ Stroke BA 2-BT (mm) Stroke range Model A BY D GW GY H H1 B1 C B AL BA BB BP BS BT ET GA GA1 GB GC GC1 EY 22 26 30 35 19.5 23.5 27 32 24 28 32 39 8 6.5 9 12 9 6.5 8 10 17 19 22 27 MLUB25 MLUB32 MLUB40 MLUB50 M5 x 0.8 73 87 87 102.5 M5 x 0.8 depth 7.5 M6 x 1 depth 12 7 8 9 9 12 14 16 20 M5 x 0.8 depth 11 M6 x 1 depth 11 45 50.5 53 62 45 51.5 53 62 10 8.5 9 11.5 15.5 17.5 18.5 23 32.5 37

Fieldbus system Ethernet POWERLINK compatible SI unit

BS Displays the Communication status. BE Displays the Communication error L/A1 Displays the communication status of the BUS IN side. L/A2 Displays the communication status of the BUS OUT side. ST(M)-LED LED display Content OFF The power supply for control and input is OFF. Green ON Normal operation. Diagnostic error of I/O unit is detected.

Plate Cylinder with Lock Series MLU

+ Stroke BA 2-BT (mm) Stroke range Model BY C D GW GY H H1 B AL BA BB BP BS BT ET GA GA1 GB GC GC1 EY A B1 22 26 30 35 19.5 23.5 27 32 24 28 32 39 8 6.5 9 12 9 6.5 8 10 17 19 22 27 M5 x 0.8 73 87 87 102.5 M5 x 0.8 depth 7.5 M6 x 1 depth 12 7 8 9 9 12 14 16 20 M5 x 0.8 depth 11 M6 x 1 depth 11 45 50.5 53 62 45 51.5 53 62 10 8.5 9 11.5 15.5 17.5 18.5 23 32.5 37 38.5 43 2.5 0 0 6 5 5.5 7 8

Dedicated Controller Series LC1 Uniaxial Type

Interactive input display Programming with the same language as PC software ACTUATOR & CONSTRUCTION SYSTEM L c /BS HOLD STOP CONTROLLER POWER ALARM L R UP ENT DOWN /ESC MODE Able to execute operations such as programming, test runs and parameter changes, which up until now have been performed from a PC.

Air Pilot Operated Series NVSA

Op onal pitot connction In junctlon box and laroe lapped junction box cover allow looic control tubes to bs run Into the,unction box through electricat conduiir alJ hose usd as conduit, lhus avoidlng exposd control tubes. Junclion box i9 splash-proof and o -tight.

Air Cylinder NCX2 Series Slide Unit

B -With shock absorbers BC -With Cap type shock absorbers BS With one shock absorber BCS -With one Cap type shock absorber Type N-Non-lube type H Air-hyd ro type (except sl0) Special order only clffi3xr -tI I ytinaerl Switch/Housing r Switch/End plate With Auto Switch Capability ffiK] "*t* --T"* Nc lw t f l l n ' l x2 | *o"o twltch sufiix | -2 pcs. ] s-t nc' .Auto

High Vacuum Angle Valve, XL Series

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K