Pipe Port Type: One-Touch Pipe, Rod Arm Type: -, Mounting Method: Side, Plunger Type: One-Way Motion Roller Lever, Body Shape: Block Vertical Type, Number of Ports: 2-Port, Push Button Type: -, Plumbing Type & Direction: Direct Side, Connecting Tube Diameter: φ4, Number of Switching Positions: 2-Position Normally Closed, Switching Operation: Plunger, Valve Flow Coefficient (Cv)(mm2): 0.93

Pipe Port Type: One-Touch Pipe, Rod Arm Type: -, Mounting Method: Side, Plunger Type: -, Body Shape: Block Vertical Type, Number of Ports: 2-Port, Push Button Type: Flat Top, Plumbing Type & Direction: Direct Side, Connecting Tube Diameter: φ4, Number of Switching Positions: 2-Position Normally Closed, Switching Operation: Push Button, Valve Flow Coefficient (Cv)(mm2): 0.93, Total travel

Pipe Port Type: One-Touch Pipe, Rod Arm Type: -, Mounting Method: Side, Plunger Type: -, Body Shape: Block Vertical Type, Number of Ports: 2-Port, Push Button Type: Flat Top, Plumbing Type & Direction: Direct Side, Connecting Tube Diameter: φ4, Number of Switching Positions: 2-Position Normally Closed, Switching Operation: Push Button, Valve Flow Coefficient (Cv)(mm2): 0.93, Total travel

Pipe Port Type: One-Touch Pipe, Rod Arm Type: -, Mounting Method: Side, Plunger Type: -, Body Shape: Block Vertical Type, Number of Ports: 2-Port, Push Button Type: Flat Top, Plumbing Type & Direction: Direct Side, Connecting Tube Diameter: φ4, Number of Switching Positions: 2-Position Normally Closed, Switching Operation: Push Button, Valve Flow Coefficient (Cv)(mm2): 0.93, Total travel

Pipe Port Type: One-Touch Pipe, Rod Arm Type: Spring Rod, Mounting Method: Side, Plunger Type: -, Body Shape: Block Vertical Type, Number of Ports: 2-Port, Push Button Type: -, Plumbing Type & Direction: Direct Side, Connecting Tube Diameter: φ4, Number of Switching Positions: 2-Position Normally Closed, Switching Operation: Rod Arm, Valve Flow Coefficient (Cv)(mm2): 0.93, Total travel /

Pipe Port Type: One-Touch Pipe, Rod Arm Type: Spring Rod, Mounting Method: Side, Plunger Type: -, Body Shape: Block Vertical Type, Number of Ports: 2-Port, Push Button Type: -, Plumbing Type & Direction: Direct Bottom, Connecting Tube Diameter: φ4, Number of Switching Positions: 2-Position Normally Closed, Switching Operation: Rod Arm, Valve Flow Coefficient (Cv)(mm2): 0.93, Total travel

Pipe Port Type: One-Touch Pipe, Rod Arm Type: -, Mounting Method: Side, Plunger Type: Roller Lever, Body Shape: Block Vertical Type, Number of Ports: 2-Port, Push Button Type: -, Plumbing Type & Direction: Direct Bottom, Connecting Tube Diameter: φ4, Number of Switching Positions: 2-Position Normally Closed, Switching Operation: Plunger, Valve Flow Coefficient (Cv)(mm2): 0.93, Total travel

Pipe Port Type: One-Touch Pipe, Rod Arm Type: -, Mounting Method: Side, Plunger Type: -, Body Shape: Block Vertical Type, Number of Ports: 2-Port, Push Button Type: Flat Top, Plumbing Type & Direction: Direct Bottom, Connecting Tube Diameter: φ4, Number of Switching Positions: 2-Position Normally Closed, Switching Operation: Push Button, Valve Flow Coefficient (Cv)(mm2): 0.93, Total travel

Pipe Port Type: One-Touch Pipe, Rod Arm Type: -, Mounting Method: Side, Plunger Type: -, Body Shape: Block Vertical Type, Number of Ports: 2-Port, Push Button Type: Flat Top, Plumbing Type & Direction: Direct Bottom, Connecting Tube Diameter: φ4, Number of Switching Positions: 2-Position Normally Closed, Switching Operation: Push Button, Valve Flow Coefficient (Cv)(mm2): 0.93, Total travel

Rated Distance Range: 0.02 to 0.15mm, Piping Specifications: Supply Side: Rc 1/8, Detection Side: ø6 One-touch Fitting or ø4 One-touch Fitting in case of Rated Distance Range 0.01 to 0.03 mm, Output Specifications: PNP Output, Unit Specification: w/Unit Conversion Function, Stations: 4, Cable Option: None, Bracket Option: -, Control Unit: -, 2 Port Solenoid Valve Rated Voltage: -

Rated Distance Range: 0.02 to 0.15mm, Piping Specifications: Supply Side: G 1/8, Detection Side: G 1/8, Output Specifications: NPN Output, Unit Specification: w/Unit Conversion Function, Stations: 4, Cable Option: None, Bracket Option: -, Control Unit: -, 2 Port Solenoid Valve Rated Voltage: -

Rated Distance Range: 0.05 to 0.30mm, Piping Specifications: Supply Side: Rc 1/8, Detection Side: ø6 One-touch Fitting or ø4 One-touch Fitting in case of Rated Distance Range 0.01 to 0.03 mm, Output Specifications: PNP Output, Unit Specification: w/Unit Conversion Function, Stations: 4, Cable Option: None, Bracket Option: -, Control Unit: -, 2 Port Solenoid Valve Rated Voltage: -

Rated Distance Range: 0.05 to 0.30mm, Piping Specifications: Supply Side: G 1/8, Detection Side: G 1/8, Output Specifications: PNP Output, Unit Specification: w/Unit Conversion Function, Stations: 4, Cable Option: None, Bracket Option: -, Control Unit: -, 2 Port Solenoid Valve Rated Voltage: -

Rated Distance Range: 0.01 to 0.03mm, Piping Specifications: Supply Side: G 1/8, Detection Side: G 1/8, Unit Specification: w/Unit Conversion Function, Stations: 4, Cable Option: None, Bracket Option: -, Control Unit: -, 2 Port Solenoid Valve Rated Voltage: -

Rated Distance Range: 0.05 to 0.30mm, Piping Specifications: Supply Side: Rc 1/8, Detection Side: ø6 One-touch Fitting or ø4 One-touch Fitting in case of Rated Distance Range 0.01 to 0.03 mm, Unit Specification: w/Unit Conversion Function, Stations: 4, Cable Option: None, Bracket Option: -, Control Unit: -, 2 Port Solenoid Valve Rated Voltage: -

Fieldbus system EtherCAT compatible SI Unit

081D 0 Clear -98No.EX-OMA1023 Details of the Parameter Data SI unit (EX600-SEC3/4) Index Name (Meaning) Type Value 40x0:0 Unit parameters UNSIGNED8 8 40x0:02 Monitor short circuit (out) Enum0800 0=Disable 1=Enable 40x0:06 Restart after short circuit Enum0801 0=Manual 1=Auto Monitor 24V_C (Monitoring the power supply voltage for control and input) Enum0800 0=Disable 1=Enable 40x0:07 40x0:08

HRX-OM-M005

Fuse Cutout FLT 08 Alarm9 Reservoir High Temp. FLT 09 Alarm10*1 10 Alarm11 Reservoir High Temp.

KFx-OMV0007

Mounting/ Piping Equivalent tightening torque [Nm] KF 04 1.5 to 2.0 2 to 7 KF 06 1.5 to 2.0 3 to 8 KF 08 1.5 to 2.0 4 to 9 KF 10 1.5 to 2.0 6 to 9 KF 12 1.5 to 2.0 9 to 12 KF 04 1.5 2 to 4 KF 06 1.5 4 to 6 KF 08 1.5 6 to 9 KF 10 1.5 10 to 12 KF 12 1.5 10 to 12 Sleeve material Fitting size Appropriate tightening rotations Nylon 66 C2700 2.

Ionizer Gun

Ionizer IZG10 08 01 01 Ionizer Gun One-touch fitting Nozzle type Symbol Applicable tube O.D.

HRX-OM-K003

Fuse Cutout FLT 08 Alarm9 Reservoir High Temp. FLT 09 Alarm10 Return High Temp WRN 10 Alarm11 Reservoir High Temp.